Cu-5Si-xTi filler alloys for joining Si
3N
4 were developed, and the joining ability of the alloys was investigated by measuring contact angles on Si
3N
4 in vacuum and strength of Si
3N
4 joint brazed with the filler alloys. The addition of Ti content of 3 at% or more decreased the contact angle on Si
3N
4. The alloys containing Ti content of 5at% showed the lowest contact angle and good wettability. Si
3N
4 was brazed to Si
3N
4 with the filler alloys containing Ti content of 3 at% or more, and the strength of the Si
3N
4 joint increased with the Ti content in the filler alloys. The increase in the amount of TiN and Ti
5Si
3 which was formed by the reaction of Ti in the filler with Si
3N
4 raised the strength of the Si
3N
4 joint.
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