As a result of the development and the advances in vacuum technology, it was possible in the early 1960's to obtain clean vacuum systems which could achieve pressures to 10
-10 torr. At these pressures it is possible to obtain and maintain atomically clean surfaces. Shortly after the development of vacuum science and technology in the early 1960's, surface analytical tools became available for analyzing and characterizing surfaces. With the combination of a good vacuum system and analytical surface tools, it is now possible to characterize and analyze surfaces in corrosion science very carefully. The object of this review is to introduce the nature and the basic mechanism of operating the surface analytical tools include (1) AES, (2) ESCA, (3) SIMS, (4) LEED and (5) FIM.
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