In this paper, a tube-shaped neural probe which can be combined with ultra-thin endoscope or optical fiber for optical stimulation was designed and developed. This probe is made of zirconia ceramic tube, and six electrodes were fabricated on the tip of the tube circumferentially using our developed nonplanar photofabrication process. FPC (Flexible Printed Circuit) was used for transmitting the signal from the probe to recording machine, in order not to disturb the action of a rat. The probe can be implanted in the deep brain of a rat and perform electrical recording during optical stimulation or endoscopic observation after recovery of the rat. The impedance of this probe was evaluated using three-electrodes method and in vivo test was performed using a genetically engineered rat for reaction of optical stimulation. As the result, the probe recorded neural activity of the rat at rest and after optical stimulation, and this device could be combined with the endoscope. This device may serve for optical and electrical measurement simultaneously for neuroscience researchers.

This paper addresses the hetero-integration of ferromagnetic NdFeB and piezoelectric PZT thin films for MEMS energy harvesting devices. Lamination structure of PZT and NdFeB is achieved by using barrier and passivation layer of SrRuO₃/SiO₂ thin films. The magnetic property of NdFeB is comparable to those of conventional one even after a high temperature deposition of PZT thin film. Ferroelectric hysteresis curve of PZT can be also observed. Individual pattering of PZT and NdFeB thin films in other place on a full wafer with a diameter of 100 mm is also examined for the future batch fabrication. For the batch fabrication test, the electrical and piezoelectric properties of the PZT/Si cantilever are comparable to those without NdFeB deposition process. A good magnetic property is also observed. These results demonstrate that the microfabrication process of NdFeB and PZT can be integrated at the level of batch fabrication.

A sensory test experiment (triangle difference test) was conducted using the 20-component olfactory display to confirm odor reproduction based on odor components. The essential oils used were lemon, palmarosa, carrot seed, elemi, lavender, cypress and mentha arvensis. Each one was selected from seven essential oil categories. The sensory test reveals that it was difficult to distinguish between the reproduced odor and the target one. Thus, the odor reproduction by olfactory display based on odor components was generally possible. Furthermore, we found that the participants used its features or intensities as clues to distinguish between the blended odor and the target one from a survey of the free comments on the questionnaire sheets.