光処理により検出対象の顕在化の後, 画像処理を簡略化して, 欠陥検出を高速・高信頼度で行う技術を, 光磁気ディスクとLCDに応用した例を中心に述べた.これらは, 特長のある前処理 (検出) を用いており, 後処理 (画像・信号処理) の負担を小さくでき, 全体として装置の小規模化, コスト (開発工数) 低減ができた.

抄録全体を表示

It is known to measure precision profile with three or more displacement sensors. Serial three point method is very simple particularly but it has some disadvantages that it is difficult to modify the intervals of displacement sensors and the accidental errors accumulate.This paper presents a new measuring method using smoothed serial three point method.This method is improved on serial three point method using smoothing and weighted least square method. In the present paper the influence of smoothing is theoretically clarified in relation to the error with the real profile and the feasibility of this method is verified theoretically and experimentally.

抄録全体を表示

This article deals with calculation of three-dimensional sphericity values from minimum circumscribing and maximum inscribing centres, although ISO and JIS define two-dimensional sphericity by means of two or three roundness measurements from minimum circumscribing centre. One of the reasons is the difficulties of measuring technique for the whole spherical surface. In this article, the data to be referred is simulated by applying surface harmonics (Laplace's spherical function). Downhill simplex method, one of nonlinear optimization techniques, is applied for search of minimum circumscribing and maximum inscribing centres. Then, their application conditions are investigated. Furthermore, two- and three-dimensional values of the spherical form errors are compared. In the future, further evaluation methods should be studied for actual three-dimensionally measured spherical form errors.

抄録全体を表示

非接触で機械部品の形状を測定する磁気式センサシステムの開発を通じて以下の結論を得た.
(1) L字形部材先端に永久磁石を付けた3本対の軽量小型センサを開発し, 対象金属表面までの距離・傾斜の安定した測定を検証した.
(2) 不連続面の段差と穴に対するセンサ信号の人工ニューラルネットワークによる学習を行い, 形状識別のみでなく形状パラメータの測定を行うことが出来た.

抄録全体を表示

A non-destructive testing technique for a crack existing randomly on a ferrite surface has been developed. Wher the sample is immersed into the volatile solvent, the solvent penetrates into the crack. The surface of sampl? becomes dry quickly, however the solvent remains in the crack and evaporates slowly. The crack is detected independently its position by detecting the evaporating gas from the crack. A FID (flame ionization detector) iE used to detect the extremely thin solvent gas. The optimum treatments from immersion treatment to sealing treatment are studied using several samples with the crack width from 0.003 mm to 0.06 mm. A lot of cracks ar? tested using the experimental apparatus. Experimental results show that a linear relationship is established between crack width and S/N ratio, and the detectable crack length varies inversely with the crack width, fot example in case the surface area is 250 mm², the minimum detectable length with crack width 0.05 mm is 0.3 mm and that with 0.003 mm is 1.4 mm.

抄録全体を表示

This paper describes the real-time measurement of in-plane vibration using a laser speckle interferometer with the double-aperture method. To detect the in-plane vibration in real-time, a new data processing system with an analog electronic circuit for calculating Fourier coefficients is proposed. The phase angle of the frequency component of interference fringes, which corresponds to the in-plane displacement of a target irradiated by a laser, is directly detected. The measurement system composed of the proposed data processing system and the laser speckle interferometer was applied to measure the in-plane vibration of a target excited by a piezoelectric actuator; the vibration displacement of about 5μm was detected with a sampling frequency of 470Hz and within a measuring error of ±0.5μm.

抄録全体を表示

オンマシン用ゾーンプレート干渉計をより実用化に向けるため, これまでの干渉計を改良した低コストの干渉計を開発した.本干渉計の特長を以下に示す.
(1) 参照光に (0, 0), 被検光に (±1, ±1) 次回折光を用いることにより, 非球面度の大きなミラーを測定することができる。
(2) 収束用レンズが観測用レンズを兼ねているため, 被検ミラーの開口数が観測用レンズの開口数に依存しなくなり, 開口数の大きな明るいミラーを測定できる.
(3) ゾーンプレートと被検ミラーの正確な位置を求める操作により, 高精度測定ができる.
(4) 共通光路干渉計であることから, 振動や空気のじょう乱の影響を受けにくいため, オンマシン用干渉計として適している.
(5) 平面ミラーM3を参照ミラーとして用いることによって, 中心部分に穴の開いたミラーを測定することができる。ただし, 参照面が被検面上にないため, 干渉じまの安定性は悪い.
(6) 光学系にキューブビームスプリッタを用いないこと, 明るいレンズ系を用いる必要が無いこと, 光学素子の微調整機構を極力省いたことから, 前回報告したものに比べて製作コストが3割程度安くなった。
本干渉計は, 超精密旋盤の刃物台に搭載するにはまだ大き過ぎる。干渉計の搭載を考慮して超精密旋盤を設計するか, あるいは干渉計を現在の半分程度の大きさにすれば, 実用的な干渉計として加工現場で用いることができ, 超精密加工において, 加工精度と生産効率を改善することができる.

抄録全体を表示

本論文では楕円運動を利用した電極ダイレクトドライブ方式の電極送り特性およびそれを用いた加工について検討を行った.結果をまとめると以下のようになる.
(1) 楕円運動を利用した電極ダイレクトドライブ方式を用いた超小型放電加工機を試作し, 加工可能であることを確認した.
(2) 駆動子の軌跡は, 印加電圧の軌跡が円の場合でもz軸方向が長い楕円となる。これは, 楕円運動装置の構造に起因すると考えられる.
(3) 移動特性は電極の曲げ振動の固有振動数と駆動周波数の影響を受ける.
(4) 駆動子の軌跡および電極の振動の各モードの固有周波数の間の比は, 理論解析の結果とほぼ一致していた.

抄録全体を表示

本検討で得られたことを要約すれば次のとおりである.
(1) 電磁接触器可動部の運動や鉄心の衝撃力を推定する本理論の考え方はほぼ妥当であると考えられた.この結果, 設計段階で各部の運動や機械強度について的確に評価することが可能になった.
(2) 衝撃力F_rmaxに対する衝撃力F_smaxの動荷重係数は, 支持板のぼね定数k₄の増加とともにk₄軸を主軸とする放物線状特性を示す.そして々4が5kN/mmを越える領域で動荷重係数はほぼ1とみなせる.このときこの領域の支持板は剛体として扱うことができる.なお瓦F_rmaxは全領域にわたってほぼ一定である.
(3) 衝撃力F_rmaxやF_smaxは可動鉄心の吸着速度v _mの増加に対して2次関数的に増大していく.ところでv_mの大きさは電源電圧の投入位相θにより7倍程度変動する.またv_mと可動部の吸引時間の間には相関関係がない.これらのことから許容吸引時間内でθの選定などができれば, 鉄心の衝撃力を基本的に緩和することが可能になる.

抄録全体を表示

This paper investigates theoretically the sensitivity of spark location measurement in EDM processes and gives useful information which can contribute to improvement of the measuring sensitivity. The spark location measurement is carried out with the branched electric current method, in which the discharge current is supplied to the electrode through several branched wires, and each spark location is obtained from the ratio of the branched currents. The calculated calibration curve which relates each spark location to the distribution of the branched currents is obtained from the finite-difference analysis of the electric potential distribution in the electrode considering the contact resistance of the feeding points where the branched wires are connected to the electrode. In the course of the analysis, the influences of the contact resistance at the feeding points, the shape of the electrode, and the feeding position on the sensitivity, are studied and the following conclusions are obtained : (1) Although the contact resistance at the feeding points cannot be neglected, it is possible to get the calculated calibration curve which coincides well with the measured calibration curve by taking the contact resistance, which is measured experimentally, into account. (2) A hollow electrode is more effective to improve the sensitivity when a thicker electrode is used. (3) It is possible to get a higher and more uniform sensitivity by feeding the current at the top of the hollow electrode rather than at the bottom.

抄録全体を表示

In order to synthesize films at low substrate temperature, an apparatus using Penning ion source has been developed and the performance of this apparatus has been discussed. A superconducting magnet has been used to produce magnetic field of up to 7 T, that is impressed on glow discharge. As a result, this newly type of a CVD apparatus can generate stable glow discharge at the pressure of 1 Pa when magnetic field of 1 T affects. Moreover, diamond-like carbon (DLC) films have been synthesized using methane and hydrogen gases, it is found that the apparatus has the possibilities of low temperature synthesis of films.

抄録全体を表示

Compared to existing metal fiber production methods. coiled sheet shaving is simple and efficient. Various kind of metals can be used and fiber diameter can he easily adjusted. But one major disadvantage of the method is that fiber sticking occurs, which makes it difficult to produce fine and uniform fibers, and put the method to practical application. This investigation was conducted to clarify the causes of fiber sticking in coiled sheet shaving. Experiments were performed with metals currently used. The results showed that fiber sticking is mainly caused by metallic adhesion resulting from the heat and pressure produced during shaving. Experiments on method for reducing sticking were also performed.

抄録全体を表示

A thin Si diaphragm, which can be easily deformed into a concave shape by applying an electrostatic force, can be used as a dynamic focusing mirror. A diaphragm mirror which has a uniform thickness produces large aberrations because its deformation is not optically ideal. To reduce the aberrations, an optimum thickness profile is calculated by FEM analysis and the profile is created using a unique processing method; initially, photoresist on a Si substrate is exposed to a specific energy profile through a mask made by dither method. The photoresist is then formed a specific curved shape. Optical Fourier transform is also applied during the exposure to smooth it. Finally, it is transcribed to the Si substrate by dry etching in CF₄ /O₂ plasma. The processed shape matches the calculated one with only several sub-microns deviations. The resolving power of the optimum thickness mirror is much higher than the uniform thickness mirror in the wide range of the focal length.

抄録全体を表示

Lubricant applying effect can be defined as improving machinability in cutting large-work hardening-capacity ductile metals such as pure aluminum, pure copper and so on. The effect is achieved by applying a material on the pre-cut surface. Some of the researchers in the field of metal machining often call this phenomenon a kind of Rebinder effect. This report shows that lubricant applying effect is quite different from the Rebinder effect and goes on to reveal the generating conditions and factors controlling the extent of the effect. This effect can be explained in terms of assisting shear deformation under high normal stress and lessening friction between lamella structure by the applied material.

抄録全体を表示

For an automatic grinding operation, it is necessary to establish a grinding performance database of super abrasive wheels. In this paper, a new rapid grade testing machine based on the ultrasonic coring method is developed in order to decrease the total cost and the period of grinding performance estimation of super abrasive wheels, and its validity is discussed. As the result, it is cleared that this method has good repeatability and is suitable for rapid testing of the grades of super abrasive wheels. Also, the stock removal rates in ultrasonic coring are dependent upon the specifications of abrasive wheels and their MOR values.

抄録全体を表示

A fundamental concept of DMCM (Design and Manufacturing Communication Model) is proposed. This concept is to represent a design and manufacturing process as a communication activity. An abstractive “process” is introduced as a key concept of the DMCM that represents an information communication between objects. The object is represented as a communication target, and its inner activity is not treated. To accomplish this concept, a resource structure is proposed as a framework to construct a design and manufacturing communication model. In this framework, the model is constructed with a resource that represents several data communication target and communication process. A formal specification language EPDL (Engineering Process Description Language) is proposed. As an example, a design modification work is described.

抄録全体を表示

This paper represents a new method for evaluating reliability of manipulators by means of probability of task achievement. Since, articulated manipulators have functional redundancies depending on assigned tasks, they may be able to achieve the task even with faulty joints. In the proposed method, reliability is evaluated taking this feature into account. First, the assigned task is resolved into task steps. Success conditions for achieving each step are obtained based on a manipulator model, which is represented in terms of DH parameters. Next, a success condition of whole task is computed from those of task steps. Finally, the probability of task achievement is evaluated by specifying failure rates of joints in the success condition of whole task. An illustrative example shows the evaluation of a seven DOF manipulator applied to an inspection task.

抄録全体を表示

In order to improve machining efficiency, it is necessary at each cutting process to select the optimum tool. Therefore, the importance of tool management which considers the features of each cutting tool has been recognized. In the 1st report, a structural model based on a neural network was proposed to estimate the rest of tool life time, and it is one of the most important information on the management. In this paper, the tool management system is proposed to select the most appropriate from a collection of cutting tools. This system consists of a data base block, estimation block and tool selection block. The data base block is in charge of the information (e.g. tool geometry, rest of tool life time, measurement value such as cutting force) on tool selection. The estimation block is composed of the three neural networks for estimating the information at the early turning, latter turning or life time under the given machining conditions. The tool selection block decides the order of selection with the information integration method. The following became clear after the investigation : (1) The estimated information by the networks agreed approximately with the experimental results. (2) The appropriate on the order of tool selection with this method was recognized by comparing the measure of information led from this system with the experiments.

抄録全体を表示