The vapor phase reaction between silicon tetrachloride and ammonia was carried out at 1050°-1500°C with an intention to produce finely divided silicon nitride, Si
3N
4. The reaction products were examined by means of X-ray diffraction, infra-red spectroscopy, chemical analysis and electron microscopy. The results are as follows:
(1) The reaction products were amorphous powders containing excess nitrogen and hydrogen such as Si(NH)
2, Si
3N
5H
3 or (SiN)
2NH. The degree of the excess decreased as reaction temperature increased.
(2) The products were finely divided and nearly sphere-shaped particles with diameter of 10 to 100mμ.
(3) By heat treatment at 1400°C for 80 to 250min., the amorphous reaction products crystallized partly into α-Si
3N
4 with an evolution of ammonia, but the excess nitrogen and hydrogen decomposed so slowly that the crystallization was incomplete. This fact suggests a high thermal stability of NH groups. On the other hand, a reaction product at -78°C, Si(NH
2)
4, transformed into stoichiometric silicon nitride more easily than the products at high temperature reactions. The less regular structure of high temperature products may perphaps be responsible for their larger resistance to crystallize into silicon nitride.
(4) The reaction products between Si(CH
3)
4 and ammonia were also amorphous as well as those from SiCl
4. In the heat treatment, howeve, the products crystallized into both α- and βforms of silicon nitride.
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