精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
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73 巻, 12 号
選択された号の論文の29件中1～29を表示しています
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特集　デジタルスタイルデザイン
展望
解説
私の歩んできた道
グラビアとインタビュー　精密工学の最前線
はじめての精密工学
研究所・研究室紹介
JSPEだより
国際会議報告
論文
  • cBN砥粒切れ刃のマイクロ自生作用
    藤本 正和, 市田 良夫, 佐藤 隆之介, 森本 喜隆
    2007 年 73 巻 12 号 p. 1319-1324
    発行日: 2007年
    公開日: 2009/12/11
    DOIhttps://doi.org/10.2493/jjspe.73.1319
    ジャーナル フリー
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    This paper describes the micro self-sharpening of cutting edges in cBN grinding. Plunge surface grinding experiments using a vitrified cBN wheel mounted a replaceable cBN segment into its peripheral side have been performed to observe the wear behavior of cBN grain cutting edges using a multiprobe SEM. The wear flat on the cutting edge is enlarged by ductile attritious wear and micro fracture that are repeated alternately. Therefore, a smooth surface due to ductile attritious wear and a rough surface due to micro fracture exist together on the wear flat. The size of the micro fracturing occurred on the wear flat ranges from 0.1 to 10 μm. Self-sharpening due to the micro fracture without a reduction in radial height of the cutting edge, that is, ‘micro self-sharpening’, takes place on the wear flat plane during grinding.
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  • 新概念高能率超平滑両面ポリシング盤の開発（第1報）
    —装置の試作と一，二の実験結果—
    安井 平司, 山口 寛太, 栗林 将司
    2007 年 73 巻 12 号 p. 1325-1329
    発行日: 2007年
    公開日: 2009/12/11
    DOIhttps://doi.org/10.2493/jjspe.73.1325
    ジャーナル フリー
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    High efficient and ultra-smoothness double side surface polishing method based on the new concept is devised. To examine the effect of the polishing method, the new type of polishing machine is manufactured on trial. The machine is available for the experiment up to polishing pressure of 60kPa and polishing speed of 18m/s in the specification of the design in the case of 3.5inch magnetic disk substrate. The mechanism of the new polishing machine is based on rotating the workpiece by the friction force of reverse directions to each other, which are caused from the contact between workpiece and upper or lower polishing plate. From some examinations on polishing of magnetic disk substrate, the method is ascertained useful for ultra-smoothness polishing with high removal rate.
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  • CWレーザ背面照射法(CW-LBI)によるガラスの内部変質（第2報）
    —変質部の評価—
    高柳 秀樹, 吉岡 将人, 比田井 洋史, 戸倉 和
    2007 年 73 巻 12 号 p. 1330-1334
    発行日: 2007年
    公開日: 2009/12/11
    DOIhttps://doi.org/10.2493/jjspe.73.1330
    ジャーナル フリー
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    We describe filamentary crack-free modification in silica glass and Pyrex glass by CW Laser Backside Irradiation (CW-LBI). In this paper, the properties of laser-induced modification in glasses by CW-LBI were examined. The cross-section of the modification was a concentric ring structure, which consisted of the core region and the clad region. In HF wet etching, the etching rates of the core region, the clad region and the non-irradiated area were 1.6, 3.3 and 1.8μm/h, respectively. Then, a Vickers hardness test showed that the hardness of the core region increased and that of the clad region decreased. Raman spectra of the core region showed that the intensity of the peaks around 490 and 605cm-1 were increased and indicated the increase of 4- and 3-fold ring structures in the silica network. On the other hand, 4- and 3-fold ring structures in the clad region decreased. Therefore, the structural changes of silica network had an effect on the change of properties.
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  • 水/空気潤滑ハイブリッド型ジャーナル軸受に関する研究
    —オフセット荷重に対する静的特性—
    吉本 成香, 大木 健一, 谷藤 秀幸, 宮武 正明
    2007 年 73 巻 12 号 p. 1335-1339
    発行日: 2007年
    公開日: 2009/12/11
    DOIhttps://doi.org/10.2493/jjspe.73.1335
    ジャーナル フリー
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    Aerostatic bearings have often been used for high-speed spindles because of its low friction and high accuracy of motion. However aerostatic bearings have disadvantages such as lower load capacity, lower bearing stiffness and damping coefficient compared with water-lubricated hydrostatic bearings. On the other hand, water-lubricated hydrostatic bearings have higher damping coefficient and larger load capacity but larger power consumption is needed at speeds. In this paper, therefore, a water/air lubricated hybrid journal bearing was proposed, which could achieve both low power consumption and larger load capacity by selecting air or water as an operating fluid according to the operating condition of a spindle. In addition, the static characteristics of the proposed bearing for an offset load are clarified theoretically and experimentally. It was confirmed that the proposed bearing was very useful for spindles for precision machine tools.
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  • 矩形ガラス材の高平坦化研磨加工（第1報）
    —直線揺動法による矩形平面の創成シミュレーション—
    宇根 篤暢, 吉冨 健一郎, 餅田 正秋
    2007 年 73 巻 12 号 p. 1340-1344
    発行日: 2007年
    公開日: 2009/12/11
    DOIhttps://doi.org/10.2493/jjspe.73.1340
    ジャーナル フリー
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    High flatness and smoothness are required to produce a rectangular glass mask for pattern transfer. However, it is difficult to polish rectangular plates with a rotary polishing machine. Therefore, a new theory was devised to calculate pressure distribution for a rectangular plate and a simulation program was developed to clarify the oscillation polishing process. This paper describes the theory underlying the calculation of the relative velocity, pressure and stock removal, as well as the algorithm for obtaining the optimum oscillation speed, and various calculated results for a square workpiece. It was shown that the flatness errors after optimization of the oscillation speed are improved to ±5% and ±9% in the lateral direction and diagonal direction, respectively, however, this is difficult to improve below ±30% in all directions. The flatness error is improved to ±13% using a ring tool, because the eccentric load increases when the tool hangs over the corner of a square workpiece. In addition, the error can be decreased to ±10% by adjusting the revolution ratio of the tool for the workpiece to more than five. It was concluded that high flatness cannot be obtained if the oscillation speed is optimized without considering the symmetric property for a rectangular shape.
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  • 超精密加工用3軸制御ファストツールサーボの開発（第1報）
    —ファストツールサーボユニットの試作と基本性能の評価—
    和田 紀彦, 高橋 正行, 森脇 俊道, 中本 圭一
    2007 年 73 巻 12 号 p. 1345-1349
    発行日: 2007年
    公開日: 2009/12/11
    DOIhttps://doi.org/10.2493/jjspe.73.1345
    ジャーナル フリー
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    This paper presents a newly developed 3-axis controlled Fast Tool Servo (FTS) machining system for ultraprecision machining, which is driven in synchronization with the rotation of the workpiece fixed on the rotary table. The 3-axis controlled FTS unit can drive the cutting tool along the arbitrary cutter path in the space by controlling the motions of three piezoelectric actuators arranged in three axes of the orthogonal coordinates. The three directional motions are measured with use of three capacitive-type proximeters and the motion signals are fed back to the controlling computer in order to guarantee the required tool paths. The FTS machining system can be applied to machine sculptured surfaces, micro lens arrays etc. A mold with cylindrical surface was machined with the developed system, and the obtained form accuracy was 0.22 μm P-V.
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  • 空気式静圧送りねじに関する研究
    —変動の計算方法について—
    趙 鵬, 里見 忠篤
    2007 年 73 巻 12 号 p. 1350-1355
    発行日: 2007年
    公開日: 2009/12/11
    DOIhttps://doi.org/10.2493/jjspe.73.1350
    ジャーナル フリー
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    In this study, an aerostatic lead screw system which all of the moving parts are lubricated by the pressurized air film has been developed successfully. The maximum movement ability of this system is 200mm. To improve the static rigidity in the lead direction, the orifice with 0.4mm diameter and the female screw with 2 lead effective thread are used in this study. To the fluctuation, what the “balancing effect” of the aerostatic lead screw can reduce the fluctuation of the system is confirmed experimentally; additionally, an attempt on the fluctuation calculation of the aerostatic lead screw is made based on the balance of the load by considering the influence of the shape error of the flank surface. As a result, a fairly good agreement is found between the calculated and the measured results. From these results, the action of the female screw floating by the pressurized air can be predicted from the measured results of the flank surface of the screw.
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  • 水溶性加工液代謝システムに関する研究（第2報）
    —繰り返しリサイクルが加工液の液性に及ぼす影響—
    近藤 康雄, 山口 顕司, 坂本 智
    2007 年 73 巻 12 号 p. 1356-1361
    発行日: 2007年
    公開日: 2009/12/11
    DOIhttps://doi.org/10.2493/jjspe.73.1356
    ジャーナル フリー
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    The performance of recycle water-soluble coolant was experimentally examined through the lapping tests of SUS304. The recycle water-soluble coolant was prepared by diluting a commercial coolant with recycle water. In order to recover the water from a spent water-soluble coolant, an activated-carbon-enzyme method and a freeze and thawing method were adopted. The recovered water obtained by the activated carbon-enzyme method contained a small amount of organic and inorganic matters. The recycle coolants showed the same pH and Brix% as those of virgin coolant independent of the components in recovered water and number of recycling. The lapping performance of recycle coolants were also the same as that of virgin coolant. These facts indicate that a small amount of organic and inorganic residue in the recycle water gives no effect on the performance of recycle water-soluble coolant.
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  • アセンブリモデルを用いた手機織機の表現
    佐波 晶, 進藤 幸裕, 北嶋 克寛
    2007 年 73 巻 12 号 p. 1362-1368
    発行日: 2007年
    公開日: 2009/12/11
    DOIhttps://doi.org/10.2493/jjspe.73.1362
    ジャーナル フリー
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    The recent 3D-CAD has a performance to represent complicated mechanisms of a machine structure. On the other hand, it is still difficult to treat the object that is an indeterminate shape such as a string. We already proposed a method of representing the part as the combination of the shape and feature points. This framework is applicable to the indeterminate shape as a string. In this paper, we present the representation method of the hand loom machine by using the framework, and animations on the represented model can be made only by moving some parts.
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  • 環境変化を考慮した移動ロボットのリアルタイム制御
    佐藤 大海, 森國 雄一朗, 加藤 清敬
    2007 年 73 巻 12 号 p. 1369-1374
    発行日: 2007年
    公開日: 2009/12/11
    DOIhttps://doi.org/10.2493/jjspe.73.1369
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    An artificial potential method has problems: local minimum, computational cost and obstacles. To resolve such problems, this paper proposes the use of a spline surface. A spline surface that interpolates arbitrary shaped boundaries is used as an artificial potential to guide a robot for global motion planning. The spline surface is generated over the free space by assigning appropriate boundary conditions to the walls and other obstacles. Moreover, this paper proposes a surface driven interpolation to move a mobile robot in real time along with the proposed artificial potential. Getting peripheral information from infrared sensors and encoders, the robot creates a spline surface and generates interpolated servo data with appropriate speed control. From some experiments, this paper shows that a mobile robot can move to a target position in real-time selecting a wait action and an evasive action automatically to avoid an obstacle.
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