As one of the most attractive methods for fabricating SiC and SiC composite materials, NITE (Nano-Infiltration and Transient Eutectic-phase) method has been investigated. This paper concerns densification behavior of SiC preform where effect of SiC nano-powders' surface characteristics is emphasized. In this study, two types of SiC nano-powders, the one with high purity surface and the other with oxygen rich surface (SiO
2 layer) were used. The densification behavior of preforms during hot-pressing is analyzed and is divided into two stages. In the stage I, the lower temperature side, with and without rapid densification is interpreted to be responsible to surface property of the SiC nano-powders. Main difference in surface property of the SiC nano-powders is surface SiO
2 layer. To clarify SiO
2 mass effect on rapid densification, SiO
2 powder blending in preform is conducted and no direct evidence for elucidation of the rapid densification mechanism is obtained. In the stage II, densification behaviors of preforms with and without SiO
2 powder blending are nearly identical and SiO
2 mass effect on the stage is not detected. The utilization of oxygen rich surface powder provides high density SiC with uniform microstructure, and its flexural strength is higher than that utilizing high purity surface powder.
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