This study deals with the data on the changes in the microstructure of SUS304 type austenitic stainless steel implanted with B
+ ions. We first investigated the multi-energy implantation method to discuss the changes of the microstructure and the characteristics of metals with the implanted atom concentration, and achieved a homogeneous distribution of the implanted atoms. Using this method, SUS304 specimens were implanted with boron ions having energies of 2.89×10
9∼1.74×10
10 J/mol (30∼180 keV). Then the microstructure of the specimens was analyzed with AES, grazing XRD, and TEM. The results revealed that at a B atomic concentration of about 12% produced by implantation at 3×10
21 B
+/m
2, there was partial disordering of the lattice, and (Fe, M)
2B and (Fe, M)B(M=Cr, Ni) were also observed. After implantation at the 6×10
21 B
+/m
2, equivalent to about 19 at%B, the amorphous parts had increased although crystals measuring about ten nm also presented. After annealing at 500°C for 1 h, (Fe, M)
2B measuring several tens of nm and small amounts of (Fe, M)B could be observed. An X-ray diffraction peak corresponding to the α
′ martensite, which is reported in the austenitic stainless steel implanted with gas ions such as He
+ and metal ions like Au
+, was observed in the surface of SUS304 specimens implanted with B
+ ions, and its height compared to that of γ peak tended to increase in the range of about 19 at%B.
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