低温工学
Online ISSN : 1880-0408
Print ISSN : 0389-2441
ISSN-L : 0389-2441
54 巻 , 1 号
選択された号の論文の6件中1~6を表示しています
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  • 喜田 洋介, 石野 宏和, 山森 弘毅, 平山 文紀, 神代 暁, 樹林 敦子, 佐藤 伸明
    2019 年 54 巻 1 号 p. 33-36
    発行日: 2019/01/20
    公開日: 2019/02/11
    ジャーナル フリー

    We have developed a lumped element kinetic inductance detector (LEKID) process to suppress non-uniformity in a distribution of resonant frequencies. Non-uniformity of the frequency interval between neighboring resonant frequencies can be caused by the crosstalk among the resonators in the frequency domain. We find that the non-uniformity is attributed not only to electromagnetic coupling among the resonators, but also to the non-uniform depth of over-etching on the silicon substrate surface produced during the reactive ion etching of resonator electrodes. The former is mitigated by forming a ground shield around the resonators, and the latter can be removed by forming a thin AlN layer on the substrate that acts as an etch-stopper. With the improvements, we achieve a uniform distribution of resonant frequencies that meets our requirements.

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