IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
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Volume 134, Issue 8
Displaying 1-10 of 10 articles from this issue
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Paper
  • On Electronic Type Cavity Ring-Down Spectroscopy
    Yuki Hirabayashi, Hirokazu Tanimoto, Yoshinobu Maeda
    2014 Volume 134 Issue 8 Pages 243-246
    Published: 2014
    Released on J-STAGE: August 01, 2014
    DOIhttps://doi.org/10.1541/ieejsmas.134.243
    JOURNAL FREE ACCESS
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    Cavity Ring-Down Spectroscopy (CRDS) is a density measuring method that applied an absorption spectroscopic method. However, CRDS needs a high-performance mirror and extremely precise optical axis adjustment. Therefore, we propose new type CRDS that used a photo-diode and a laser diode instead of a mirror. We called that system Electronic Cavity Ring-Down Spectroscopy (ECRDS). To verify characteristic of ECDRS, we performed a density measurement experiment of the ammonia gas.
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  • 2D Asymmetric Silicon Micro-Mirror Fabricated with Anodic Bonding between an Ultra-thin Silicon Film by Laser Micro-Processing and a Glass Substrate
    Takaki Itoh, Toshihide Kuriyama, Toshiyuki Nakaie, Jun Matsui, Yoshiak ...
    2014 Volume 134 Issue 8 Pages 247-252
    Published: 2014
    Released on J-STAGE: August 01, 2014
    DOIhttps://doi.org/10.1541/ieejsmas.134.247
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    Asymmetric silicon micro-mirrors are fabricated by the anodic bonding of an ultra-thin silicon film on a glass substrate, followed by the fabrication of ultra-thin silicon microelectromechanical systems (MEMS) mirror structures by laser micro-processing. Laser micro-processing, which merges the direct laser fabrication of ultra-thin silicon and anodic bonding, is easier than the silicon-on-insulator-MEMS process. Typically, polished ultra-thin silicon warps under residual stress. However, a flat surface profile was achieved on the scanning mirror of the silicon micro-mirror by anodic bonding and uniform pressure application. By vibrating the asymmetric silicon micro-mirror with an external vibrating element, we obtained a horizontal operation of 118 Hz and a vertical operation of 11040 Hz at the resonance frequency. The Lissajous pattern was also projected on the screen using the horizontal and vertical operations.
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  • Basic Characteristics of Displacement-amplified Dynamic Varifocal Mirror using Mechanical Resonance
    Takashi Sasaki, Daiki Sato, Kenta Nakazawa, Kazuhiro Hane
    2014 Volume 134 Issue 8 Pages 253-257
    Published: 2014
    Released on J-STAGE: August 01, 2014
    DOIhttps://doi.org/10.1541/ieejsmas.134.253
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    We have evaluated basic characteristics of a displacement-amplified dynamic varifocal mirror using mechanical resonance. An electrostatically actuated varifocal mirror was fabricated from silicon-on-insulator wafer and glass plate. The estimated displacement amplification of varifocal mirror was approximately 150 by using the mechanical resonance at pressure of 2 Pa. In the displacement amplified state, the beam focusing was confirmed. The confocal measurement was successfully demonstrated using the displacement-amplified dynamic varifocal mirror.
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  • Improvement of Shape Homogeneity in the Surface Microstructures Fabricated by Anisotropic Etching on 4-inch Silicon Wafer
    Sunao Murakami, Ryunosuke Ohmori, Seigi Shimizu, Takahiro Ito
    2014 Volume 134 Issue 8 Pages 258-263
    Published: 2014
    Released on J-STAGE: August 01, 2014
    DOIhttps://doi.org/10.1541/ieejsmas.134.258
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    Anisotropic wet etching is a useful processing method for the fabrication of three-dimensional microstructures on single crystal silicon (SCS) substrates. We can control the shapes of the etched microstructures and their surface condition by the combination of the etch mask patterns and the etching process conditions. In this paper, we attempted to fabricate the array of convex micro-pyramids or frustums of the pyramid on 4-inch SCS wafers using anisotropic wet etching of the silicon in the solutions containing tetra methyl ammonium hydroxide and isopropyl alcohol. We have successfully increased the shape homogeneity of the microstructures fabricated on whole surface of one side of the wafers by improving the experimental set-up for the etching process and the stability of the liquid temperature of the etching solution.
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  • FET Hydrogen Sensor by Direct Heating of Platinum Metal Gate for Fast Response Time
    Takahiro Okui, Yuki Usita, Shuzo Takeichi, Kenji Sakai, Toshihiko Kiwa ...
    2014 Volume 134 Issue 8 Pages 264-269
    Published: 2014
    Released on J-STAGE: August 01, 2014
    DOIhttps://doi.org/10.1541/ieejsmas.134.264
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    Improvement of the response time by direct heating of the gate catalytic metal of an FET sensor was investigated. The FET hydrogen sensor that has an adhesion layer (Ti) between the catalytic metal (Pt) and the gate insulator was fabricated. In a previous study, there was a problem in the reproducibility as some of the FET sensors displayed long recovery characteristics caused by hydrogen atoms diffused into the Pt thin film. To improve the response characteristics, two electrodes were connected to the gate metal, then, a pulse current was applied to the gate metal, having a resistance element. When applying the pulse current to the gate portion, desorption of the hydrogen remaining in the platinum thin film was accelerated because the platinum was instantaneously heated. Consequently, the hysteresis of the hydrogen was improved. Furthermore, reproducible response, fast response time and recovery time were achieved.
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  • Nonlinear Coupled Silicon Resonator with Binary Vibration
    Yosuke Mitsui, Takahito Ono
    2014 Volume 134 Issue 8 Pages 270-275
    Published: 2014
    Released on J-STAGE: August 01, 2014
    DOIhttps://doi.org/10.1541/ieejsmas.134.270
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    In this paper, we report on the behavior of a nonlinear coupled thin Si resonator. Nonlinear resonators exhibit stochastic resonance (SR) response by applying a noise, in which the resonator shows two vibration states. On the other hand, a thin Si has strong nonlinearity and causes mechanical coupling between resonators. The SR responses of the coupled resonators are investigated, and it is found that SR is affected by each other. Moreover, the resonant frequency can be shifted and the nonlinearity of each resonator can be switched by mechanical interaction via a thin Si plate. In addition, the phase of the stochastic resonance is also related to the vibration amplitude and the nonlinearity. It is shown that this coupled resonator functions as a logic circuit.
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