The phase transformation of anatase to rutile and the growth of nano primary particle in agglomerated TiO
2 powder in heat treatment and HOVF spraying processes were investigated systematically. The 200nm, 30nm and 7nm primary particles were agglomerated by spray dry method for the feedstock powders of P
200, P
20 and P
7, respectively. From the heat treatment results of feedstock powders, it was found that the phase transformation temperature of P
7 was 100K and 150K lower than that of P
30 and P
200, respectively. The growth of primary particles of P
7 and P
30 happened earlier than their phase transformation, and increased drastically with increasing the heat treat temperature. Under various fuel pressure HVOF conditions, the anatase phase content was between 86% and 5% for sprayed P
7 coating, whereas it was higher than 50% for P
30 coating. The particle sizes of P
7 and P
30 grew during spraying processes.
The anatase content of collected particles was lower than that of HVOF sprayed coatings in all conditions if phase transformation happened. Although the particle size had not significant change for P
200, it grew obviously for P
7 and P
30. It was considered that the phase transformation and growth of primary particles were frozen for the rapid cooling effect due to the low temperature substrate. Therefore, it was concluded that the coating with high anatase ratio (approximately 100%) and primary particle size of single nano might be developed using the substrate with high thermal conductivity and large heat capacity.
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