巻号一覧
62 巻, 4 号
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土肥 俊郎1996 年 62 巻 4 号 p. 483-485
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーPDF形式でダウンロード (2799K) -
隣 真一, 桜井 道雄1996 年 62 巻 4 号 p. 486-490
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーPDF形式でダウンロード (3330K) -
宮下 直人, 安部 正泰1996 年 62 巻 4 号 p. 491-495
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーデバイス製造プロセスにCMP法を導入する場合,最も重要なのが安定した加工性能を得るために装置とプロセスをチューニングすることである.例えば,ポリシング特性を決定するパラメータである(1)スラリー,(2)研磨パッド,(3)加工時のウエハ保持方法,(4)研磨パッドの再生方法や条件を最適化することである.また,デバイス製造プロセス上重要となるのがクリーン化である.装置を構成する部材のクリーン化およびCMP後処理方法を確立することでウエハ汚染や他工程の汚染を防ぐことが必要である.またCMPプロセス特有の問題であるスクラッチングやディッシングを防ぐ工夫を行うことが重要である.新しいコンディショナの開発や終点検出用モニタなどのQC装置の開発が急務である.抄録全体を表示PDF形式でダウンロード (3445K) -
木下 正治, 石田 全寛, 大川 秀樹1996 年 62 巻 4 号 p. 496-500
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーPDF形式でダウンロード (5923K) -
松永 正久1996 年 62 巻 4 号 p. 501-506
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーPDF形式でダウンロード (3646K) -
猪川 洋1996 年 62 巻 4 号 p. 507-512
発行日: 1996/04/05
公開日: 2010/02/16
ジャーナル フリー表2に各種の研磨終点検出技術の特徴をまとめる.
原理的には,静電容量式と光学式がウエハ上に残った膜厚を測れることから,ストッパ無しの層問絶縁膜平坦化(図1(a))や,被研磨材料の変化がトルク検出式では検知しにくいストッパ有りの層間絶縁膜平坦化(図1(b)),浅溝埋込み平坦化(図1(f))で有用である.
実績の点ではトルク検出式が,装置が市販されており,一部実用化されている点で他を引き離している.トルク検出式は被研磨材料の変化を検知する方式なので,用途は限定されるが,金属や多結晶シリコンの埋込み平坦化(図1(c),(d),(e))では,大きな問題なく使用できる.静電容量式と振動解析式は実際にウエハを研磨したデータが発表されているが,広く使用されるに至っていない.光学式は原理確認の段階にとどまっている.
空間分解能は光学式以外は総じて低く,ほぼウエハ全面の状態を平均的に評価することになる.従って,凹部と凸部の面積比率が異なると評価結果(例えば,トルク変化率や見かけ上の膜厚)が変わってくる.すなわち,品種ごとに条件出しを行わねばならない事態が生じる.逆に,空間分解能が高い場合はパタン形成されたウエハ上のどこを測っているかを正確に弁別出来るような機能が必要となる.
膜厚精度は光学式,特に分光反射率の測定やエリプソメトリによる方法が極めて優れており,0.1nmオーダの精度が得られる.他の方法はこれより1～2けた精度が低い.
トルク検出式の場合は,種類の異なるシリコン酸化膜どうしやシリコン酸化膜とシリコン窒化膜のように摩擦係数変化の小さい材料の組合せは不向きである。しかし,研磨剤や研磨布の変更,トルク測定の信号・ノイズ比改善などで適用領域を拡大できる可能性もある.静電容量式,光学式はそれぞれ導電材料,不透明な材料において精度良く膜厚を測ることができない.しかし,それらの材料がウエハ表面に存在するか否かを判別することは出来るので,被研磨材料の変化を検知して研磨終点を判定することは可能と考えられる.
以上より,トルク検出式は被研磨材料が研磨終点において変化する用途で広く使われて行くと思われる.更には,トルク検出式より広い用途で使用可能で分解能や精度の優れている光学式終点検出技術が重要になると考えられる.基本原理はおおむね出そろっているので,定盤や研磨布を貫いて光路を確保したり,リアルタイムで必要な情報を抽出したりする技術開発が求められている.研磨終点検出からは若干外れるが,研磨直後に製品ウエハを装置内で迅速に評価し結果を以降の研磨条件に反映させる手法も,研磨中に比べれば測定上の困難が少ないので,研磨工程のモニタリングを効率良く行う現実的手段のひとつと考えられる.抄録全体を表示PDF形式でダウンロード (3835K) -
原 徹1996 年 62 巻 4 号 p. 513-516
発行日: 1996/04/05
公開日: 2010/02/16
ジャーナル フリー平坦化研磨プロセスの評価技術について述べた.このプロセスは微細パターンで特に必要となるため,評価も従来行われてきた方法と異なり,実際に用いられる1/4μmのプロセスでの評価が行われるべきである.しかし実際に評価技術はほとんど確立されていないのが現状である.抄録全体を表示PDF形式でダウンロード (4123K) -
乾 正知, 安倍 宏之1996 年 62 巻 4 号 p. 517-521
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリー本論文では,多角形の集合演算をおこなうための位相的な必要条件を利用して,安定な集合演算の実行が可能で,しかも意図的に指示された退化した交差を最も判定しやすい,適切な公差値を決定するアルゴリズムについて議論した.まず退化した交差が発生しないという仮定のもとで,位相的な必要条件を導出した.次に公差に基づく退化した交差の判定法を示し,判定された交差を位相的に同等な退化していない交差と見なすことで,導出された条件が退化した交差を含む集合演算にも適用できることを示した.最後に,位相的な必要条件に基づいて,適切な公差値を決定するアルゴリズムを示した.この手法に基づいて多角形の集合和を計算するプログラムを作成し,数値実験によりその安定性を検証した.提案した手法は,より複雑な図形処理にも応用できる.現在われわれは,同様の手法を用いた曲線を含む図形の集合演算プログラムを開発しており,満足できる結果を得ている.抄録全体を表示PDF形式でダウンロード (1071K) -
加瀬 究, 鈴木 宏正, 木村 文彦1996 年 62 巻 4 号 p. 522-525
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーGeometrical errors by manufacturing processes have been evaluated by the maximum width of tolerance zones which envelop the actual features. Details of error within such zones should however be investigated when the designer studies relation between errors and functionality of a product and compares and examines manufacturing methods to realize high accuracy for machined surfaces. A new method is proposed for the evaluation of form errors using a series of points such as measuring points on the product surfaces. This evaluation consists of two parts: 1. Form error features which consist of error models (Bézier Template) and error conditions, 2. Segmentation by fitting of form error features using the Simulated Annealing Method. Form error models are defined as a series of quadric or cubic Bézier curves. A set of Bézier control points can be used for classifying or characterizing typical geometrical errors. Segmentation and fitting of these form error features are realized by the Simulated Annealing Method, a statistical optimization method which can be used to search for the global minimum solution of a combinatrial problem. Our method allows the designer to estimate the effects of errors on functionality by using fitting Form Error Features as a substitute. This leads to functional tolerancing.抄録全体を表示PDF形式でダウンロード (773K) -
平フライス切削過程のシミュレーション上田 完次, 真鍋 圭司, 野崎 省二1996 年 62 巻 4 号 p. 526-530
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーThree-dimensional rigid-plastic FEM (Finite Element Method) simulation of plain milling process is performed. The down-cut process in plain milling cutting is simulated by analyzing three-dimensional plastic deformation field due to the cutter rotation from the beginning of the cutting until the formation of the chip. The chip formation process of a carbon steel with showing spiral shaped curl is three-dimensionally simulated. The variations of the chip formation process including chip shape and cutting forces with cutting conditions such as tool helix angle and feed rate are calculated. It is obtained that the chip shape varies with simulation conditions of tool helix angle and feed rate, and the chip curl pitch increases as the tool helix angle increases. The cutting forces increase as the feed rate increases, and thrust component of cutting force becomes large as the tool helix angle increases. This simulation method is considered to be effective to simulate the actual three-dimensional cutting process.抄録全体を表示PDF形式でダウンロード (1031K) -
左光 大和1996 年 62 巻 4 号 p. 531-534
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーAs LSIs are scaled down, dielectric degradation of a gate oxide film due to metal contamination during both wafer and device fabrication processes becomes a serious problem because of the severe requirements of device yield and electrical performance. In conventional polishing processes of both wafers and devices, colloidal silica with an aqueous solution of KOH is used. Thorough rinse, however, is needed to avoid potassium contamination which influences greatly the electrical characteristics of devices. This paper deals with a novel polishing method using tetra-methyl-ammonium-hydroxide (TMAH), which can etch silicon without any metal contamination. After a soft touch test in a TMAH solution is conducted using the cantilever of atomic force microscopy (AFM), silicon wafer polishing is successfully carried out and the stock /removal ratio is found to be almost the same as that for KOH etching.The soft touch test using AFM has proved to be a powerful tool for exploring a new polishing solution.抄録全体を表示PDF形式でダウンロード (8073K) -
工具の三次元形状が切りくず生成と工具摩耗に及ぼす影響前川 克廣, 大畑 浩志1996 年 62 巻 4 号 p. 535-539
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーAn existing three-dimensional finite element simulation system for metal machining has been revised to cover a wide range of tool geometry and cutting conditions. When an 18%Mn-18%Cr manganese steel is turned by a P 20 carbide tool, the effects of tool geometry on chip flow and tool wear have been investigated. Cutting performance of square, diamond-shaped and button inserts is affected by the side cutting angle, rake angle and tool corner radius. The selection of a large side cutting angle and large tool corner increases the chip flow angle, and decreases the real undeformed chip thickness in the chip flow direction at the corner. These cause the cutting temperature to decrease and the crater wear to reduce as well. From this point of view, the use of a button insert is most favorable for rough turning of the difficult-to-cut material.抄録全体を表示PDF形式でダウンロード (999K) -
宇野 義幸, 金枝 敏明, 横溝 精一, 由村 貴彦1996 年 62 巻 4 号 p. 540-543
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーThis paper deals with the possibility of electric field assisted biomachining using chemolithotrophic bacteria Thiobachillus ferrooxidans that usually lives in waste fluid of mine. It is pointed out that the removal rate of anode workpiece increases steeply in this method when stainless steel bar is used as a cathode tool electrode. The etch factor for copper in this method is approximately 2, which indicates that there is an anisotropic characteristic in the removal amount. The grain boundary of workpiece is likely to remove preferentially for copper and iron. After all, it was made clear that the removal rate of workpiece was controlled by the machining time and the applied voltage between workpiece and tool electrode. It is considered that some genetic technology will be needed in the future for controlling the activity of individual bacteria.抄録全体を表示PDF形式でダウンロード (3586K) -
平田 敦, 津守 秀彦, 星野 浩之, 吉川 昌範1996 年 62 巻 4 号 p. 544-548
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーアーク放電ブラズマジェットCVD法によって合成されるダイヤモンド膜の膜厚の均等化,膜質の均質化を図るため,電磁コイルを備えたアーク放電プラズマジェットCVD装置を設計・試作し,磁場により制御されたプラズマジェットを用いてダイヤモンド合成を行い,以下の結果を得た.
(1)プラズマジェット生成部に磁場を印加すると,プラズマジェットの径は広がり,基板の温度は一様になる.
(2)磁場を印加してダイヤモンド合成を行うと,膜厚や粒径が均一で,結晶面の配向の変化が小さい均質な膜質のダイヤモンド膜が合成される.抄録全体を表示PDF形式でダウンロード (1260K) -
有限要素法シミュレーションによる圧子先端部のR補正およびくぼみ底上がり補正の検証金沢 憲一, 廣川 啓1996 年 62 巻 4 号 p. 549-553
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーThe deformation process of a specimen surface during measurement of hardness under 10 mN load is examined by FEM computer simulation. In calculation model a pure aluminum surface is indented by indenters (Vickers type and triangular pyramid), with and without finite tip radius using an ultra-microhardness tester that directly measures the depth of concavity. R-correction at the indenter tip and shallowing correction of concavity, which were proposed in the previous report, are investigated. The results obtained are as follows. (1) Correction for the radius of the indenter tip is effective in evaluating hardness both under test load and after unloading for any indenter. (2) Correction of errors due to "shallowing" of concavity is also effective under 10 mN load.抄録全体を表示PDF形式でダウンロード (1209K) -
きさげモーション機構の開発堤 博貴, 久曽神 煌, 中村 輝幸1996 年 62 巻 4 号 p. 554-558
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーThis study deals with an automatic scraping machine, namely a bearing recognition mechanism of scraped surfaces and a specially designed scraping mechanism. A scraping mechanism with the performance as skilled workers was tried to develop. The research is as follows; first the manual scraping operations were investigated, and secondly, a scraping unit was newly designed and made after manual actions. Many experiments were made to explain the performance of this mechanism, such as cutting force and surface form after cutting under various cutting condition. Physical phenomena in cutting were explained using a theoretical model. This mechanism performs smoother surface than skilled workers. For predicting the cutting force and shear angle the "maximum shear stress theory" was useful. These will be helpful to develop a tool movement unit and predict scraped depth quantitatively.抄録全体を表示PDF形式でダウンロード (3248K) -
蓮田 裕一, 貴志 浩三1996 年 62 巻 4 号 p. 559-563
発行日: 1996/04/05
公開日: 2010/02/16
ジャーナル フリーThe purpose of this investigation is to clarify the edge-chipping generation-mechanism of ferrite in slot grinding. By releasing the grinding wheel quickly from the contact zone during the grinding operation, changes of edge-chipping size and of kerf width are measured. Edge-chipping size tends to decrease greatly in the grinding zone, while kerf width tends to increase greatly in the same zone. The changes of edge-chipping size and of kerf width are opposite. The sum of edge-chipping size and kerf width in the grinding zone shows a nearly constant value. It is seemed that the initial chipping which occurred at the tip of ground groove is continuously ground with small depth of cut by the side of the grinding wheel and that the initial chipping tends to be decreased by an increase of kerf width. Especially, in down cut and low work speed the apparent function of increasing of kerf width is shown.抄録全体を表示PDF形式でダウンロード (7418K) -
形状創成の決定メカニズムについて榎本 俊之, 島崎 裕, 谷 泰弘1996 年 62 巻 4 号 p. 564-568
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーIn grinding of axisymmetrical surfaces, residual removal increases in peripheral region. Therefore, the surface profile becomes concave and the form accuracy deteriorates. In this paper, the mechanism of generating axisymmetrical form error is made clear by analyzing the change of grinding force. The following facts are revealed by experiments. (1) In case of traversing of a wheel from outer to inner, enormous normal grinding force in the periphery results in large residual removal. (2) Increase in the normal grinding force is considered to be the result from direct contact of bond and workpiece in grinding process. (3) By traversing of a wheel from inner to outer, the form error reduces less than 120 nm p-p.抄録全体を表示PDF形式でダウンロード (3162K) -
超高速研削に関する研究(第1報)稲田 豊, 庄司 克雄, 厨川 常元, 海野 邦彦1996 年 62 巻 4 号 p. 569-573
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーThis paper describes the development of a high-frequency wheel spindle for an ultra-high speed surface grinding machine. This project aims to achieve a high efficiency grinding of steel with cBN wheels, in which a stock removal rate is over 300 mm3/(mm·s) at a wheel peripheral speed of 400m/s. At such a speed, the power loss caused by air and coolant friction is larger than grinding power. At first, a theoretical analysis of grinding forces was carried out to estimate the grinding power. From this analysis the wheel diameter of φ250mm and motor power of 22kW at 30000min-1 were decided. Also, an eigenvalue analysis by FEM was carried out to decide the diameter of the spindle shaft that avoids the resonance caused by a heavy wheel. In the spindle unit, a newly developed lubrication method called the "retainer lubrication" was adopted to achieve dn value of 195 × 104. The retainer lubrication reduces the no-load power and the temperature rise of bearings. Furthermore, constant pre-load mechanism was adopted to achieve a high stiffness without burning out the bearings. Finally, the advantage of a small diameter wheel is confirmed experimentally by measurement of air friction loss, which conformed to calculated results using the logarithmic law.抄録全体を表示PDF形式でダウンロード (1277K) -
磯部 浩已, 森口 貴也, 久曽神 煌1996 年 62 巻 4 号 p. 574-578
発行日: 1996/04/05
公開日: 2010/02/16
ジャーナル フリーGenerally, XYΓ positioning device is fabricated by piling up X, Y and Γ table separately, however this construction makes the positioning device complicated and not compact. This paper describes a new method of XYΓ positioning device consists of four piezo elements with a weight and a center slider. Through controlling the deformation of piezoelectric actuators, step displacement in any directions can be achieved by using friction force and generated inertial force. This device has simple and compact structure. There is also no limitation of the traverse length with fine resolution in any directions. The motion in XYΓ directions was demonstrated through application of controlled voltage waveforms. Minimum step sizes were obtained of 0.05 μm in either X and Y directions and 0.65'' in Γ direction. The XYΓ motion can be controlled by adjusting applied voltage waveforms of four actuators. As the result, motion errors decreased from 1.0 μm to 0.03 μm in shift and from 20'' to 0.62'' in yaw with 25 μm traverse length in X direction. The positioning device moved in desired direction by step displacement in X and Y displacement were repeated sequentially.抄録全体を表示PDF形式でダウンロード (900K) -
吉村 剛治, 秋山 伸幸, 吉田 昌弘1996 年 62 巻 4 号 p. 579-583
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーA non-destructive testing technique for ceramics cracks has been developed. The method utilizes the phenomenon of slow evaporation of penetrated solvent inside the crack. The experimental apparatus consisted of a sealed chamber and a specimen locating device. The FID (Frame Ionization Detector) was fixed on the chamber for measuring the evaporated solvent. Three kinds of experiments were carried out. The 1st experiment was to determine the best condition for FID operation and to measure the FID characteristics. From this experiment, the optimum FID operating conditions were established; and the dynamic characteristics, e.g. FID response time of 0.17 s, were determined. The 2nd experiment was to measure the sensitivity of the crack detection. For this purpose, a jig, holding two lapped square ferrite blocks with a spacer in between, was used. The thickness of the spacer was from 1 to 10 μm. The experimental results show that the FID output varies linearly with the gap width for measurement carried out approximately 70 to 90 s after solvent introduction. The 3rd experiment was to detect the cracks on actual ferrite magnet specimens. The result shows that cracks with width 1-3 μm could be detected, with SN ratio 3.抄録全体を表示PDF形式でダウンロード (1065K) -
秋山 伸幸, 北野 哲彦, 吉田 昌弘, 藤本 頴助, 幸平 博喜, 福島 忠男1996 年 62 巻 4 号 p. 584-588
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーThe equipment which measures a diameter of small and deep hole whose aspect ratio is about 80 has been developed. The light projected to a specimen makes a small spot in a small hole. The position of wall in a hole is recognized by detecting an image of small spot reflected at the wall. Taking a ferrule (the hole diameter=125.0-126.0μm, the length=10mm) which is used for optical connector as a specimen, the hole diameter at a height of 5 mm from the end is measured using this equipment. The measured diameters are in the region of 125.8-126.1μm. The true value of diameters are in the region of 125.9-126.0μm. Therefore, the measuring errors are within ±0.2μm.抄録全体を表示PDF形式でダウンロード (3219K) -
張 世宙, 清野 慧, 宇田 豊, 水戸 正美1996 年 62 巻 4 号 p. 589-593
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーThis paper describes a new automatic calibration system for the polygon mirror. A new differential method which can calibrate simultaneously and autonomously the dividing errors of a polygon mirror and angular profile of surface is proposed. The basic principle of the system depends on the self-check-method of two autocollimators. This system consists of two angle sensors with 0.02 s (arc) resolution as a differential probe, a rotary table for giving angular displacement and an XZ-axis stage for scanning surfaces of the polygon mirror. As an example for the experiment, a 24-sided polygon mirror has been calibrated on the system and its effectiveness has been confirmed. It was found that the repeatability error of calibration was about 0.2 s (arc).抄録全体を表示PDF形式でダウンロード (836K) -
ガウシアンハイパスフィルタの適用条件原 精一郎, 塚田 忠夫, 伊藤 公俊1996 年 62 巻 4 号 p. 594-598
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーThe surface roughness parameters in ISO are obtained according to the mean-line system based on the high-pass digital Gaussian filter called the phase-corrected-filter. As the discrete data are used, the transmission characteristics of filter have the error caused by the inadequate range of convolution integral and space of data. This paper deals with an optimum condition of the high-pass digital filter for the roughness profile. The new knowledges of this paper are as follows. (1)The allowable error of transmission characteristics is determined as 2% at the point where the fluctuation of roughness parameters increase radically. (2)The range of convolution integral is given by 0.9 times the cut-off length. (3)The condition applied to the filter by this paper is compared with that recommended by ISO. (4)The roughness parameters by the mean line system differ little from those by the center line system which is a traditional method except Sk and Sm.抄録全体を表示PDF形式でダウンロード (891K) -
球面アクチュエータの設計と性能試験佐々江 啓介, 五百井 清, 大築 康生, 黒崎 泰充1996 年 62 巻 4 号 p. 599-603
発行日: 1996/04/05
公開日: 2009/06/30
ジャーナル フリーA miniature friction drive 3-D. O. F. actuator has been developed for downsizing of mechanical systems. This actuator consists of a spherical rotor and several drive units. Each drive unit has a truss structure composed of three piezoelectric actuators. The rotor is driven by frictional force generated between the rotor and the drive units. In this paper, the spherical actuator design is referred. And then, its performance is verified by some experimental results: the maximum torque is 2.5 N·cm, the maximum rotational speed is 560°/s. Moreover, the rotational angles are controlled using a position sensing detector experimentally and these experimental results almost coincide with computational simulation results.抄録全体を表示PDF形式でダウンロード (1114K)
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