Non-destructive simultaneous analytical method for multi-elements in fine particulate matter (PM
2.5) was developed using the latest type of energy dispersive X-ray fluorescence spectrometry (EDXRF) equipped with three-dimensional polarization optics and secondary targets. Analytical results obtained by EDXRF for S, Al, K, Ca, Ti, Cr, Fe, Cu, and Zn agreed well with the certified values of SRM2783 (Measured/Certified=0.8-1.2). Analytical results obtained by EDXRF for Al, K, Ca, V, Cr, Fe, and Zn in PM
2.5 collected in Yokohama, were also in good agreement with those obtained by ICP-MS method (EDXRF/ICP-MS=0.8-1.2). Furthermore, analytical results for all target elements (Al, K, Ca, Ti, V, Cr, Mn, Fe, Ni, Cu, Zn, and Pb) obtained by modified EDXRF method using the matching library technique agreed very well with those obtained by ICP-MS method (EDXRF/ICP-MS=0.9-1.1). We achieved the multi-elemental analysis by using EDXRF coupled with fundamental parameter (FP) quantification as fast as 900 s (15 min) per sample. EDXRF method does not require any sample pretreatments prior to analysis. EDXRF method developed in this study would be quite useful for analyzing a large number of PM
2.5 samples for detailed monitoring purposes.
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