IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Search
Advanced search
OR
Browse
Search
Volume 132, Issue 3
Displaying 1-9 of 9 articles from this issue
Show all abstracts
    • |<
    • <
    • 1
    • >
    • >|
Paper
  • Characteristics of Silicon Films Deposited by Atmospheric Pressure Plasma Enhanced Chemical Transport
    Teruki Naito, Yoshinori Yokoyama, Nobuaki Konno, Takashi Tokunaga, Tos ...
    2012 Volume 132 Issue 3 Pages 48-52
    Published: March 01, 2012
    Released on J-STAGE: March 01, 2012
    DOIhttps://doi.org/10.1541/ieejsmas.132.48
    JOURNAL FREE ACCESS
    Show abstractHide abstract
    The characteristics of silicon films deposited at 700 Torr by plasma enhanced chemical transport were investigated. The Si films were poly-crystalline, and the hall mobility was 1.9 cm2/Vs. These results indicate that our Si films are comparable with poly-crystalline Si deposited by conventional plasma enhanced CVD. We fabricated a strain gauge sensor using our silicon film. The output voltage showed a good linearity to the pressure.
    View full abstract
    Download PDF (965K)
  • Thermal Design for Infrared Sensor Pixel Operated at Atmospheric Pressure
    Yuya Shiokawa, Tatsuya Nakano, Naoki Maeda, Masafumi Kimata, Akihiro T ...
    2012 Volume 132 Issue 3 Pages 53-57
    Published: March 01, 2012
    Released on J-STAGE: March 01, 2012
    DOIhttps://doi.org/10.1541/ieejsmas.132.53
    JOURNAL FREE ACCESS
    Show abstractHide abstract
    This paper discusses the effect of thermal conduction through the air on the sensitivity of thermal infrared detectors fabricated in a bulk micro-machining process from the device's front side. ANSYS analysis shows that the thermal conduction from the edge of the freestanding detector structure to the heat sink (Si substrate) considerably impacts the sensitivity. To confirm this phenomenon experimentally, we fabricated a TEG that includes thermopile infrared sensors with various distances between the edge of the freestanding detector structure and the Si substrate. TEG evaluation shows that the ANSYS analysis is quantitatively in good agreement with the experiment. The results obtained in this study suggest an optimum design from the viewpoint of thermal conduction through the air and the fill factor of the sensitive area.
    View full abstract
    Download PDF (983K)
  • Flow Field Analysis of Micromixer Powered by Ciliary Motion of Vorticella
    Yo Hayasaka, Moeto Nagai, Nobuyoshi Matsumoto, Takahiro Kawashima, Tak ...
    2012 Volume 132 Issue 3 Pages 58-63
    Published: March 01, 2012
    Released on J-STAGE: March 01, 2012
    DOIhttps://doi.org/10.1541/ieejsmas.132.58
    JOURNAL FREE ACCESS
    Show abstractHide abstract
    We demonstrate the observation of a flow field generated by ciliary motion of Vorticella in a microfluidic chamber. We applied the property that Vorticella vibrates its cilia and create a flow field to a micromixer. The stability and mixing performance of Vorticella were measured by PIV (Particle Image Velocimetry). One cell of Vorticella mixed the half area of the microchamber. We revealed that the flow field of a single cell in a chamber was more stable than that of multiple cells.
    View full abstract
    Download PDF (1595K)
Letter
  • An Equivalent Circuit for Equation-of-Motion Solver Applied to Branched Suspension Structures
    Makoto Mita, Satoshi Maruyama, Hiroyuki Fujita, Hiroshi Toshiyoshi
    2012 Volume 132 Issue 3 Pages 64-65
    Published: March 01, 2012
    Released on J-STAGE: March 01, 2012
    DOIhttps://doi.org/10.1541/ieejsmas.132.64
    JOURNAL FREE ACCESS
    Show abstractHide abstract
    A newly developed multi-physics simulation tool for MEMS (microelectromechanical systems) has been applied to a branched suspension structure to study the versatility of analysis. More than two suspension modules or actuator modules can be connected to a mass module that solves the equation of motion without modifying the internal equivalent circuit module, thanks to the carefully designed signal handling method, where displacement and velocity are interpreted as voltage while mechanical force as electrical current. A 4-bit microelectromechanical digital-to-analog converter of displacement has been modeled as a verification to reproduce the micromechanical behavior.
    View full abstract
    Download PDF (578K)
    • |<
    • <
    • 1
    • >
    • >|
feedback
 Top