IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Volume 139, Issue 6
Displaying 1-11 of 11 articles from this issue
Special Issue on “Nanometer-scale Fabrication Techniques for Evolving MEMS”
Preface
Special Issue Paper
  • Keita Ichikawa, Yoko Yamanishi
    2019 Volume 139 Issue 6 Pages 122-127
    Published: June 01, 2019
    Released on J-STAGE: June 01, 2019
    JOURNAL RESTRICTED ACCESS

    A novel needle-free injection system by electrically induced microbubbles has been developed. First of all, we evaluated the depth of injected reagent for evaluating injection performance. Then, the cavitation-induced shock wave has been focused to magnify the injection performance by semi-spherical reflector. We successfully visualized the shock wave by Shlieren method and succeeded in measuring the pressure of focused shock wave and expansion wave by hydrophone.

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  • Hiroaki Sakamoto, Taichi Meboso, Shin-ichiro Suye
    2019 Volume 139 Issue 6 Pages 128-131
    Published: June 01, 2019
    Released on J-STAGE: June 01, 2019
    JOURNAL RESTRICTED ACCESS

    Conformation and activity control of proteins adsorbed on certain material surfaces enables the development of numerous high-performance applications. Previously, we examined the relationship between the diameter (surface shape) of polyurethane (PU) nanofibers and the conformation/activity of adsorbed protein. Proteins adsorbed on thick nanofibers (diameter: 950 nm) showed decreased activity due to large conformational changes, whereas those adsorbed on thin nanofibers (diameter: 480 nm) retained a close-to-natural shape and thus showed relatively high activity, confirming that the shape of PU nanofiber surface affects the conformation and activity of proteins adsorbed thereon. In this study, in order to prove this hypothesis, the adsorption strength of the adsorbed protein onto the polyurethane nanofiber was evaluated. As a result, it was confirmed that proteins adsorbed on thick nanofibers have higher adsorption strength than thin nanofibers. These results suggested that the thickness of the nanofibers determines the adsorption area between molecule and nanofiber surface, and affects the structure and activity of the adsorbed protein.

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  • Mizue Mizoshiri, Yuuki Iijima, Seiichi Hata
    2019 Volume 139 Issue 6 Pages 132-136
    Published: June 01, 2019
    Released on J-STAGE: June 01, 2019
    JOURNAL RESTRICTED ACCESS

    Nonspherical monodisperse polydimethylsiloxane (PDMS) microparticles were fabricated by lithography and ultraviolet ozone (UVO) treatment for self-assembly of periodic structures. PDMS solution was poured into photoresist molds on glass substrates, whereupon it was cured at 80°C. After irradiating ultraviolet to the surface of the PDMS, remaining thin PDMS films on the molds were eliminated using ultrasonic waves. Attenuated-total-reflection Fourier-transform infrared spectra indicated that the surface of the UVO treated PDMS was changed to glass SiO2-like materials, resulting that the remaining thin PDMS films could be ultrasonically removed by fracture. The PDMS microparticles were separated from the substrates using ultrasonic waves, and microparticles of a desired shaped were formed. A suspension was prepared by mixing the PDMS microparticles in deionized water, and a droplet of the suspension was placed on a hydrophobic template substrate. The PDMS microparticles self-assembled on the substrate along the template walls, leading to PDMS microparticles being closely packed. Such PDMS microfabrication would be useful for microdevices.

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  • Tadashi Ishida
    2019 Volume 139 Issue 6 Pages 137-142
    Published: June 01, 2019
    Released on J-STAGE: June 01, 2019
    JOURNAL RESTRICTED ACCESS

    I developed a MEMS liquid cell for the visualization of bubbles and droplets at the microscale using scanning electron microscope (SEM). The MEMS liquid cell has an electron transparent membrane and a microchannel. The electron transparent membrane was Si3N4 of 80 nm in thickness. I tested the wettability of the electron transparent membrane and liquid leakage, and simulated the scattering of an electron beam. The MEMS liquid cell was equipped on the SEM custom-made holder for in-liquid specimens. I observed the bubbles floating in the microchannel and the formation and growth of droplets on the electron transparent membrane at the microscale using SEM.

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