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Susumu TSUJI
1988 Volume 54 Issue 10 Pages
1831-1834
Published: 1988
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Mariko FUJII, Teruo TSUNODA
1988 Volume 54 Issue 10 Pages
1835-1839
Published: 1988
Released on J-STAGE: October 08, 2009
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Yoshikazu DOBASHI
1988 Volume 54 Issue 10 Pages
1840-1844
Published: 1988
Released on J-STAGE: October 08, 2009
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Hisashi FUJITA, Yasunori KANEKO, Hajime SHIBATA
1988 Volume 54 Issue 10 Pages
1845-1848
Published: 1988
Released on J-STAGE: October 08, 2009
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Shohachiro SATOH
1988 Volume 54 Issue 10 Pages
1849-1853
Published: 1988
Released on J-STAGE: October 08, 2009
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Yutaka HIRATSUKA
1988 Volume 54 Issue 10 Pages
1854-1857
Published: 1988
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Yoichi OBA
1988 Volume 54 Issue 10 Pages
1858-1861
Published: 1988
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Takehiko MURAKAMI
1988 Volume 54 Issue 10 Pages
1862-1866
Published: 1988
Released on J-STAGE: October 08, 2009
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Motoo KOYAMA
1988 Volume 54 Issue 10 Pages
1867-1870
Published: 1988
Released on J-STAGE: October 08, 2009
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Hiroyuki HARADA
1988 Volume 54 Issue 10 Pages
1871-1876
Published: 1988
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Seitero MIATSUO
1988 Volume 54 Issue 10 Pages
1877-1880
Published: 1988
Released on J-STAGE: October 08, 2009
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Sumio HOSAKA, Shigeyuki HOSOKI, Keiji TAKATA, Tatsuo HARADA, Keizoh KA ...
1988 Volume 54 Issue 10 Pages
1885-1890
Published: 1988
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A prototype scanning tunneling microscope (STM) was developed to apply the STM technology for practical micro surface observation. The features of the instrument are : (1) A 3-dimensional piezo inchworm mechanism to approach and select observation area, (2) a conversion technology of tunneling current fractuation to gap fractuation and (3) an automatic approach system of electrochemically etched probe tip to tunneling effect region. Various STM images were obtained both with atomic scale and μm scale. Among them are (7 × 7) reconstructed Si (111) surface, groove shape of soft X-ray gratings and groove shape of an optical disc, which were compared with SEM and TEM images. The STM is found to be practical to evaluate an extremely fine surface structure formed with recent ultra precision technology.
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Kazuo MACHIDA, Toshiaki IWATA, Masakuni KAWADA, Yoshitsugu TODA, Kouhe ...
1988 Volume 54 Issue 10 Pages
1891-1896
Published: 1988
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This paper presents the study on an actuator for a 10-meter class space manipulator, which would be required for constructing large space structures and handling payloads on orbit. The durability in vacuum environment, compactness and light-weight are emphasized in designing the actuator. A mechanical paradox planetary gear mechanism is employed for the gear box, since it has several advantages for the actuator of a space manipulator essentially, such as high reduction ratio, light-weight, high rigidity and simplicity. The tribological study on the gears in vacuum environment are conducted. The combination of hardened SUS 440 C and nitriding steel with PFPE grease lubricant shows the sufficient friction and wear properties. The life test by cyclic rotational motion is carried out, and the efficiency and wear of the gear box are investigated, relating with the paradox gear mechanism. The actuator, which has the mass of 20 kg, diameter of 200 mm and durability more than 1 000 hours in vacuum environment, were developed.
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Free-Form Surface Generation from 3 Dimensional Measurement Data
Kenjiro TAKAI
1988 Volume 54 Issue 10 Pages
1897-1902
Published: 1988
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This paper describes a free-form surface generation system for camera design. The design of cameras has some aspects that differ from that of cars or airplanes. It is necessary to use real object models like wood or clay ones not only to confirm camera shapes but also to design them. Therefore a system is necessary that can generate or modify surfaces in the computer from the real object models as well as generate NC cutter paths to make real objects. The author has developed the system that generates free-form surfaces from three dimensional measurement data. The surface is generated with the following procedure. (1) Define a boundary line to specify the region where the surface will be generated. (2) Measure the real object with the three dimensional measurement machine. (3) Generate the free-form surface to be fitted for the measurement data. The system can offset surfaces and generate NC paths for them.
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Masatomo INUI, Hiromasa SUZUKI, Fumihiko KIMURA, Toshio SATA
1988 Volume 54 Issue 10 Pages
1903-1908
Published: 1988
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The importance of the process planning automation is well understood, and many CAPP systems using expert system techniques have been constructed. For this process planning automation, form features, which are technological characteristics of the shape, have the most important meanings. Most of the current CAPP systems lack the ability of manipulating this form feature, it is difficult for them to consider the effect of machining operation in process planning. To solve this problem, a form feature modeling system is developed and incorporated in our process planning system XMAPP. XMAPP represents and uses process planning methods and constraints in the form of production rules. Those rules not only refer to the form feature information, but also dynamically manipulate them as needed in the process of problem solving. By using this form feature modeling function, a blank material product model is automatically generated based on a given machine part model. A machining operation plan is also obtained by recording this modeling process properly.
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Toyoshiro INAMURA, Naotsugu TERASAKI, Takeshi YASUI, Kazunori TAKAGI
1988 Volume 54 Issue 10 Pages
1909-1914
Published: 1988
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A method to improve finite element models for thermal deformation analyses has been proposed. In this method, a model is adjusted so that the results of analysis by the model fit experimental ones. The adjustment process consists of the following steps : first, a static deformation of a structure due to a unit force is obtained, based on Maxwell-Betti's reciprocal theorem, from the measured temperature distribution of the structure and the resulting thermal displacement measured at one point of the structure ; second, the experimental result thus obtained is compared with the analytical result obtained by static analysis by using the model ; third, the discrepancy between the two results is eliminated by modifying the analysis model. A case study has been done for a finite element model of an index unit of an NC lathe to show that this method is effective not only to improve the accuracy of finite element analysis but also to find out errors included in experimental data to be used in adjustment.
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-Two Circular Springs with Error of Dimension in Thickness-
Yasuo YOSHIMURA, Katsumasa AMADA, Takashi AKASAKA
1988 Volume 54 Issue 10 Pages
1915-1920
Published: 1988
Released on J-STAGE: October 08, 2009
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In the parallel spring movement, there is a unique point where regardless of loading position, rectilinear displacement remains unchanged. The point shows no deviation from the origin as long as each of two parallel springs are symmetrical regarding y axis passing through the origin. Error of thickness of the spring, however, causes appreciable error rate of displacement, resulting in the error of a mass to be measured by a balance. As for workableness, the circular spring is better than leaf spring, because high dimensional accuracy can be obtained by such a conventional tool as end milling cutter. Authors aim in the paper to clarify the effect of the error of the minimum thickness of the circular springs on the error rate of displacement by comparison of theoretical analysis with the experiments and Finite Element Method (FEM). The results may be briefed as followings : (1) The error rate of the minimum thickness of the circular spring, Δ
tm/
tm0 contributes approximately to the error rate of displacement, independent of the position of loading and sensors. (2) The error rate of displacement is influenced by not only the loading and measuring position but also the ratio of the minimum thickness to the radius, or
tm/
R0.
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Shigeru KOKAJI
1988 Volume 54 Issue 10 Pages
1921-1926
Published: 1988
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A mechanical link system is designed which is composed of identical units. There is no limit to the total size of the mechanism and any size is possible so long as enough units are available. Each unit has its dedicated controller and there is no central controller which supervises the total system. Each controller has the same software and it knows neither the total system size nor its location in the system at first. The controllers can talk to their neighbour units' controllers and while talking, they gradually get information and establish a well-organized distributed control system. The system accepts external commands and realizes movement on a plane. The system composed of nine units has been realized and experiments have been carried out.
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Ryutaro MIYAJI, Minoru SUDA, Masami HARADA, Kenji NEGISHI
1988 Volume 54 Issue 10 Pages
1927-1932
Published: 1988
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The externally pressurized gas journal bearing performances (load capacity, stiffness and damping) are affected by clearance pressure distribution. The pressure distribution is determined by the restrictor losses which are dependent on the type of restrictor (orifices and inherently compensated), number of restrictors, radial clearance, supply pressure and shaft rotational speed. In this paper, the pressure distribution around the restrictor is measured and influence of the above conditions on the restrictor losses is investigated. Following conclusions are obtained : (1) By the use of orifice restrictor, bearing operational clearance can be made narrower than in the case of inherently compensated restrictor. (2) The pressure distribution in the upstream and downstream of the restrictor is unsymmetrical in proportion to the shaft rotational speed, and this tendency can be ignored when the bearing clearance is smaller than 40-50 μm. (3) In case of using orifice restrictor, loss of load capacity amounts to 10-20% of the value obtained in purely viscosity calculations.
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Kazuo MARUYAMA, Hirokazu TSUJI, Koichi ICHIHARA
1988 Volume 54 Issue 10 Pages
1933-1938
Published: 1988
Released on J-STAGE: October 08, 2009
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In this study, a micro-computer-aided testing machine is designed and produced by way of experiment, which can realize various fastener tightening methods in elastic or plastic region and continuously apply an external force on the fastener. It consists of a DC-servo motor, a hydraulic cylinder, a new-type load cell, a new-type extensometer and a micro-computer, and can detect following nine factors : tightening torque, thread torque, bearing surface torque, axial tension, external force, elongation of bolt, torsional angle of bolt, rotational angle of nut, time. They are processed in a micro-computer and recorded on an X-Y plotter. Fundamental test was made with the bolts and the nuts of M 10 in elastic or plastic region of bolt material, and it is confirmed that the testing machine satisfies the specifications needed.
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Noboru KOJIMA
1988 Volume 54 Issue 10 Pages
1939-1944
Published: 1988
Released on J-STAGE: October 08, 2009
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This paper shows a geometric optical measurement method newly developed for the purpose of measuring the inner radius of a transparent circular pipe. When the parallel laser beams run through a transparent circular pipe, two penetrated ones is observed comparatively clear : one of these is called the tangential mode and the other is the 1 order reflection mode. In this method the refraction of light is applied, but there is no need to use the index of refraction of the circular pipe material by using these two modes. In addition, it is possible to measure the inner radius at any axial position of a pipe. The value of inner radius for one transparent circular pipe is given with the mean value of 50 measured values. It is estimated from the experimental results that the total accuracy of this method is (mean value ± 0.001 mm). Therefore, the new measurement method is useful for measurement of the inner radius of a transparent circular pipe.
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Five Degrees of Freedom Control of Motion
Hideki MATSUMOTO, Joji YAMAGUCHI, Hisayuki AOYAMA, Akira SHIMOKOHBE
1988 Volume 54 Issue 10 Pages
1945-1950
Published: 1988
Released on J-STAGE: October 08, 2009
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In order to realize straight motion at the highest level of accuracy, the system is introduced in which five degrees of freedom of a moving table vertical and horizontal positions, and pitch, roll and yaw angles are controlled precisely. The table is supported by active air bearings composed of piezo-actuators and air pads. Motion accuracies of the table to the straight edge masters are measured by several capacitance micrometers. Control system with PID-PD controller is designed and motion-positioning resolutions of 0.02 μm and 0.02 arc sec are achieved. Straight motion accuracies were 0.05 μm in vertical and horizontal positions, 0.06 arc sec in pitch, 0.07 arc sec in roll and 0.03 arc sec in yaw angles over 1 000 mm travel at table speed of 10 mm/s.
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Norio UCHIDA, Yoriyuki ISHIBASHI, Ryoichi HIRANO, Nobutaka KIKUIRI, Mi ...
1988 Volume 54 Issue 10 Pages
1951-1956
Published: 1988
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This paper presents an X-ray lithography alignment method insensitive to mask-wafer gap variation, using dual gratings. Diffraction light beam intensities for various dual gratings were calculated on the assumption that each grating is a sinusoidal amplitude grating. As a result, if dual gratings, consisting of a linear grating on the mask and a checkerboard grating on the wafer, are used as a alignment key, it was found that the diffraction beam intensity
I (0, 1), zero order in
x (displacement) direction and first order in y direction, is independent from mask-wafer gap variation. The fact was confirmed by more detail calculations and experiments. Alignment experiments were carried out using intensity difference Δ
I =
I1 (0, 1) -
I2 (0, 1) between two pairs of the dual gratings, which were arranged to have 180° phase shifted signal with reference to each other. A resolution better than 0.01 μm and 0.03 μm (3σ) alignment repeatability have been achieved among 25 μm and 55 μm gap variations.
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Hideki AOYAMA, Takeshi KISHINAMI, Katsumasa SAITO
1988 Volume 54 Issue 10 Pages
1957-1962
Published: 1988
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In this paper, a tactile sensing probe to detect a normal vector by using spherical thin film of resistance is newly proposed for measurement of free curved surface. The proposed probe, which is composed of spherical thin film of resistance and four electrodes, is very simple in construction and able to detect a normal vector within very low contact pressure. The method to detect a normal vector of a measuring point is clarified, and the probe is designed by a computer simulation. And then, the probe based on the proposed principle is developed, and the measurement error of the developed probe is clarified. The measurement error is under 0.7 degree. Besides, it was confirmed that form of free curved surface is able to be measured by using the developed probe.
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Interference Cancellation within Resist using 4-wavelength Light Illumination
Nobuyuki AKIYAMA, Yoshihiko YAMAUCHI
1988 Volume 54 Issue 10 Pages
1963-1968
Published: 1988
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Alignment accuracy is one of the most important factors in step-and-repeat projection aligners used for VLSI lithography. An illumination technique is described in which the interference fringes caused by the resist thickness asymmetry on the alignment mark are reduced, thus achieving high alignment accuracy. Using this technique, the following results are obtained : (1) Using 4-wavelength simultaneous illumination where wavelengths differ by increments of 27 nm, the variation of the reflected light intensity becomes less than 27% in the range of 0.5-2.3 μm of resist thickness. (2) Ideal laser wavelengths are 458, 488, 515 and 543 nm. (3) Experimental results, determined using the illumination technique on an alignment mark coated with a resist having asymmetric thickness, give an alignment accuracy of ± 0.04 μm (3σ).
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Toshiaki OHTANI, Kenryo FUJISE, Hiroshi YOKOGAWA
1988 Volume 54 Issue 10 Pages
1969-1974
Published: 1988
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The characteristics are investigated experimentally for the purpose of detecting tool wear and fracture by variations in cutting force. In this experiment, hardened steel (JIS SKD 11) is turned with a ceramic tool under finish machining condition. The main results obtained are as follows. (1) The influences of the shape of cutting edge and cutting condition on cutting force are clarified. (2) The ratio of radial force to feed force increases linearly with respect to tool flank wear width (
VB). (3) When plastic deformation of cutting edge precedes fracture occurrence, the occurrence can be predicted by the increase in radial or feed force caused by the deformation.
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Performance of a New Chip Breaker in Dry Turning
Yoshio HASEGAWA, Shinsaku HANASAKI, Junsuke FUJIWARA, Tadahiro WADA
1988 Volume 54 Issue 10 Pages
1975-1980
Published: 1988
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A new chip breaker was investigated experimentally in order to find out a more effective chip breaker than the commercial chip breaker in turning. A circular cylinder of SS 41 was turned with this chip breaker under the dry cutting. Then it was found that this chip breaker is effective for a wide set of cutting condition. Then circular cylinders of the other steels, i. e. SCM 440, S 55 C, SUS 304, SK 5 were further turned with this chip breaker in this paper. It was found that this chip breaker was almost effective to SCM 440, S 55 C, SUS 304, SK 5 under the most of the cutting condition of the depth of cut from 0.1 mm to 3.0 mm and the feed rate from 0.05 mm/rev to 0.51 mm/rev. The chip breaking performance of this chip breaker was kept up to the worn flank width of 0.2 mm. The principal and feed forces of this chip breaker were slightly greater than those of a commercial one, but the thrust force of this chip breaker was less than that of the commercial one. The surface roughness by turning with this chip breaker conforms well to the theoretical one. However, the plastic deformation of the nose corner on the insert occurred under the cutting condition of large depth of cut and high feed rate, especially for SCM 440.
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Truing Mechanism with Cup-truer
Katsuo SYOJI, Cheng Hao PIAO, Seiki MATSUI
1988 Volume 54 Issue 10 Pages
1981-1986
Published: 1988
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In the previous papers a new truing technique with the cup-truer was proposed for the preparation of diamond wheels. This paper describes the truing mechanism of diamond vitrified grinding wheels. The main results obtained are as follows : (1) The effect of truing with a cup-truer mainly depends on the impact of silicon carbide grains torn off from the truer against diamond abrasives and bond bridges. (2) The softer a cup-truer is, the larger grains will be torn off from the truer, leading to a higher truing rate and a rougher surface texture of the diamond wheel. (3) In truing with an impregnated diamond tool, which has almost no grains to be torn off, the grains sticking out most on the grinding wheel are removed in order. (4) In the early stage of grinding process, the protruding grains of silicon carbide filled as a filler in the vitrified bond are rapidly flattened. (5) For difficult-to-grind materials it is desirable to use a diamond vitrified wheel without a filler such as silicon carbide abrasives.
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Model for Calculating the Stress Distribution near Work End and Results
Suehisa KAWAMURA, Shigeki OKUYAMA, Junji YAMAKAWA
1988 Volume 54 Issue 10 Pages
1987-1992
Published: 1988
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This paper deals with a burr-formation mechanism on a work end by using a finite element method. In the calculation, grinding temperature and cutting force for a cutting point are considered. Therefore, the thermal and mechanical stress distribution and plastic deformation of the workpiece end are derived. The main results obtained are as follows : (1) The grinding temperature causes a plastic deformation on a workpiece-surface layer, while it is not enough to produce a macroscopic plastic flow. (2) The plastic flow is produced mainly by the grinding force. (3) In the vicinity of the workpiece end, the plastic-flow layer is expanded at an angle of 21 -27° with respect to the grinding direction. The results shows a similar tendency of experimental ones.
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Influence of Tool Setting Angle on Machined Surface Roughness
Yukio MAEDA, Masami MASUDA, Takasi NISHIGUCHI, Masasi SAWA, Ryuu ITOO
1988 Volume 54 Issue 10 Pages
1993-1998
Published: 1988
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A machined surface roughness can be generally improved at a small geometrical surface roughness estimated by both a tool shape and a feed rate, even if a steady vibration exists between a tool and a workpiece. However, tool setting angles for straight tool are extremely effective upon a machined surface roughness. This paper deals with diamond turning experiments of Al-Mg alloy using straight tools with sharp cutting edges. The effect of tool setting angles on machined surface roughness was examined to study the difference between the machined surface roughness and the theoretical surface roughness estimated with a steady vibration model. Tears with 0.1 μm depth which are generated on the side cutting edge deteriorate the machined surface roughness. The tears are cut off by the trailing end cutting edge at a negative tool setting angle. Burrs generated at the tool setting angle less than -0.1° are another cause for the deteriorating the machined surface roughness.
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[in Japanese], [in Japanese], [in Japanese], [in Japanese]
1988 Volume 54 Issue 10 Pages
1999-2005
Published: 1988
Released on J-STAGE: October 08, 2009
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