Crystalline thin films of lead sulfate, Pb
1+ySO
4+z(y=0 or 1, 0≤z≤1) could be prepared by an electron beam method with using a source of PbSO
4+xPbO (0≤x≤1), under the following conditions: substrate temperature; 300°C, acceleration voltage; 20 kV and emission current; 58 mA. The sulfate films formed were composed of PbSO
4 or Pb
2SO
5, and their compositions of the films changed with changing source composition. Either single phase of PbSO
4 (y=0, z=0), or Pb
2SO
5, (y=1, z=1), or a mixture of these phases was formed with the source composition of x=0, x=1, or approximately x=0.5, respectively. Evaluation of the humidity sensitivity for these films revealed that crystalline thin films of PbSO
4 and Pb
2SO
5 had the hydrophobic and hydrophilic properties, respectively, being one of the most promising humidity sensors because of quick response.
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