電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

論文

宇宙用慣性駆動型マイクロアクチュエータ

三田信, 安宅学, 藤田博之, 年吉洋

2012 年 132 巻 5 号 p. 96-102
発行日: 2012/05/01
公開日: 2012/05/01

DOIhttps://doi.org/10.1541/ieejsmas.132.96

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We have developed an inertia-driven micro actuator for harsh environment of space. Different from the conventional PZT-driven or other actuators, the newly developed electrostatic mechanism is free from the material property change due to temperature. A mass suspended in the actuation system is designed to collide with the internal wall to give thrust by the impact-type inchworm mechanism.

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U字形及びI字形のSOI-MUMPsによる片持ち梁構成の熱式マイクロアクチュエータ

長田貴裕, 落合邦行, 長田和樹, 室英夫

2012 年 132 巻 5 号 p. 103-107
発行日: 2012/05/01
公開日: 2012/05/01

DOIhttps://doi.org/10.1541/ieejsmas.132.103

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Recently, the micro fluid systems have been extensively studied, where microactuators such as micro valves fabricated by MEMS technology are essential for realizing these systems. In this paper thermal microactuators with U-type and I-type shapes fabricated by SOI-MUMPs technology have been investigated for optimizing their configurations.

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誘電泳動によりアセンブルしたSWCNTの無電解Auめっきによる機械的・電気的クランピング

片岡達哉, 平井義和, 菅野公二, 土屋智由, 田畑修

2012 年 132 巻 5 号 p. 108-113
発行日: 2012/05/01
公開日: 2012/05/01

DOIhttps://doi.org/10.1541/ieejsmas.132.108

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In this paper, we report on a method to assemble and clamp single walled carbon nanotubes (SWCNTs) mechanically and electrically on patterned electrodes for developing a new tensile testing method which achieves SWCNT mechanical characterization with high throughput. Electrical transport measurement on assembled SWCNTs was conducted in order to characterize clamping property. Theoretical analysis based on the obtained result reveals that the proposed mechanical clamp is sufficiently strong to conduct tensile testing of SWCNT.

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MEMSのための両面SiC PECVD装置の開発

鈴木康久, 田中秀治, 畠山庸平, 江刺正喜

2012 年 132 巻 5 号 p. 114-118
発行日: 2012/05/01
公開日: 2012/05/01

DOIhttps://doi.org/10.1541/ieejsmas.132.114

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This paper reports the development of a new double-side plasma-enhanced plasma chemical vapor deposition (PECVD) system for amorphous SiC. The PECVD system has cathode-coupling and hot wall type configuration. A wafer, which works as a cathode, is supported at the center of a quartz tube, and carbon anodes are placed at both sides of the wafer. Using tetramethylsilane (Si(CH₃)₄) mixed with H₂ and Ar, amorphous SiC was deposited on both sides of the wafer simultaneously, and little wafer bending was observed even if the film has a compressive stress of several hundred MPa. Thus, the developed double-side PECVD system is useful to minimize wafer bending, which is often a problem for devices and fabrication processes. The fundamental properties (e.g. stress and Si/C ratio) of deposited films were investigated under different deposition conditions (e.g. gas flow rates and self-bias voltage).

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Infrared Collecting Lens Having Millimeter-size Diameter Integrated with Si Photo Cell

Takuro Aonuma, Shinya Kumagai, Minoru Sasaki

2012 年 132 巻 5 号 p. 119-126
発行日: 2012/05/01
公開日: 2012/05/01

DOIhttps://doi.org/10.1541/ieejsmas.132.119

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Infrared millimeter-size microlens is prepared using the photoresist reflow. The stacked resist layers are prepared repeating the UV curing of the resist patterns. This underlying pre-form assists the material movement of the photoresist in the reflow generating the convex spherical shape. The characteristics of the stacked resist layers and the reflowing is examined. Infrared imaging performance of 1617µm-diameter microlens is confirmed using the thermography. Si photo cell shows the power generation against the visible light. The combination with the photo cell costs the degraded image quality due to the shadowing of the partial infrared at the front side electrode.

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分割型補助電極を有するSi共振子の静電チューニング用テスト素子

飯高俊哉, 水口和彦, 室英夫

2012 年 132 巻 5 号 p. 127-132
発行日: 2012/05/01
公開日: 2012/05/01

DOIhttps://doi.org/10.1541/ieejsmas.132.127

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Recently resonant sensors have been extensively studied to obtain high resolution. The resonant frequencies might deviate from the designed value due to manufacturing error or packaging stress, which requires the tuning technologies. This paper describes design and evaluation results of test devices for the electrostatic tuning of the silicon micro-resonators fabricated by a simple SOI-MEMS process.

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射出成形を用いた接合型中空マイクロニードルアレイの作製及び穿刺特性評価

小粥教幸, 杉村竜, 田丸卓也, 瀧口義浩

2012 年 132 巻 5 号 p. 133-138
発行日: 2012/05/01
公開日: 2012/05/01

DOIhttps://doi.org/10.1541/ieejsmas.132.133

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A microneedle array which consists from small needles compared to a conventional metal injection needle is expected as a low invasive transdermal medical treatment device, and many fabrication approach have been conducted. In this study, we fabricated plastic hollow microneedle array by a fabrication method based on the combination of injection molding, bonding and assembly techniques. To evaluate puncture characteristics of the fabricated needle, we measured a puncture force to silicone rubber by experimental equipment using loadcell and automatic stage. Furthermore, we propose and demonstrate a new method to measure actual punctured depth from punctured trace on the needle surface modified by O₂ plasma treatment.

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研究開発レター

Feasible Study for Multi-photon Stereolithography Method of Electro Conductive Polymer Actuator with Complex Shape

Junji Sone, Akihisa Asami, Katsumi Yamada, Jun Chen

2012 年 132 巻 5 号 p. 139-140
発行日: 2012/05/01
公開日: 2012/05/01

DOIhttps://doi.org/10.1541/ieejsmas.132.139

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Recently, a soft actuator was developed using an electro-conducting polymer and an ionic conducting polymer. Moreover, stereolithography that uses a femtosecond laser was researched as a method of multiphoton-sensitized polymerization. In this study, we tried a more stable and more rapid stereolithography method for fabricating an electro-conducting polymer using a protein material. From the results of this study, we found that the method was 10 times faster when an aqueous solid that included an electro-conducting polymer, a catalyst, and gelatine was used. In addition, it was stable in that the temperature of the aqueous solid was controlled at 10 degree. We built a 3D shape using the newly developed method, and we will apply this method to a complex actuator.

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Extended Summaries

2012 年 132 巻 5 号 p. ES5_1-ES5_7
発行日: 2012/05/01
公開日: 2012/05/01

DOIhttps://doi.org/10.1541/ieejsmas.132.ES5_1

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部門記事

国際会議報告：MNC2011; 24th International Microprocesses and Nanotechnology Conference

三木則尚

2012 年 132 巻 5 号 p. NL5_1
発行日: 2012/05/01
公開日: 2012/05/01

DOIhttps://doi.org/10.1541/ieejsmas.132.NL5_1

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研究室だより：マイクロナノ・オープンイノベーションセンター（MNOIC）

三原孝士

2012 年 132 巻 5 号 p. NL5_2-NL5_3
発行日: 2012/05/01
公開日: 2012/05/01

DOIhttps://doi.org/10.1541/ieejsmas.132.NL5_2

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特集号の論文募集(センサ・マイクロマシン英文特集号／「匂い・香りのセンシングおよび再現技術の新展開」特集／「センサ・マイクロマシン用材料とその創成，評価技術」特集)

2012 年 132 巻 5 号 p. NL5_4-NL5_5
発行日: 2012/05/01
公開日: 2012/05/01

DOIhttps://doi.org/10.1541/ieejsmas.132.NL5_4

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センサ・マイクロマシン部門役員会・委員会名簿

2012 年 132 巻 5 号 p. L5_1
発行日: 2012/05/01
公開日: 2012/05/01

DOIhttps://doi.org/10.1541/ieejsmas.132.L5_1

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