エアロゾル研究
Online ISSN : 1881-543X
Print ISSN : 0912-2834
ISSN-L : 0912-2834
18 巻 , 2 号
Summer
選択された号の論文の9件中1~9を表示しています
特集「エアロゾルによる環境浄化テクノロジー」
研究論文
  • 近藤 郁, 白谷 正治, 渡辺 征夫
    2003 年 18 巻 2 号 p. 118-124
    発行日: 2003/06/20
    公開日: 2007/10/16
    ジャーナル フリー
    Particle contamination control during plasma processing for manufacturing semiconductors has increasingly become important because of increased integration of LSI. The behavior of particles in a plasma-processing chamber was investigated using a laser light scattering (LLS) technique and the particle growth mechanisms in plasma were clarified. Since LLS technique can measure only high concentration of particles, it is difficult to follow the behavior of particles that flow from the plasma region. Consequently, the measurement of particles in the plasma-processing chamber was conducted by a particle counter using a sampling probe inserted in the chamber. Through the comparison of the measurement results by the LLS and those with the sampling method, the feasibility of the sampling method for the measurement of particles in the plasma process was clarified.
  • 大平 博昭
    2003 年 18 巻 2 号 p. 125-132
    発行日: 2003/06/20
    公開日: 2007/10/16
    ジャーナル フリー
    In order to study aerosol behavior in a cover gas region of LMFRs (Liquid Metal Fast Reactors) , a numerical method was developed by considering the aerosol radius as one of the space coordinates. In our previous model, heterogeneous nucleation was assumed for the aerosol generation. However, homogeneous nucleation might be included since sodium cluster are considered to be produced in the cover gas region, which subsequently form aerosol particles. Therefore we developed a new calculation model by taking into account the homogeneous nucleation. The same governing equations for mixed gas and the calculation schemes as the previous study were employed in the model. As a result, although the new model gave the same distributions of temperature and mass fraction of the sodium vapor as those by the previous model and the experimental data, the previous model without homogeneous nucleation was found to give better prediction for the aerosol mass concentration in the cover gas region. From these results, it can be said that there would be almost no possibility of aerosol production via the sodium cluster and therefore heterogeneous nucleation model is sufficient for the prediction of aerosol behavior.
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