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Volume 59, Issue 7
Displaying 1-28 of 28 articles from this issue
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Shoichi KURODA1993 Volume 59 Issue 7 Pages 1057-1060
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
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Teiichi TAGUCHI, Mitsuru YOSHIDA1993 Volume 59 Issue 7 Pages 1061-1062
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
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Yoshiki KISHI1993 Volume 59 Issue 7 Pages 1063-1065
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
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Satoshi KANAI1993 Volume 59 Issue 7 Pages 1066-1068
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
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Mitsuaki YAMASHITA, Hideya KONDO1993 Volume 59 Issue 7 Pages 1069-1071
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
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Katsumasa SAITO1993 Volume 59 Issue 7 Pages 1072-1074
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
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Takeshi KISHINAMI1993 Volume 59 Issue 7 Pages 1075-1077
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
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Hiroshi SUZUKI1993 Volume 59 Issue 7 Pages 1078-1079
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
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Hiroyasu IWABE1993 Volume 59 Issue 7 Pages 1080-1081
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
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Takashi MIYOSHI1993 Volume 59 Issue 7 Pages 1082-1084
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
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Akira Joe, Ikuo Ikeda1993 Volume 59 Issue 7 Pages 1085-1090
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
JOURNAL FREE ACCESSGenerally it is said that fatigue by repeat loading does not occur in amorphous glass except static fatigue. In this paper, offering suggestion for measurement of limiting infinitesimal displacement applying Newton's rings as marking point, it is tried to accomodate measuring displacement (fatigue) value at center of specimen by testing method of three points bending repetitional fatigue. As a result, deflection of about 200μm value occurred by fatigue was obtained for the specimen of 400mm in length. Further, in consequence of preliminary experiment, the measurement accuracy by this whole device was about ±0.016μm.View full abstractDownload PDF (5595K) -
Kanji MASHIMO, Syuuya KITABAYASHI, Yoshihisa TANIMURA1993 Volume 59 Issue 7 Pages 1091-1096
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
JOURNAL FREE ACCESSTo measure 3-dimensional shape of an object, a new optical & noncontact measuring instrument is proposed in this paper. The astigmatic focus error method is applied to the new instrument in order to detect a focused positioning signal of an object surface to be measured. The signal, that is, the scattered light of laser reflected on the surface, is detected by using the optical components of a linear polarized laser, a polarizing beam splitter and so on. The new instrument mainly consists of an optical sensor newly designed, Z-axis table moved by the signal and X/Y tables to move the object. Using the new instrument, the ball surface of 4 mm diameter, coated with white paint and compared with ideal shape, can be measured over ±83° in inclination angle and with 2.1 μm in standard deviation from theoretical value.View full abstractDownload PDF (869K) -
Takahiro Aiba, Ryoji Murata1993 Volume 59 Issue 7 Pages 1097-1102
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
JOURNAL FREE ACCESSThe present paper describes damping effects of the impact damper having a spring supported impactor. The transient response of the damper is studied for various initial conditions and wide range of vibration parameters based on numerical simulation and also experiments. Some important results of the study are as follows: 1) Effect of the damper is clearly varying with time. 2) The damping characteristics of the system can be evaluated by introducing equivalent-damping ratio and residual-amplitude ratio. 3) It is found that the damper shows the optimum-composite-damping effect if natural frequency ratio is selected around 0.40.6.View full abstractDownload PDF (779K) -
Ultra-Precise and Fast PositioningMichio TAKAHASHI, Jiro OTSUKA1993 Volume 59 Issue 7 Pages 1103-1108
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
JOURNAL FREE ACCESSThe positioning system using a feedback control consists of a servo motor, a drive roller with preloaded mechanism, a driven slider supported by air bearing and a laser measuring apparatus, aiming at ultra-precise and fast positioning. This paper presents : (1) At 1 μm step positioning, nm accuracy with a mean positioning error of ΔXe=-1.7 nm and a standard deviation of σx = 3.2 nm could be obtained in 100 positioning trials. (2) At 300 mm point-to-point positioning, high accuracy of ΔXe= 0.017 μm, σx = 0.16 μm, and a short settling time of ts= 1.26 seconds were also achieved. (3) The relation between the motor's small torque and table small displace-ment has an elastic characteristic with hysteresis.View full abstractDownload PDF (851K) -
Yukitoshi Otani, Atsushi Tanahashi, Toru Yoshizawa1993 Volume 59 Issue 7 Pages 1109-1113
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
JOURNAL FREE ACCESSBirefringence occurs when light passes through a magnetic fluid in a magnetic field. The phase difference caused by this phenomenon increases as the magnetic field is intensified. We have proposed an optical heterodyne method using Stabilized Transverse Zeeman Laser(STZL) for the detection of this phase difference caused by a magnetic field. Here analytical and experimental considerations are given to improve the conventional method. Higher sensitivity can be realized owing to the reflection type sensing used in an improved optical arrangement. An optical fiber is also proved to be applicable when the temperature is compensated for.View full abstractDownload PDF (682K) -
Nobuyuki AKIYAMA, Masayoshi SERIZAWA, Fumio MIZUNO, Masami IKOTA, Kats ...1993 Volume 59 Issue 7 Pages 1114-1120
Published: July 05, 1993
Released on J-STAGE: January 20, 2010
JOURNAL FREE ACCESSAn on-machine printing system for a spatial filter has been developed to detect small particles on the memory-mat of a 0.3 μm LSI. A minicopy film is used for the base of spatial filters. A pattern on the filter is printed by a thermal head using a ribbon painted with ink of synthetic resin. The maximum size of the printed spatial filter is 16 × 16 mm. The transmission factors of printed and transparent parts are 0.92% and 92% respectively. The printing time is 5 seconds. The signal obtained at memory-mat decreases to 4% using this spatial filter and 0.6 μm standard particles are detected at an SN ratio of 3.View full abstractDownload PDF (1060K) -
Evaluation of Measuring System by using Standard ParticlesYuzo MORI, Hiroshi AN, Tosihiko KATAOKA, Katsuyoshi ENDO, Kohji INAGAK ...1993 Volume 59 Issue 7 Pages 1121-1126
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
JOURNAL FREE ACCESSNo system has yet been developed to detect the nanometer (nm) order particles. This paper deals with the development of a new method for measuring particle sizes of nm order on the raw silicon (Si) wafers by using a light-scattering method with Ar+ laser. In this study, the sample models to be measured were made by adhering the standard particles, of which the particle diameter is known, on the surfaces of Si wafers. Using the developed measuring system for the sample, the measurement of particle diameter was attempted to evaluate this measuring method. It was confirmed that this measuring method had an ability to detect the diameter of standard fine particles with relatively high accuracy. According to this, it was able to be verified that this measuring method could nondestructively measure the particle diameter in nm order.View full abstractDownload PDF (992K) -
Etsuo MARUI, Masatoshi HASHIMOTO, Shinobu KATO1993 Volume 59 Issue 7 Pages 1127-1132
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
JOURNAL FREE ACCESSIn this paper, the technique how to estimate the interface stiffness is discussed by considering the surface topography at the interface and material properties. The interface stiffness has a close relation to the vibratory characteristics of machine structures. The interface stiffness is originated from the spring action of micro asperities on interface in normal or parallel directions to the interface. The theoretical interface stiffness is obtained as a function of surface topography and material properties. The calculated results are compared with the experimental results. In the estimation of the interface stiffness, it must be considered that the elastic properties of micro asperities are different from that of the base material, owing to the deformation when the interface micro asperities are formed.View full abstractDownload PDF (855K) -
Simulation Analysis of Cutting MechanismKatsuhiro MAEKAWA, Ikuya OHSHIMA, Akihiko KUBO, Takeaki KITAGAWA1993 Volume 59 Issue 7 Pages 1133-1138
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
JOURNAL FREE ACCESSSimulation analysis based on the empirical flow stress, friction and wear characteristic equations of Ti-6Al-6V-2Sn titanium alloy has been conducted to clarify the effects of cutting speed and feed upon the cutting mechanism. Due to both strong temperature dependence on flow stress and high friction on the rake face, the chip contact length shortens with increasing cutting speed. As a result, the heavy mechanical and thermal loads act on the tool tip, causing the severe wear to take place. By increasing feed and decreasing cutting speed, however, the chip contact length is widened and the concentration of the tool tip loads is relieved, which leads to the reduction of the wear. The simulation based on a wear characteristic equation reveals the above-mentioned mechanism, giving a physical meaning of the improvements in tool wear and cutting efficiency.View full abstractDownload PDF (864K) -
On the Process Principle and the Behaviours of Magnetic Finishing ToolTakeo SHINMURA, Hitomi YAMAGUCHI1993 Volume 59 Issue 7 Pages 1139-1144
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
JOURNAL FREE ACCESSThe final purpose of this investigation is the development of a new efficient precision finishing process applying a lineary travelling magnetic field by which the inner surface of slenderized long tubing under 10 mm in dia. will be able to be finished smoothly. In this report, first the finishing principle is described of this new process. Second, the finishing equipment is made in which many electromagnetic coils are arranged linearly along the long tubing axis and are flowed three-phase AC current. From the test results on the propelling behaviours of magnetic finishing tool, it is clarified that (1) the finishing tool is driven by magnetic force with the same speed as one of outer linearly travelling magnetic field, (2) the driving force is increased with the increase of magnetic field strength, and (3) the rolling motion is given to the magnetic finishing tool.View full abstractDownload PDF (1147K) -
Thermal Deformation of Workpiece in Traverse GrindingTokuhiko NISHIHARA, Shigeki OKUYAMA, Suehisa KAWAMURA, Shinsaku HANASA ...1993 Volume 59 Issue 7 Pages 1145-1150
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
JOURNAL FREE ACCESSThermal deformation of a workpiece attracted by a magnetic chuck in traverse grinding is theoretically investigated by a finite element method. The results are compared with the measured profiles of ground surfaces. Necessary force of a magnetic chuck to constrain the warp of workpiece bottom surface is also computed. The main results are as follows:(1) Central part of the workpiece bottom surface separates from the magnetic chuck by the thermal stress due to the grinding heat. (2) The local thermal deformation at the central part of a workpiece increases with the number of grinding passes. Around the entrance and exit part of each grinding pass, the local thermal bending deformation occurs. (3) The separation of the workpiece bottom surface and the local thermal deformation lead to a concave profile of the ground surface. (4) When a workpiece of 10×60×40(mm) in dimension is ground under a condition of 10 μm down feed and 5mm cross feed per a pass, the necessary constraining force is about 12MPa.View full abstractDownload PDF (1039K) -
Shear Localized Chip Formation Realizing Finite Amplitude Chatter VibrationToshiyuki OBIKAWA, Hiroyuki SASAHARA, Takahiro SHIRAKASHI, Eiji USUI1993 Volume 59 Issue 7 Pages 1151-1156
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
JOURNAL FREE ACCESSFinite amplitude chatter vibration can be attributed to the non-linearity of cutting processes and machine tools. In this paper, it is found that just above the stability limit a new non-linear mechanism of cutting process, i.e., shear localized chip formation realizes finite amplitude chatter vibration. This is because shear localized chip formation reduces the input energy to vibration system from cutting process before the tool comes out of work or the tool flank face collides the machined surfaces. Thus shear localized chip formation is predicted by energy approach for the analysis of finite amplitude chatter vibration. A criterion for the beginning of the localized shear is determined by the cutting experiment with the tools of large negative rake angle and at constant undeformed chip thickness. Cutting force variations and shape of shear-localized chip calculated for the dynamic cutting process in wave removal sufficiently agree with experimental results.View full abstractDownload PDF (1207K) -
Takuji Magara, Hisashi Yamada, Seiji Sato, Takeshi Yatomi, Kazuhiko Ko ...1993 Volume 59 Issue 7 Pages 1157-1162
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
JOURNAL FREE ACCESSThis paper describes the method for improvement of surface quality by non-electrolysis wire electric discharge machining (Wire-EDM). In wire-EDM which generally employs low-conductivity water as dielectric, electrolytic current may flow via the dielectric and an electrolytic effect may cause change of properties over wide area of a workpiece. A non-electrolysis power supply developed to prevent electrolytic corrosion permits a full range of non-electrolytic machining from rough machining to finishing, achieving high-quality (surface) machining with high productivity. In life tests using actual dies, non-electrolytic machining produces few burrs on punched products and increases die life significantly.View full abstractDownload PDF (1128K) -
One Side Mirror Polishing Considered with Etched Wafer RoughnessKiyoshi AKAMATSU, Takao NAKAMURA, Masami MASUDA1993 Volume 59 Issue 7 Pages 1163-1168
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
JOURNAL FREE ACCESSThis paper deals with double-sided polishing technology used in Si wafer production lines. The surface roughness and flatness of Si wafers, polished on a double-sided polishing machine with etched wafers, were examined, in order to obtain a mirror surface on one side for fabricating semiconductor elements, and a rough surface on the reverse side for guarding against defects generated in the VLSI production lines. The difference in roughness between the two surfaces depends not on the fact that two kinds of polishers are being used, but on the large variation in the polishing velocity applied to the upper plate and to the lower one. A rough surface of 1.2 μmRmax was produced without any effects on the roughness and flatness of the mirror surface by using different polishing speeds for each side.View full abstractDownload PDF (1124K) -
Masahiro MIZUNO, Toshirou IYAMA, Yoshiyuki ENDOU, Yukio MORI1993 Volume 59 Issue 7 Pages 1169-1174
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
JOURNAL FREE ACCESSThe principal factor of the blade deflection in the outer-blade slicing is the asymmetric wear which is observed on a cross-section of the outer edge of blade. In the case that cutting is made under a constant table speed, using a blade with an asymmetric wear, the blade deflection varies with the change of the contact arc length between the blade and the workpiece. Such a variation of the blade deflection in cutting effects the flatness of the cut-off surface. It is considered that the flatness is improved by controlling the grinding force so the maximum value of the blade deflection in the contact arc region keeps a constant value during a one-pass cutting process. On the basis of this consideration, a controlling method for improving the flatness of the cut-off surface is proposed and an experiment on it is made. As the results of the experiment, it is clarified that the controlling method proposed in this paper is effective in the improvement of the flatness of the cut-off surface and also the cutting efficiency.View full abstractDownload PDF (913K) -
Force and Friction AngleYoshifumi OHBUCHI, Tetsuo MATSUO, Tatsuo OKAMURA1993 Volume 59 Issue 7 Pages 1175-1180
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
JOURNAL FREE ACCESSIn this paper, single-grit orthogonal cutting has been performed on a carbon steel with shaped CBN and diamond grains to understand the difference in surface quality and grinding force between CBN and diamond wheels. The cutting and thrust forces were measured by means of load washer under different negative rake angles, cutting speeds, and depths of cut. In each cutting condition, the thrust and cutting forces increased linearly with increasing cross sectional area of groove. Forces with diamond grains were greater in almost cases than the cutting with CBN grains, and much influenced by cutting condition. On the other hand, no significant influence except for rake angle was seen in forces in cutting with CBN grain. Furthermore, the friction angles under each cutting condition was calculated to detect the deformation condition in front of rake face at chip formation. It changed largely with grain type, rake angle and cutting speed. There was a quite difference between diamond and CBN grains. The reason for the difference would be the difference in coefficient of friction of two grain types.View full abstractDownload PDF (925K) -
Drawing of Optical Filters with One-dimensional Density DistributionTsuyoshi TOKUNAGA, Yoshihiro TANAKA, Toshiyuki MIYAZAKI, Toru YOSHIZAW ...1993 Volume 59 Issue 7 Pages 1181-1186
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
JOURNAL FREE ACCESSA pattern drawing system on a photographic film was developed. This system consists of a laser diode for a light source, and a cylindrical lens for changing the beam profile to the linear. Before drawing patterns, the exposure characteristics were measured on the LD wave length, and then LD power was modulated for desired patterns. Some diffraction patterns were calculated depending on numerical aperture of collimators. Rotating the collimated beam by the dove prism, the most suitable focusing direction was obtained experimentally for uniform power distribution on the focus of the cylindrical lens. Using an 8 bit D/A converter, one dimensional arbitrary patterns were drawn with 256 level gradations of density. For example, periodic sinusoidal patterns, fractional distribution patterns for optical range meters. Drawn area of the film was 200mm (film length)×9mm(linear beam length) by one scanning.View full abstractDownload PDF (748K) -
Toshio KOJIMA, Yutaka KUGAI, Ichiro NAKAMURA, Fumihiko KIMURA1993 Volume 59 Issue 7 Pages 1187-1193
Published: July 05, 1993
Released on J-STAGE: July 23, 2009
JOURNAL FREE ACCESSThis paper describes a STEP data exchange system developed by a program generation method. In the method, data exchange specifications are defined using EXPRESS data description language as a set of STEP data model definition of an Application Protocol, CAD data model definitions of manifold solid B-rep model and the conversion algorithms between the data models. Principal parts of the data exchange system, using CAD data file as input and output, is generated from the EXPRESS definitions with a common data repository. The data exchange system is proved to be applicable easily to each application protocol in a general manner and effective in its exact implementation of STEP, through the data exchange experiments between two commercial CAD systems.View full abstractDownload PDF (1322K)
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