精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
61 巻, 4 号
選択された号の論文の27件中1~27を表示しています
  • 吉川 弘之
    1995 年 61 巻 4 号 p. 465-468
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
  • 福田 収一
    1995 年 61 巻 4 号 p. 469-472
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
  • 中島 尚正
    1995 年 61 巻 4 号 p. 473-476
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
  • 田浦 俊春
    1995 年 61 巻 4 号 p. 477-480
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
  • 中島 昌也
    1995 年 61 巻 4 号 p. 481-484
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
  • 桐山 孝司
    1995 年 61 巻 4 号 p. 485-488
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
  • 久保田 晃弘
    1995 年 61 巻 4 号 p. 489-492
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
  • 上田 完次
    1995 年 61 巻 4 号 p. 493-496
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
  • 設計論とAbductionを中心に
    柳生 孝昭
    1995 年 61 巻 4 号 p. 497-500
    発行日: 1995/04/05
    公開日: 2010/01/20
    ジャーナル フリー
  • 萩原 親作
    1995 年 61 巻 4 号 p. 501-505
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
    Face gears are made by a continuous generating-shaping process on a Fellows Gear Shaper or similar type machine using a special fixture. Their gears, which have some advantages of easy setting, smooth mating for the mating pinion of spur or helical, low cost, and other things, are often substituted for bevel gears. In order to hob by use of a conventional hob machine and commercial hob, a theory of virtual shifted gear for determining the maximum practical outside diameter, the minimum practical inside diameter, and the face width of face gears, is proposed in face gear design. As a result, hobbed face gear could be obtained to become the point which the teeth become pointed at the outside and the point where tooth trimming occurs at the inside. In addition, contact test will be permitted to touch smoothly if being burnished enough.
  • 島地 重幸, 赤堀 拓也, 向山 宙
    1995 年 61 巻 4 号 p. 506-510
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
    Path planning in the configuration space of robot manipulator is vital for collision avoidance. Potential field approach has been tried as a useful method for planning the path in the configuration space. But the artificial potential field is known to have a local minimum problem. And the electrostatic potential field has a problem of so called wrap-up problem. This paper proposes a new potential field that shows an information of pseudo-distance from the goal in the configuration space and presents a path planning method. This method needs only a simple and easy algorithm and gives almost shortest path to the goal. This method can avoide the problems of the conventional potential fields. This paper also clears the characteristics of the proposed potential field, discusses path planning methods and shows some examples of path planning in 3 and 4 dimensional space.
  • 評価システムの構成とエアスピンドルの特性評価
    横山 和宏, 鈴木 孝昌, 平倉 隆史, 森脇 俊道
    1995 年 61 巻 4 号 p. 511-515
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
    This paper presents a new method to evaluate the friction torque and the heat quantity generated in a spindle system. The decrease in the rotational speed of spindle during the free run period is precisely measured, and the angular deceleration is calculated. The heat quantity generated during the spindle rotation is evaluated as the product of the moment of inertia of spindle, the angular deceleration and the angular velocity. A device is newly developed to measure the rotational speed of spindle accurately for this purpose, which is basically composed of a photo interrupter attached to the spindle and a crystal oscillator of 2.5MHz clock pulse combined with a counter mounted on a personal computer board. The method was applied to evaluate the heat quantity generated in an air spindle, and it was proved that the heat quantity was accurately evaluated with a repeatability error of less than 1%. The heat quantity is obtained to increase by 4% due to an increase in the coefficient of viscosity of air which is caused by the increase in the air temperature.
  • 神谷 和秀, 野村 俊, 宮代 裕, 吉川 和男, 田代 発造, 大園 成夫, 小林 富美男
    1995 年 61 巻 4 号 p. 516-520
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
    本報告では,既製のフィゾー干渉計にゾーンプレート原器を用いた簡単なシステムで球面ならびに非球面を測定可能な干渉計を提案した.以下にその特徴をまとめる.
    (1)測定面に対応したゾーンプレートで,球面のみでなく非球面も測定できる.
    (2)距離測定用ゾーンプレートを使用することで,測定面と干渉計の距離の調整が正確にかつ容易に行え,絶対形状測定ができる.
    (3)得られた干渉じまは位相シフト法によって高精度に解析できる.
    以上のことから,球面のみならず非球面測定のための有力な干渉計の一つとして用いられることが期待される.
  • 上野 吉史, 森 和男, 笠島 永吉, 吉岡 武雄
    1995 年 61 巻 4 号 p. 521-526
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
    機械システムの性能や機能に重大な支障を与える転がり軸受の剥離の発生予知が,離散ウェーブレット変換を導入することにより,今までは困難であった軸受の振動信号の観測から行えることを示した.得られた主な結果は以下のとおりである.
    (1)剥離が発生する直前の転がり軸受の振動信号には,インパルス的な非定常振動が含まれる.離散ウェーブレット変換を用いると,この非定常振動を感度良く検出することが可能である.
    (2)非定常振動に関するウェーブレット係数値は,剥離発生に近づくに従って大きくなる.さらに,この係数値の平均値推移を求めることにより剥離の発生を予知することが可能である.
    本報告で用いた離散ウェーブレヅト変換は,高速変換が可能で複雑な処理装置を必要としない.したがって,本論文の手法を容易にインプロセス異常診断システムへ展開できるものと考える.
  • 古谷 克司, 毛利 尚武, 樋口 俊郎
    1995 年 61 巻 4 号 p. 527-531
    発行日: 1995/04/05
    公開日: 2010/05/07
    ジャーナル フリー
    This paper deals with a small linear direct drive mechanism using a piezoelectric element and an example of its application. This mechanism can drive a small or thin object in steps of sub-micrometers up to several tens micrometers. It consists of a piezoelectric element, a guide and a moved object. It can also drive the object vertically. This mechanism has similar performances of displacement to the Impact Drive Mechanism. Because both mechanisms utilize shock excitation caused by rapid deformations of the piezoelectric element, and stick-slip mechanism of friction between the object and a guide. The displacement of the object does not depend on its mass. The experimental results of the displacement of the object are compared with the calculated results which are obtained by solving the motion equations. An application to a directly feeding device of an electrode which is used for electrical discharge machining (EDM) is proposed. The feeding device measures 8 × 9 × 28mm. It can machine holes without exchanging the electrode. This linear drive can be applied to EDM.
  • 摩擦駆動のシミュレーションと基礎実験
    佐々江 啓介, 五百井 清, 大築 康生, 黒崎 泰充
    1995 年 61 巻 4 号 p. 532-536
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
    A 3-D.O.F. actuator that is composed of a rotor and several drive units to drive in contact with it has been developed. This paper describes design of the actuator and formulates of the friction drive model for analysis. And also, an experimental motor with one degree of rotational freedom has been made, and its performance driven by one or two drive units was verified. Then, two driving methods (position set driving method and contact force adjustable driving method) were comparatively studied. It was confirmed that rotational speed of the position set driving method can be controlled by driving frequency, and rotational speed of the contact force adjustable driving method can be controlled by change of drive unit trajectry; driving torque by the latter method is higher than that by the former method.
  • 機構の動力学解析
    城 道介, 佐々木 智義
    1995 年 61 巻 4 号 p. 537-541
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
    A simple and comprehensive algorithm for dynamic analysis of mechanisms has been created. The topology of a mechanism is represented by link-pair graph with directed pair-edges toward the root node of the stationary link. Pair-loop-basis matrix and mechanism-inertia matrix are defined to formulate the equation of motion describing the closed loop constraints and the equilibrium of external force and inertia force around each pair-axis. The solution vector of the equation consists of the values of angular acceleration at each pair and the minimal set of elements of reaction force motor at the co-tree edge in link-pair graph. A computer program based on the new equation is developed for dynamic analysis of mechanisms with or without closed loops. Results from the simulation of some typical mechanisms are presented to confirm the effectiveness of the new algorithm.
  • 陳 平, 慶島 敏弘
    1995 年 61 巻 4 号 p. 542-546
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
    This paper aims to establish some effective method for high-speed machining (HSM) of austempered ductile iron (ADI), a high performance structural material recently developed. Cutting performance of a number of tools and tool materials were evaluated experimentally in the study. Failure of the carbide inserts is due to diffusion and adhesion wear, and they cannot stand for HSM. Tool wear of the ceramic and CBN inserts is less sensitive to the cutting speed. While setting a circular insert free about its axis, namely the self-propelled rotary cutting, wear resistance of a carbide insert is enhanced significantly beyond those of the conventional tools tested including the ceramic and CBN inserts. Wear mechanism of the rotary tool and factors influencing its cutting performance are discussed. The rotary tool is found to be advantageous of high-cutting-speed and high-feed-rate machining, and hence a high-performance cutting tool for machining of ADI.
  • 小出 晃, 佐藤 一雄, 田中 伸司, 加藤 重雄
    1995 年 61 巻 4 号 p. 547-551
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
    The use of hemispherical concave specimen is proposed to evaluate orientation-dependent etch rate of single crystal silicon. Etch rate is calculated from dimensional change of the hemisphere during etching. Etch rate distribution to the total orientation has been obtained for the etchant of 40wt%KOH aqua solution. The orientation showing maximum etch rate was [110] at 40°C. It deviates from [110] with an increase of temperature. The maximum point seems to move toward [320]. This fact indicates that the etched profile varies with etching temperature even when the etchant and the initial masking pattern are the same. The effect of temperature on the etch profile is experimentally proved. Variation in etch profile according to the change in temperature is theoretically explained by the etch rate data.
  • 左光 大和
    1995 年 61 巻 4 号 p. 552-555
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
    Increasing packaging density of integrated circuits calls for silicon wafers with smaller surface micro-roughness. The surface micro-roughness of silicon wafers was conventionally improved by polishing with abrasive grains suspended in an alkaline water solution. The conventional method combines mechanical and chemical actions. When the electric charge of abrasive grains was high, however, the surface micro-roughness of silicon wafers could not be appreciably improved even if the size of abrasive grains was reduced. A new polishing method, called the Electrical-Mechanical-Chemical or EMC polishing method and designed to control the electrical action of abrasive grains by applying electrical charge to the silicon wafer was devised and tested. The test results showed that the EMC polishing method can provide wafers with satisfactory surface micro-roughness.
  • YAGレーザによるドレッシング効果
    中島 利勝, 大橋 一仁, 孫 黎曦, 実盛 健郎, 八木 大輔
    1995 年 61 巻 4 号 p. 556-560
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
    There is a possibility that resinoid bond wheel may thermally be dressed by scanning the heat source on the wheel surface, because bonding material is lower heat resistance than other ones. In this paper, the dressing effect on resinoid bond wheel with YAG laser beam is discussed, observing the acting wheel surface and investigating the grinding characteristics of the wheel dressed by scanning YAG laser beam. Main conclusions obtained in this paper are as follows: (1) Irradiation of YAG laser on resinoid bond wheel surface results in the dressing effect. (2) The effective dressing conditions concerning the peripheral wheel speed and the feed rate of laser beam are determined by the heat energy provided on wheel surface, the transitional characteristic of heating and the width of affected region by scanning of laser beam during one revolution of wheel. (3) Resinoid bonding material become brittle and weak and/or abrasive grains are damaged by irradiation of YAG laser on the wheel surface. (4) Under the same heat energy provided on wheel surface, surface finish increases with a decrease of the peripheral wheel speed in dressing and an increase of the feed rate of laser beam.
  • 竹内 芳美, 長坂 学, 森重 功一
    1995 年 61 巻 4 号 p. 561-565
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
    5-axis control machining is usually carried out by use of either top cutting edge or side cutting edge of tool. The spherical cutting edge of ball end mill as the top cut allows to form almost any kind of shape, however, sometimes shows low surface roughness and efficiency in comparison with the side cut. Thus, the study presents the development of a new machining method using both top cut and side cut continuously, taking account of advantages of respective cutting manner. In this machining, the side cut is preferentially employed in the light of cutting efficiency since the amount of pickfeed can generally be set larger than the top cut when the cusp height on workpiece surface is kept constant. The side cut is continuously changed to the top cut when the side cut can not cope with workpieces having such surfaces as concave and/or overhanging ones. The control program developed on the basis of the above concept generates collision-free tool path which is converted to actual NC data by the post-processor. From two kinds of cutting experiments, it is found that the method proposed is valid for 5-axis control machining.
  • 硬ぜい材料の微視的破壊機構に関する研究(第3報)
    吉岡 正人, 澤 哲郎, 室井 邦雄
    1995 年 61 巻 4 号 p. 566-570
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
    Indentations of 10N loads were made on glass with Vickers and cone indenters with nose radii of 0.1 and 0.01mm. The process of crack growth around the indentation was dynamically observed by using of a newly developed crack observing system. There were many differences in the crack growing process and its shape among indentations made by differently shaped indenters. Stress distribution around an indentation was analytically obtained by way of finite element method for both states of full loading and complete unloading. Comparing the analyzed results with the experimental results, the mechanism of crack growth during loading or unloading was discussed. The following conclusions were obtained; (1) In the loading period, only 0.01mm cone indenter generated cracks in a vertical direction. All other cracks observed grew in the unloading period. (2) Based on the analyzed stress state, most cracks are thought to be forced to grow by the abrupt change of stress distribution on the onset of unloading. (3) The difference of crack growing process among different shaped indentations is similarly explained.
  • 鈴木 弘, 平野 稔, 阿部 守年, 新野 康生, 難波 義治
    1995 年 61 巻 4 号 p. 571-575
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
    This paper deals with ultra-precision grinding of chemical vapor deposited silicon carbide (CVD-SiC) for high power X-ray mirrors. CVD-SiC samples were ground by a numerically controlled surface grinder with variously-bonded diamond wheels, so as to get smooth surface roughness and high profile accuracy without a polishing process. SD4000-M wheel can grind CVD-SiC samples without fracture on the finished surface that is 3nm Ra in surface roughness and 0.3 μm in profile accuracy. Resinoid bonded wheels can easily get the smoother surface roughness, however, profile accuracy is limited at 0.9 μm due to the wheel deformation. The worn SD2000-M wheel can also get the ductile mode grinding on CVD-SiC samples. The surface fracture rate on ground surface strongly depends upon the grain size of diamond grits as well as the feed and depth of cut.
  • 西村 生哉, 勇田 敏夫, 松原 良洋
    1995 年 61 巻 4 号 p. 576-580
    発行日: 1995/04/05
    公開日: 2009/07/23
    ジャーナル フリー
    Experimental study was carried out on the properties of hydroxyapatite(HAp) films that was deposited by RF-sputtering on the polymer(silicone rubber, PET). During sputtering, the polymer were cooled by especially manufactured water-cooled unit. Though the adhesion strength between the HAp film and PET is not strong, that between the HAp film and silicone rubber is quite strong nearly equal to the fracture strength of silicone rubber. Although every HAp film has amorphous structure, it is possible to crystallize by soaking the films in the Hanks' solution. These results arc useful to develop the complex materials of ceramics and polymer.
  • 毛利 尚武, 武沢 英樹, 鈴木 政幸, 齋藤 長男, 東 正毅
    1995 年 61 巻 4 号 p. 581-585
    発行日: 1995/04/05
    公開日: 2010/01/20
    ジャーナル フリー
    プレス金型製作における磨き工程ならびに型合わせ工程の自動化を目指して,上下型の一方を電極とし他方を加工物とみなした放電加工を実施し,以下のことを確認した.
    (1)極性を一定間隔で入替えることにより上型,下型の加工量を等しくすることが可能である
    (2)3次元形状の上型と下型のカッタマーク除去加工としての,球揺動加工では,カッタマークの方向と揺動の方向が同一になってしまう部位が生じ,カッタマーク除去効率に違いが生じる.
    (3)上記の問題を解決するために,3次元形状の上型と下型のカッタマーク除去加工を,ランダム球揺動プログラムを使用して,その時の揺動半径を徐々に大きくすることにより加工した.その結果,板厚クリアランスを均一に保ったままカッタマークの向きによらず全面同時に除去することが可能となった.したがって,これまで行われていた型合わせの工程が大幅に短縮できる.
    (4)3次元形状においても切削加工におけるピックフィードを揺動半径の2倍以下にすることにより,カッタマークを効率よく除去することができる.
  • 駆動軸とガイドリングの偏心が研磨特性に及ぼす影響
    張 波, 梅原 徳次, 加藤 康司
    1995 年 61 巻 4 号 p. 586-590
    発行日: 1995/04/05
    公開日: 2010/01/20
    ジャーナル フリー
    Ball is simple in shape, and is easy to be ground and polished to high precision. However, the mechanism of ball grinding has not been clarified yet, and in fact, there are some misunderstandings of it. The purpose of the paper is to study the ball grinding mechanism in magnetic fluid grinding of ceramic balls by using the different eccentricities between the driving shaft and the guide ring. The experimental results showed that when the eccentricity was greater than a critical value the sphericity of ground balls was improved greatly. It was found that the removal rate was increased with the eccentricity while the surface roughness of ground balls was independent of the eccentricity.
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