IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
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Volume 132, Issue 5
Displaying 1-13 of 13 articles from this issue
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Paper
  • An Inertia Driven Micro-actuator for Space Applications
    Makoto Mita, Manabu Ataka, Hiroyuki Fujita, Hiroshi Toshiyoshi
    2012 Volume 132 Issue 5 Pages 96-102
    Published: May 01, 2012
    Released on J-STAGE: May 01, 2012
    DOIhttps://doi.org/10.1541/ieejsmas.132.96
    JOURNAL FREE ACCESS
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    We have developed an inertia-driven micro actuator for harsh environment of space. Different from the conventional PZT-driven or other actuators, the newly developed electrostatic mechanism is free from the material property change due to temperature. A mass suspended in the actuation system is designed to collide with the internal wall to give thrust by the impact-type inchworm mechanism.
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  • Cantilever-type Thermal Microactuators Fabricated by SOI-MUMPs with U-type and I-type Configurations
    Takahiro Osada, Kuniyuki Ochiai, Kazuki Osada, Hideo Muro
    2012 Volume 132 Issue 5 Pages 103-107
    Published: May 01, 2012
    Released on J-STAGE: May 01, 2012
    DOIhttps://doi.org/10.1541/ieejsmas.132.103
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    Recently, the micro fluid systems have been extensively studied, where microactuators such as micro valves fabricated by MEMS technology are essential for realizing these systems. In this paper thermal microactuators with U-type and I-type shapes fabricated by SOI-MUMPs technology have been investigated for optimizing their configurations.
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  • Mechanical and Electrical Clamping of DEP Assembled SWCNT Using Electroless Gold Deposition
    Tatsuya Kataoka, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osa ...
    2012 Volume 132 Issue 5 Pages 108-113
    Published: May 01, 2012
    Released on J-STAGE: May 01, 2012
    DOIhttps://doi.org/10.1541/ieejsmas.132.108
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    In this paper, we report on a method to assemble and clamp single walled carbon nanotubes (SWCNTs) mechanically and electrically on patterned electrodes for developing a new tensile testing method which achieves SWCNT mechanical characterization with high throughput. Electrical transport measurement on assembled SWCNTs was conducted in order to characterize clamping property. Theoretical analysis based on the obtained result reveals that the proposed mechanical clamp is sufficiently strong to conduct tensile testing of SWCNT.
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  • Development of Double-side SiC PECVD System for MEMS
    Yasuhisa Suzuki, Shuji Tanaka, Yohei Hatakeyama, Masayoshi Esashi
    2012 Volume 132 Issue 5 Pages 114-118
    Published: May 01, 2012
    Released on J-STAGE: May 01, 2012
    DOIhttps://doi.org/10.1541/ieejsmas.132.114
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    This paper reports the development of a new double-side plasma-enhanced plasma chemical vapor deposition (PECVD) system for amorphous SiC. The PECVD system has cathode-coupling and hot wall type configuration. A wafer, which works as a cathode, is supported at the center of a quartz tube, and carbon anodes are placed at both sides of the wafer. Using tetramethylsilane (Si(CH3)4) mixed with H2 and Ar, amorphous SiC was deposited on both sides of the wafer simultaneously, and little wafer bending was observed even if the film has a compressive stress of several hundred MPa. Thus, the developed double-side PECVD system is useful to minimize wafer bending, which is often a problem for devices and fabrication processes. The fundamental properties (e.g. stress and Si/C ratio) of deposited films were investigated under different deposition conditions (e.g. gas flow rates and self-bias voltage).
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  • Infrared Collecting Lens Having Millimeter-size Diameter Integrated with Si Photo Cell
    Takuro Aonuma, Shinya Kumagai, Minoru Sasaki
    2012 Volume 132 Issue 5 Pages 119-126
    Published: May 01, 2012
    Released on J-STAGE: May 01, 2012
    DOIhttps://doi.org/10.1541/ieejsmas.132.119
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    Infrared millimeter-size microlens is prepared using the photoresist reflow. The stacked resist layers are prepared repeating the UV curing of the resist patterns. This underlying pre-form assists the material movement of the photoresist in the reflow generating the convex spherical shape. The characteristics of the stacked resist layers and the reflowing is examined. Infrared imaging performance of 1617µm-diameter microlens is confirmed using the thermography. Si photo cell shows the power generation against the visible light. The combination with the photo cell costs the degraded image quality due to the shadowing of the partial infrared at the front side electrode.
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  • Test Devices for Electrostatic Tuning of Silicon Resonators with Split Auxiliary Electrodes
    Shunya Iitaka, Kazuhiko Mizuguchi, Hideo Muro
    2012 Volume 132 Issue 5 Pages 127-132
    Published: May 01, 2012
    Released on J-STAGE: May 01, 2012
    DOIhttps://doi.org/10.1541/ieejsmas.132.127
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    Recently resonant sensors have been extensively studied to obtain high resolution. The resonant frequencies might deviate from the designed value due to manufacturing error or packaging stress, which requires the tuning technologies. This paper describes design and evaluation results of test devices for the electrostatic tuning of the silicon micro-resonators fabricated by a simple SOI-MEMS process.
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  • Fabrication of Bonding-Type Hollow Microneedle Array by Injection Molding and Evaluation of its Puncture Characteristics
    Noriyuki Ogai, Ryo Sugimura, Takuya Tamaru, Yoshihiro Takiguchi
    2012 Volume 132 Issue 5 Pages 133-138
    Published: May 01, 2012
    Released on J-STAGE: May 01, 2012
    DOIhttps://doi.org/10.1541/ieejsmas.132.133
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    A microneedle array which consists from small needles compared to a conventional metal injection needle is expected as a low invasive transdermal medical treatment device, and many fabrication approach have been conducted. In this study, we fabricated plastic hollow microneedle array by a fabrication method based on the combination of injection molding, bonding and assembly techniques. To evaluate puncture characteristics of the fabricated needle, we measured a puncture force to silicone rubber by experimental equipment using loadcell and automatic stage. Furthermore, we propose and demonstrate a new method to measure actual punctured depth from punctured trace on the needle surface modified by O2 plasma treatment.
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Letter
  • Feasible Study for Multi-photon Stereolithography Method of Electro Conductive Polymer Actuator with Complex Shape
    Junji Sone, Akihisa Asami, Katsumi Yamada, Jun Chen
    2012 Volume 132 Issue 5 Pages 139-140
    Published: May 01, 2012
    Released on J-STAGE: May 01, 2012
    DOIhttps://doi.org/10.1541/ieejsmas.132.139
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    Recently, a soft actuator was developed using an electro-conducting polymer and an ionic conducting polymer. Moreover, stereolithography that uses a femtosecond laser was researched as a method of multiphoton-sensitized polymerization. In this study, we tried a more stable and more rapid stereolithography method for fabricating an electro-conducting polymer using a protein material. From the results of this study, we found that the method was 10 times faster when an aqueous solid that included an electro-conducting polymer, a catalyst, and gelatine was used. In addition, it was stable in that the temperature of the aqueous solid was controlled at 10 degree. We built a 3D shape using the newly developed method, and we will apply this method to a complex actuator.
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