In a previous paper the results of X-ray measurements on the residual stresses of cemented carbides coated with TiN were reported, and it was made clear that the residual stresses in CVD coated specimens were tensile and those in PVD coated specimens were compressive. From these experimental results, it was concluded that the inferiority of frcture resistance of CVD coated specimen compared with that of PVD coated specimen might be attributed to the in the tensile residual stresses in the former specimens.
To consider the origin of the tensite residual stresses in the CVD coated cemented carbides, X-ray diffraction patterns, using graphite monochromated Co radiation, taken from the cemented carbides were examined in the following three states, the state in which TiN was CVD deposited, the state in which the deposited layer was removed by electro-polishing and the state in which the annealing was given, and the results were compared with those of the PVD coated cemented carbides. The distribution and the migration of the component atoms in the interface between the deposited layer and the substrate were examined by an X-ray microanalyser.
The results are as follows:
(1) When the deposited layer is removed by electro polishing, the tensile stress in the WC phase of the CVD coated specimen is changed to nearly zero, but the compressive stress in that of the PVD coated specimen is not changed.
(2) When the coated specimens are annealed above 1173 K, the tensile stress in the WC phase of the CVD coated specimens is not changed, but the compressive stress in the PVD coated specimens are changed from compression to tension.
(3) Migration of carbon atoms from the substrate to the deposited layer by the diffusion process occurred in the CVD coated specimens but did not in the PVD cpated specimens.
(4) The shrinkage of the crystal lattice of the WC phase and η carbide phase occurred, but the η carbide phase was not formed in the PVD coated specimens.
From those results, it is considered that the tensile stress in the CVD coated specimens must be caused by the thermal stress between the deposited layer and the substrate and by the stress resulting from the shrinkage of crystal lattice of the WC phase and the η phase, but the compressive stress in the PVD coated specimen may be caused by the internal stresses within the deposited layer.
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