センサ・マイクロマシン部門誌（論文誌E）では，平成25年度より，総合研究会で講演された論文に関する特集号を企画しており，今回は本誌2022年5月号にて刊行されることになりました。掲載されている論文は「令和3年度センサ・マイクロマシン部門総合研究会」（2021年7月26日

We have been investigating functions of interfaces between different materials in potentiometric solid-state biosensors for stabilization of the electromotive forces (EMFs). The solid-state ion sensor showed a stable EMF only when the intermediate layer contained the primary ions and chloride ions. This indicated that an efficient ion exchange process was necessary at all interfaces involved, including a thin water layer, for a stable EMF of the solid-state ion sensor. A solid-state biosensor based on the organic and inorganic mixed phase modification of a silver surface was proposed as the second example. Stabilization of the EMF and functionalization with biomolecules on the sensing surface were simultaneously achieved using silver chloride and a self-assembled monolayer with oligonucleotide probes. The proposed schemes could be useful as stable solid-contacts for potentiometric sensor in biomedical fields such as liquid biopsy platforms and wearable sensors.

A 100 m-level spiral trench over 4-inch wafer is fabricated for the coil of the superconducting magnetic energy storage. 3-stepped structure can reduce the disconnection risk caused by the random defects. Si etching scallop is decreased and smoothened by the oxidization and the grown SiO₂ etching. This improves the superconducting film quality deposited later. The fabricated coils are 102 m-long single spiral for series coil and 89 m-long 7-parallel spirals for parallel coil.

In our previous work, it has been shown that an electrostatic tactile display using fluoropolymer (Cytop) as an insulating film can present changes in friction by electrostatic force at less than 100 V. However, there are some issues in terms of electrical and mechanical durability. In this study, a device using a polyimide film as the insulating film, which has higher breakdown voltage and mechanical strength was fabricated and characterized. As a result, it is shown that no dielectric breakdown occur even at higher voltages and the durability against contact operation can be improved.

This paper addresses physical and chemical resistance evaluation of tactile sensors. We have developed cantilever-type MEMS tactile sensors embedded in the elastomer. In this work, we used a combination of silicone elastomer with excellent mechanical properties and fluoroelastomer with excellent chemical resistance. As a new embedding method for the sensor, we devised a method of embedding with PDMS with low creep and coating with a fluoroelastomer for surface protection. We further performed three evaluations to demonstrate the physical and chemical resistance of sensors. Consequently, using the devised method, we have demonstrated that the sensor with both physical and chemical resistance are feasible.