電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
136 巻, 2 号
選択された号の論文の8件中1~8を表示しています
論文
研究開発レター
  • Nguyen Van Toan, Suguru Sangu, Takahito Ono
    2016 年 136 巻 2 号 p. 41-42
    発行日: 2016/02/01
    公開日: 2016/02/01
    ジャーナル フリー
    This paper presents an optical window capable of the integration of an image sensor for the application of optical modulators. The optical window consists of high aspect ratio SiO2 pillars that can modulate the transmission light intensity by moving a liquid in and out of the spaces between pillars. The high aspect ratio SiO2 pillar structures are fabricated by reactive ion etching (RIE). SiO2 pillars together with smooth surfaces, vertical shapes (base angle ∼ 89.5°) and high aspect ratio of 12 with a depth of 12 µm, diameter of 1 µm, and the pitch of two pillars of 2 µm have been achieved. An optical window with and without liquid penetration area integrated with an image sensor for an optical modulator has been successfully demonstrated. A high transmission modulation together with a large contrast have been observed of approximately 65% and 0.86 for cases with and without matching oil penetration, respectively.
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