Ultra-fine Zinc oxide (ZnO) particles were prepared by pyrolyzing and oxidizing zinc bisdipivaloilemethanate (Zn(DPM)
2) vapor using atmospheric pressure CVD method. Control of particle preparation was carried out experimentally under various operating conditions, such as temperature setting of the reactor, and volume flow rates of N
2 and air carrier gases. As a result, ZnO fine particles having wurtzite structure with diameter from 0.06 to 0.5 μm were prepared by the optimizing these conditions. The crystallinity of prepared particles was found to improve at high reactor temperatures and low volume flow rate of carrier gas. Moreover, the diameter of prepared particles was smallest at the reactor temperature of 1073 K, from which it was inferred that their diameter was dominated by the growth of the crystallites below 1073 K, and by the sintering of the agglomerate above 1073 K. From the spectroscopic analysis, it was found that prepared ZnO ultra-fine particles had a high transparency in the visible range and a high shielding ability in the ultraviolet range.
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