MEMS (microelectromechanical systems) ultrasonic array sensors were fabricated using the poly (vinylidene fluoride-trifluoroethylene) [P(VDF/TrFE)] copolymer thin films having multilayer diaphragm structures. For increased a resonant frequency of sensor, we developed a new diaphragm structure. The resonant frequency and sensitivity of new MEMS ultrasonic array sensor was estimated to be on the order of 376 kHz and -75 dBV (1V/Pa=0dBV), respectively. This MEMS ultrasonic array sensor can be adapted for ultrasonic 3D imaging and non-destructive ultrasonic testing systems.
For functionalization of Nano/Micro Electro Mechanical Systems (N/MEMS) by integrating nanomaterials, DNA origami which can arrange nanomaterials precisely on its structure is capable of being used as a scaffold. To realize this integration, single-stranded (ssDNA) was formed on the nanoscale pattern created by AFM lithography on a chip, so as to assemble DNA origami labeled with complementary ssDNA. In this paper, chemically stable hydrophobic mask layer and reaction path for forming ssDNA specifically on the nanopattern were newly used. As a result, immobilization yield of DNA origami was successfully improved by well-formed ssDNA on nanopattern, and the feasibility of the proposed immobilization method was experimentally proved.
This paper reports an evaluation scheme that prevents phase ambiguity of surface acoustic wave (SAW) sensors. We realized a wide range and high precision of temperature measurement by using both delay time and phase for the passive wireless SAW temperature sensor system specified low-power radio stations.
A synthesis of gold nanoparticles dispersion in toluene by mixing immiscible solutions in a microchannel was proposed. The visualization test using red and blue ink aqueous solutions as a substitute for gold ion and reducing agent confirmed that the fluid showed the slug flow at below the flow rate of 0.3mL/min. The synthesis results found that gold nanoparticles with diameter from 3.0 to 4.1nm was prepared at slug flow in the microchannel, and size control of gold nanoparticle enable by changing the flow rate.
Next generation robots are expected to assist humans by means of tactile sensing technologies. Relationships between physically measured values of fabrics with a friction sense tester KES-SE-SR-U (KATO TECH, Japan) and human friction sensations were evaluated. MIU (average friction coefficient), MMD (average deviation of friction coefficient) and SMD (average deviation of surface roughness) were measured with the friction sense tester. It was found that there were good correlations between the MIU, MMD, and SMD and sensual expressions, “Soft Feel”, “Rough Feel”, and “Uneven Feel”, respectively. Especially in “Soft Feel” fabrics, the measured MIUs were increased with an increase of sensual strength of the “Soft feel” of the fabrics. The subductions of the z-axis head of the tester to the fabrics were increased with an increase of sensual strength of the “Soft Feel”. The fabric fuzz brings on the subduction of the head and increasing of the MIUs. The MIUs were increased with fabric fuzz length and density. The sensual strengths of the “Soft Feel” were also increased with the fabric fuzz length and density. Therefore, it is thought that the “Soft Feel” is caused by fabric fuzz. The obtained relationships of feelings and physical values are important for the tactile sensing technologies and robot applications.