In this report, it is analyzed that the precision machining of ceramics can be done by using a new ultrasonic super-position vibration cutting of ultrasonically vibrated ceramics (USVC). And this analytical results can be confirmed by the experiments using a new vibration cutting devices with the 50 Hz electro-hydraulic power device, ultrasonically vibrated tool and ceramics. The experimental conditions are as follows : Cutting form ; constant load cutting, frequency of ceramics
fw ; 29.5 kHz, amplitude
aw ; 0-8μm, audio frequency of tool
F ; 50 Hz, amplitude
A ; 0.17 mm, ultrasonic vibration frequency of tool
f ; 19.6 kHz, amplitude
a ; 16 μm, load
P ; 0.49, 0.98, 1.96 N, tool ; diamond tool # 300, # 600, # 1000, # 1500, cutting speed
V ; 200 mm/min (
V <2π
AF), dry cutting, cutting time ; 6 s, work material ; glass, zirconia, alumina, silicon nitride, work size ; 5×5×5mm. The main results are as follows : (1) By using this new cutting process, cutting amount of 25 mm
2×0.02 mm is obtained. This cutting amount is about infinity times compared with 25 mm
2×0 mm in
aw= 0 μm conventional cutting. (2) Cutting surface roughness of 1-6 μmR
max are obtained. It is found that smooth machined surface roughness can be produced. (3) And more, it is found that tool and machined surface temperatures are not rise owing to low load and low speed of above cutting conditions. (4) Therefore, it is considered that adding the high frequency vibration stress to ceramics which has weakness in tensile stress and cut it by pulsating cutting force are key points for precision cutting of ceramics efficiently.
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