反射物体を対象としてモアレ等高線による形状測定を行った.一般のモアレトポグラフィ法のみでは測定感度が不十分であるために, 位相シフト干渉法を導入することによって感度を高めるとともに, 物体表面の凹凸の自動判別をも行いうる手法を導入した.その結果,
1.基準となるものは明暗格子1枚であり, シンプルな光学系が組み立てられる.
2.等高線を用いた計測および表示を行っており, 三次元形状の直観的理解がしやすい.
3.70μm程度の測定深度を有するとともに, 3μm程度の分解能をもつ面計測方式である,
といった特徴を有する測定システムを開発することができた.

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A laser beam writer is developed for high precision and easy operation. The design concept is as follows. The range of precision is about 1 μm, which covers the area between the electron beam writer and the photo plotter or photo reduction. A larger writing area and smaller body is realized for easy operation and maintenance. The construction of the writer is reported in detail. The system has two key units : an air slide table with built-in linear motor and a laser focusing optical device assisted by a focusing servomechanism. For easy operation, two types of command language and P.C. CAD are incorporated in the software system. A line and space pattern is written for evaluation and some experiments for line width control are reported. Finally, several applications are suggested, such as computer-generated holograms, an optical wave guide, an optical integrated circuit, and so on.

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The purpose of this study is to find out an ideal design principle which has the characteristics of generality, practicality and computability. In this study, the attention is paid to topology which has a metric space concept in itself. And the design knowledge is organized in this metric space. This organization is expected to optimize the structure of the design knowledge and deal with the synthetic nature of design. In the 1st report, the mechanism of function operation is modeled mathematically. In the 2nd report, a mathematical model of conceptual design process is deduced and convergence policy to find out design solutions is discussed from the viewpoint of a metric in function space. And a methodology of Intelligent CAD is deduced based on these mathematical models. In this paper, the design principles deduced in the previous papers are discussed from the viewpoint of thinking efficiency. First, they are discussed from the viewpoint of operation of the abstract concepts. Secondly, they are discussed from the viewpoint of generating the abstract concepts. At last, this study is described as one approach to abduction.

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In this paper, we discuss the method of design experiments that is an experimental technique to obtain practical information of design processes, and furthermore we show an analysis on drawing processes using the results of design experiments. First, we describe the method of design experiments that is based on protocol analysis. Then we examine the experimental environments of twelve experiments that we performed in this research. Although protocol analysis mainly concerns verbal information, drawing information is also important in design. We developed an experimental drawing system to improve the method to record drawings and drawing processes. Second, we analyze drawing processes with the drawing information obtained by the drawing system. We compare mental rates of design experiments with other tasks, and show how the drawing order is influenced by relations among figures.

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This paper deals with the surface temperature distribution, which dominates wafer flatness in the mirror polishing of Si wafers. Each of polishing pressure, the speed of a polishing plate, polishing load and the surface structure of a polisher, affects on ΔT in the range of 0.2-0.6 K. Either the flow rate of polishing reagent or polisher loading, however, affects more dominantly on the temperature distribution ΔT in the range of 0.3-1.3 K. Therefore, it is much more important to control both the flow rate of polishing reagent and the polisher loading than the former factors in order to improve the wafer flatness.

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放電加工における放電点検出の方法として電極上の電位差測定による方法を新たに考案した.そして, 理論的, 実験的に電流法と比較して以下に示す理由で検出特性が優れていることが明らかとなった.
(1) 分割された給電線に生じる誘導起電力を測定することにより, 放電開始からきわめて短い時間での感度の高い放電位置の検出が可能である.
(2) 電位差法の感度は電極のインダクタンスに依存するので, 例えば, 銅のような比抵抗の低い材料を電極材料に用いても感度の高い放電位置の検出が可能である.
(3) 電位差法では, 検出感度に対する給電線の長さの影響が少ない.

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When the values of coordinates and gradients at some points on a grinding wheel profile are given, a work tooth profile ground by the grinding wheel is analytically decided. By this method, transmission of errors (setting angle error, decrease in radius of grinding wheels by truing, positioning error, tooth profile error) from a grinding wheel to a work is analyzed. The transmission of errors is denoted by matrices. The quantity of errors is pointed out clearly according to the difference of specification of a work or a grinding wheel. A result that transmission of errors is decreased by selecting a best setting angle of grinding wheel is obtained.

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直動ボールガイドを用いてLMBGシステムとしてXテーブルを構成し, 種々の水平方向ミスアライメントならびに0, 4, 12μmの3種類の予圧を付与してテーブルの案内精度を測定し, これまでにたてた負荷分布式を用い計算した結果と比較検討した.その結果,
(1) 計算結果は実験結果によく合致するが, 実験値はガイドブロック顎部の曲げ変形が生じるため計算値よりさらに精度平均化効果が大きく現れる.
(2) 予圧を増大すると精度平均化効果は増大する.
(3) ミスアライメントに直交する変位成分は, 無視し得るほど小さい.
(4) 玉の負荷圏への出入りに伴い, 微小ではあるが1次から5次までの玉通過振動波形を観測した.

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The purpose of this paper is to develop a non-contact profile sensor which will be able to measure 3-D free-form metal surfaces as well as 3-D model shapes. The proposed profile sensor called optical ring image sensor has two major advantages. First, reflection light from a target surface in optical axis can be detected in all direction using a ring slit. Second, the radius of optical ring image is linearly proportional to the displacement of the surface in optical axis. From computer simulation by means of ray-tracing method, this sensor makes it possible to measure the displacement of a target surface within an accuracy of ±20 μm for inclined metal surface up to ± 45 degrees, even though it exists specular reflection. Moreover, it is possible to measure acculately the displacements in edges because the size of optical ring image is unaffected by edge profiles.

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The early detection of minute cancer is very important, but that is difficult when using X-ray, ultrasonic, or an endoscope because of the small size and the disturbance by mucus. However that is said to be easy with direct palpation if possible. Then the paper proposes a new hardness sensor for cancer palpation, which is inserted into a human body with an endoscope, presses the object surface uniformly by a balloon through elastic beams, and detects the hard part based on the deflection of the beams. The sensor features : 1) no-damaging property with its flexibility, 2) independence from the existence of mucus and the object shape, and 3) simple structure, etc. The paper also introduces the conductive rubber for plural strain gauges. The results of measuring experiments with the constructed sensor showed the availability in a straight and an uneven pipes and the possibility of 2-dimensional measurement.

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A new method for evaluating the coordinate error of commercial CMMs by using a newly developed three-dimensional tracking laser interferometer is proposed. The length between a moving Cats'-eye retroreflector set to the probing head of a CMM and the rotation center of the 3 D tracking interferometer is measured and used for estithating the coordinate error at each sampled point based on nonlinear least squares. The measurement accuracy with the proposed method including the optical path accuracy of the Cats'-eye retroreflector and the structural accuracy of the tracking mechanism is evaluated both theoretically and experimentally.

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In order to suppress pressure pulsation in hydraulic lines, bladder type accumulators are used widely. Especially, in-line accumulators whose bladder gas pressure is adjusted appropriately show outstanding performances. The effective range of the bladder gas pressure, however, is quite narrow and the performances drastically reduce according to even a slight change of mean hydraulic pressure, length and diameter of pipe, etc. In the present paper, firstly, the fundamental characteristics of the in-line accumulator have been investigated in detail by using frequency analysis. Secondly, a self-adjustable hydraulic pulsation suppressing system has been developed by attaching pressure transducers, a board computer with a universal pulse processor, hydraulic to pneumatic converter, etc. to the accumulator. As the result, it has been confirmed that the developed system is remarkably effective in suppression of the pulsation when mean hydraulic pressure changes frequently.

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An automated particle detection system for patterned wafers has been developed. A specific area of the wafer is illuminated with a laser at 45° diagonal in reference to an orientation-flat shaped on the wafer. The diffracted light is detected by an objective lens. The signal obtained by the memory-mat on a wafer is reduced to 1/8-1/15 by setting the printed spatial filter on the conjugate image plane of a Fourier transformed plane in an objective lens. By using the subtracted image signal with the spatial filter, 0.5μm standard particles on a multi-layer pattern can be detected.

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把握力振動式グリッパを考案した.このグリッパの動作原理は, 次のようにまとめられる.
(1) 把握力を三角波形で振動させて物体を把握すると, 物体は, 把握力の下限値付近の時刻T₁ですべり始め, 上限値付近の時刻T₂ (T₃) でクランプされ, 次の周期で物体がすべり始めるまでオフセットローラに追従して上昇する.
(2) 三角把握力の下限値F₁と上限値F_uおよびオフセットローラの周速度V_Pの値を適当な値に調節すると, 1周期当たりのすべり量ΔSが零となって, 物体が平衡把握状態で把握される。
(3) 最適把握状態は, T₁, T₂ (T₃), ΔSの値をT₁=T/2, T₂ (T₃) =TΔS=0になるように, F_b, V_pの値を調節することによって得られる.

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A piezoelectric cycloid motor has been proposed by the authors, and experiments revealed that the rotational principle was effective, and the motor kept its rotational speed constant up to its maximum output torque. However, the maximum torque was small, and the rotational accuracy was poor. In this report, to improve them, the motor is driven in a high frequency range including the motor's resonance frequency. Because the driving amplitude of the stator is increased by resonance, and the inertia effect of the stator is expected. As the results the maximum output torque has been increased to six times; the rotational accuracy has been much improved.

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This paper describes a two-color interfeorometric sensor for evaluating the surface of processed material. An interferometer, which uses 633-nm and 543-nm He-Ne lasers as light sources, is phase-locked by the 633-nm wavelength interference fringe using a proportional control technique with an actuator. In this sensor, the output signal from the 543-nm wavelength interference fringe shows the wavelength characteristics of the material refractive index and the reflectance on material. The test material is illuminated by means of a microscope objective and is scanned by a high-precision stage. From experimental results, the sensor is found to have a resolution of about 1 nm and applicable to the surfaces evaporated by Al and Au, and the titanium surface processed by N-ion beams.

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