非球面ミラーの加工技術についてEUVLカメラに使用されるミラーを中心にその概要を示した.
非球面成分のあまり大きくないEUVL用ミラーの場合研磨工程を基本に, 高精度な形状計測と安定な単位除去形状をもとにしたデロンボリューションによる形状創生が行われ, サブnmレベルの形状精度を実現するに至った.しかし研磨過程そのものに依存する高周波成分および研磨ヘッド等の特性の影響を強く受ける中間周波数成分の誤差がまだ十分に小さくなっておらず, 今後はこれらの空間波長領域の表面粗さの改善が必要になっている.また, このような高精度の加工にはそれを正確に評価できる, より高精度の計測手法の確立が不可欠で, 両者がそろって準備されなければならない.

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PS/PDI法によりシュバルツシルド光学系の13.4nmでの波面収差が測定された.測定値の正しさの検証も進められている.波長を変えた測定では, 多層膜に起因する色収差が観測された.ヌルテストによる測定精度の検証ではλ/250 (0.05nm) という驚異的な精度が示され, 既に回折限界のEUV光学系の波面収差を使用波長で評価するのに充分なレベルに到達している.

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EUVリソグラフィの縮小露光光学系は, 特定の像高で収差が補正されたリングフィールド光学系が用いられる.このような光学系は, 3～4枚の非球面を使った設計解が得られている.マスクとウエハをスキャンすることによって広い範囲を露光することができる.一方, 照明光学系の光学設計は縮小露光光学系よりも難しく, まだ実用レベルの設計解は得られていない.今後の研究が期待される.

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以上KrFエキシマスキャン露光装置の例からEUVスキャン露光装置のステージ関連の技術課題を概観した.EUVスキャン露光装置の問題は「レチクルステージ, ウエハステージの反力の放出とアクチュエータの放熱およびシステムの熱管理を真空チャンバをもつ系でどう実現するか」であるといっても過言ではない.
EUVスキャン露光装置には大気中で使用するKrFエキシマスキャン露光装置にはない新しい課題もあり, 実際のシステムでは装置全体の統一を考えた設計が必要である.

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In order to improve the positioning time of stage, base-plate acceleration feedback was proposed as described in the literature, and the effect of disturbance rejection was experimentally demonstrated. Since an explanation for the theoretical background of its feedback was insufficient, the disturbance rejection mechanism was clarified in our literature based on the mathematical model of stage including the base-plate dynamics. However, there is the question that what kind of controller can be derive by modern control theory. In this paper, the zeroing control theory, which is well-known as the disturbance rejection technique, is applied to the above mentioned mathematical model. As a result, it is clear that zeroing using the state feedback is impossible from the theoretical point of view. However, we can recognize through this examine that the base-plate acceleration feedback is equivalent to Master-Slave synchronization control. Since this analogical relationship is useful to progress the control performance, we describe the formulation and these relationship in detail.

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This paper describes a high-speed 3-D shape measurement system for in-line semiconductor package inspections. The system is featured with three points in construction. One is an optical sensor for confocal imaging, which we call a non-scanning multiple-beam confocal imaging sensor. The sensor can get a confocal image in a short time because XY-scanning, which is required in conventional confocal microscopes, is not needed. Another is the algorithm that performs accurate reconstruction of the object surfaces from a few confocal images. The last is a mechanism that performs shifting of the focused plane of the sensor quickly. This experimental system can measure objects having a space of 9.6×9.6×0.64 mm in less than 0.4 s with an accuracy of the order of 1 μm.

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This paper concerns the problem of the fast and high accurate mass measurement under the conditions of floor vibration. A specific type of weighing machine, which consists of a weighing loadcell and the dummy loadcell to cancel the undesirable influence from floor vibration, is considered. Since the weighing machine is usually used under the condition that the components of floor vibration are located in low frequency range, it is difficult to measure mass value rapidly by using conventional low-pass filters in this case. The two loadcells have the difference in dynamics, and the difference makes the measuring uncertainty worse. In the earlier paper, the concept of the relative dynamic compensation is applied to the problem of reducing the measuring uncertainty even in the case where the difference in dynamics between loadcells exists. The mass measuring algorithm in the paper, however, needs on-line identification in order to get the information of the difference in dynamics. It takes 40 ms to determine the parameters of a suitable compensating filter with on-line identification. However, there are mass measuring systems that require a faster mass measuring algorithm. Therefore, a new mass measuring algorithm, which is faster than the algorithm with on-line identification, is described in this paper. The effectiveness of the algorithm is certified both by simulation and by experiment.

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In this research, the intensity distribution of scattered light is calculated using the Maxwell equation under the conditions that particles, larger than 1μm in diameter adhering on to an ITO, are illuminated obliquely by a laser diode. FD-TD (Finite Difference - Time Domain) method is used to solve the Maxwell equation. The calculated intensity distribution is compared with that obtained by experiments in which the detection angles (ω) are changed from 0° to 50°. The calculated intensity distribution agrees well with the experimental intensity distribution under the conditions that ω is 0° - 45° and NA is 0.1. The normalized detected intensity V_n increases with increasing ω because V_n is 6.5 at ω=45° and V_n 27 at ω=60° under the condition that NA is 0.4, which is usually used in a conventional detection machine. The ω is required to be larger than 45° and to be as large as possible within 60° for the detection of the particles on ITO.

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In the present research corner wear of drills is measured automatically in order to predict end of drill life, using hole quality as criterion. Drilling experiments show a strong correlation between the progress of maximum hole diameter and hole surface roughness R_a over drill life. The proposed measurement system, using colour image processing and an artificial neural network, can detect corner wear of a drill accurately and predict the surface roughness R_a of the hole to be drilled with mean and maximum errors of 0.32μm and -1.00μm, respectively. The presence of a built-up edge does not influence the results.

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Thechatter stability in ball end milling is analyzed using a feedback theory. The instantaneous depth of cut is determined by a simple cutting model. The dynamic cutting force due to the penetrating velocity of a cutter is considered in the cutting process. The unstable region is investigated on a surface machined during one cutting. The results obtained are as follows. The chatter vibration occurs easily in the region where the instantaneous depth of cut is small. The chatter stability is high when cross-feed normal to tool-feed direction is downward. Up milling has a high stability compared with down milling. Higher stability is obtained if lower cutting speed is chosen. Depth of cut does not affect the chatter stability except the case of “downward cross-feed and up milling.” High stiffness, high natural frequency and high damping ratio of the clamping system of the end mill results in a high stability.

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A transient rolling behaviour of steel roller on steel rail is described in this paper. A spring action between the steel roller and the steel rail is observed in the transient region from stationary state to continuous rolling state.
Linearity of this spring action is affected by preload acting on the roller in hard rail case, however, is not affected in soft rail case. The increase in hardness of the rail and the decrease in the preload improve the linearity, only when the roller contacts the rail elastically.

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The morphological evolution of cones development on a tungsten surface during Ar ion bombardment as high as 1 keV has been studied. The presence of irregularities or asperities on the bombarded surface has been found to be more effective in initiating cone formation than varying the doses or energy of the Ar ions. Emery paper has been used to polish the tungsten surface, and cone development during ion bombardment has been observed. These cones can be used as probe tips for scanning tunneling microscope (STM).

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When a YAG laser beam which has a diameter of 200 μm irradiates on a glass-ceramics surface with an energy less than 1.3 J/pulse, the glass remains unchanged, while the energy of which is more than 1.3 J/pulse, the glass breaks instantaneously by the incident. Therefore, it was usually considered impossible to process the glass-ceramics by YAG laser irradiation method. In this paper, a newly developed crack-free and 3-dimensional glass-ceramics processing method using YAG laser is studied. Firstly, the mechanism of the destruction was examined. It was found that the destruction was caused by a melting phenomenon which induced a high thermal stress in the workpiece. To overcome this problem, it was necessary to form a crack-free processing on the surface of workpiece and then to scatter the melt into the air. According to the experimental results, it was found that a crack-free drilled hole could be processed when YAG laser beam irradiated on the surface with paints applied to absorb the laser beam continuously. Secondly, the mechanism of growth of the drilled hole was examined. By the results of observation and analyses, it was found that the growth could be attained by melted layer on the bottom of a hole. Finally, a new crack-free and 3-dimensional YAG laser processing method was developed and discussed. Since holes are always drilled along the incident direction of laser, a crack-free and 3-dimensional drilled hole was realized by changing the YAG laser incident direction.

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(1) 切込みや逃げ面接触長さを変化させることにより, 切屑, 被削材, 工具への切削熱の流入割合を求めることができた.
(2) 切削熱の切屑への流入割合は, 切削速度の上昇とともに増加し, 被削材, 工具へは減少していく.
(3) 高速切削になるにつれて, 逃げ面での摩擦による発熱は無視できなくなる.

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The purpose of this study is to analyze the generation mechanism of ground surface related to the displacement behavior of abrasive grains in grinding. In previous report [J. Japan Soc. Prec. Eng., 60, 10, (1994) 1490.], the spring constant of individual grain mounting on the grinding wheel surface has experimentally been measured. In this report, the simulation of ground surface profile generation is established and is proved to be available by comparing with practical grinding results. As a result, it is confirmed that this simulation can accurately reproduce the surface roughness taking account of normal force, pile-up and residual stock.

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Rapid prototyping (RP) has seen much progress in recent years, but the material used has mostly been limited to nonmetallic such as photosetting polymers and paper. Although they have their uses as design models, working models, or as master dies, material limitations restrict their range of applications. Within the context of present-day production trend, such as the production of diverse models in short time, the present study aims to develop a rapid prototyping technology that enables the direct forming of metallic, rather than nonmetallic products and thus expand the technology's application range. This paper introduces a new RP technology named “free sintering” which can directly fabricate metallic parts as well as subassemblies with built-in mobile parts. Optimum fabricating conditions have been also studied, and high density and high form accuracy were obtained. This result opens the way of practical applications of the new technology.

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When two phase alloys are machined with very small depth of cut that is about the same as grain size, the difference in material properties greatly affects the microscopic deformation of each phase in the shear zone. In this paper, machining processes of two phase alloys were modeled using finite element method. Ferrite and pearlite are two phases of the alloys. Then the cutting processes of two phase alloys were simulated changing the volume fraction of pearlite from 0 to 100%. The simulated results are in good agreement with experimental ones. The effect of the volume fraction of pearlite and the ratio of grain size to the depth of cut on chip forming process and cutting forces were made clear. Developed simulation system can predict not only macroscopic cutting phenomena but also microscopic deformation mechanism of two phase alloys. It is seen that strain concentration to the soft phase of ferrite plays an important role in the chip formation, the cutting force change and the affected layer of machined surface.

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設定された公差の妥当性と量産性を定量評価するために, 仮想量産試作システムを提案し, それに基づく量産シミュレーション・システムの開発を行った.また, 工程能力調査の結果から量産シミュレーションの信頼性を検証し, 以下の結果を得た.
(1) 鏡筒光学製品の製品開発プロセスを調査・分析し, その問題点を明らかにした.
(2) 鏡筒光学製品において量産性と公差の定量評価を可能とする「仮想量産試作システム」を提案した.
(3) 提案に基づいて, モンテカルロ法による光学製品の「量産シミュレーション・システム」を開発し, 光学性能及び量産性の定量評価を可能とした.
(4) 実製品の調査結果からシミュレーションの信頼性を検証し, 予測結果は95%信頼区間内にあることを確認した.

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A safe modification method is proposed of control program for industrial machines. The program is described by CSP-based notation, and modifications of processes propagate to other processes via shared events. When some conditions are met, the propagation is blocked and effect of the change is limited in local part of process group. In such case, program verification is performed easily when the verification of whole program is time-consuming or impossible. Program model is written in SGML and converted to verification language PROMERA, propagation tracer Lisp, execution program C and documentation LATEX. Four machines were developed by this method.

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