Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
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Volume 73, Issue 9
Displaying 1-30 of 30 articles from this issue
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Special Issue: Frontier of High-density Plasma and Its Applications
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Paper
  • Study on Polishing Mechanism by Pad Surface Analysis (1st Report)
    —Analysis on Pad Surface Condition by FT-IR and Raman Scattering Spectroscopy—
    Takashi FUJITA
    2007 Volume 73 Issue 9 Pages 1014-1018
    Published: 2007
    Released on J-STAGE: December 28, 2009
    DOIhttps://doi.org/10.2493/jjspe.73.1014
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    The surface was evaluated qualitatively on a break-in pad in CMP (Chemical Mechanical Polishing). In particular, chemical structure of polyurethane, which is a material of polishing pad, was focused on the evaluation. According to the surface analysis by FT-IR under dry condition, as the pad break-in process was proceeding, soft segments of polyurethane were rich on the pad surface. According to the surface analysis by Raman scattering spectroscopy under wet condition, it was suggested that adsorption water exists on the surface of break-in pad. The permeation depth of the adsorption water was estimated around 10um from pad surface. From the result of the transition process from wet condition to dehydration condition, hard segments of polyurethane segregated on the surface of pad combines with the internal hard segments or adsorption water. As the result, it was speculated that the soft segment was remained on the pad surface.
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  • Development of a Process Planning System for 5-aixs Controlled Machine Tool (1st Report)
    -Determination of Tool Posture by Estimating Removal Volume and Cutting Time Based on Voxel Model-
    Keiichi NAKAMOTO, Takaaki INAOKA, Keiichi SHIRASE, Toshimichi MORIWAKI
    2007 Volume 73 Issue 9 Pages 1019-1024
    Published: 2007
    Released on J-STAGE: December 28, 2009
    DOIhttps://doi.org/10.2493/jjspe.73.1019
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    5-axis control milling is adopted to manufacture valuable parts in such fields as aerospace, automotive and die/mold industries. However, it takes extensive amount of time and efforts to determine the process planning parameters by skilled engineers because the machining process is much complicated. On the other hand, 3+2-axis control milling is often operated for high efficient milling on a 5-axis controlled machine tool. Machining accuracy can be improved and tool trajectory becomes simple in 3+2-axis control milling. However, it is still difficult to determine the effective tool posture automatically. Therefore, a calculation method of removal volume at each tool posture is proposed. Free-form surfaces are focused on target shapes because it is difficult to recognize machining features. In order to compare the machining efficiency, the cutting time is estimated by generating tool paths at each tool posture in this study.
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  • Fundamental Study on Improvement of Chip Controllability in Turning with Laser Heat Treatment
    Ryutaro TANAKA, Yuangchuan LIN, Kazumasa TANABE, Takashi UEDA, Akira H ...
    2007 Volume 73 Issue 9 Pages 1025-1029
    Published: 2007
    Released on J-STAGE: December 28, 2009
    DOIhttps://doi.org/10.2493/jjspe.73.1025
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    This study deals with the trial for improvement of chip controllability in turning with selective laser heat treatment for workpiece. Selective heat treatment for carbon steel JIS S45C was carried out with Nd:YAG laser which could be transmitted through an optical fiber and shows higher absorption rate against carbon steels than CO2 laser. In turning of these selective laser heat threatened carbon steel, the chip form changed regular curl from irregular curl and chip breakability was improved compared with non-laser treated carbon steel. Surface roughness was obviously smaller comparing with non-laser treated carbon steel. Especially in the case that the depth of cut was larger, the surface roughness was smaller. As for cutting force, the principal force was slightly smaller, but the thrust force and feed force were almost the same. The cutting temperature was slightly lower. The tool wear was almost same as that in the case of non-laser treated carbon steel.
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  • Study on Precision Planetary Milling of Spherical Dimple Texture (1st Report)
    -Development of Planetary Milling Mechanism-
    Takanori YAZAWA, Masami MASUDA, Narumi ISHIBASHI, Kohichi SHOZI, Kazuh ...
    2007 Volume 73 Issue 9 Pages 1030-1034
    Published: 2007
    Released on J-STAGE: December 28, 2009
    DOIhttps://doi.org/10.2493/jjspe.73.1030
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    This paper presents precision planetary milling of spherical dimple texture. When the spherical dimple texture is milled using a ball end mill, form accuracy of the spherical dimple deteriorates by low cutting speed around the chisel of a ball end mill. Hence, planetary milling mechanism is proposed as an inclined spindle, which rotates a ball end mill, revolves around nomal axis (revolution axis) of a work surface. By developed mechanism, the revolution axis and the ball center of a ball end mill agrees in 1μm accuracy within ±2mm deviation. This accuracy is achieved by the principle of leverage around the gimbal joint using a pre-loaded ball bearing. A dimple texture without deterioration around a dimple center is made by the milling mechanism installed on a precision jig grinder.
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  • Fabrication of Micro-Channel for Observation of a Blood Cell Deformation in Fluoro Resin by Laser Ablation
    Hiroyuki YAMADA, Yoshikazu YOSHIDA, Nobuyuki TERADA, Shigeru HAGIHARA, ...
    2007 Volume 73 Issue 9 Pages 1035-1039
    Published: 2007
    Released on J-STAGE: December 28, 2009
    DOIhttps://doi.org/10.2493/jjspe.73.1035
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    This paper describes creating a micro fluidic device into a fluoro resin using an excimer laser process. A deformation of blood cell into an artificial capillary-vessel can be observed by using this device. Machining conditions to a fluoro resin by excimer laser ablation were examined. Through holes as the artificial capillary-vessels are made in the fluoro resin having the minimum diameter of 5 μm and the length of 100 μm by laser ablation. And micro-channels are fabricated on the periphery of the holes by laser ablation. A number of resin-films are piled up on a glass. In the case of having multiple layers, adhere more resin laminate films and form the channel space by laser processing. We experimented on running blood into the channels and observed blood cells behavior.
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  • Development of Measuring Method for Positioning Accuracy of Tilting Axes in Five-axis Machining Centers
    —Development of Clinometer using a Rotary Encoder and a Level—
    Chengri CUI, Kazuya TAKAHASHI, Masaomi TSUTSUMI, Ryuta SATO
    2007 Volume 73 Issue 9 Pages 1040-1045
    Published: 2007
    Released on J-STAGE: December 28, 2009
    DOIhttps://doi.org/10.2493/jjspe.73.1040
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    This paper describes the measuring methods for positioning accuracy of tilting axes in five-axis controlled machining centers with a tilting rotary table. The top surface of the tilting rotary table is generally in higher position than the tilting axis. In this case, there is no measuring method except for a manually operated clinometer. Thus, a clinometer consisting of a precision rotary encoder and a bubble level was firstly developed. In the method, operators have to read visually the scale of the level and the reading accuracy is dependent on their ability. Instead of the bubble level, an electronic level with high resolution was employed for comparison. A ball bar equipment was also applied to measure the angular positioning accuracy of the tilting rotary table, as the ball bar equipment can measure the angular displacement continuously.
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  • Accuracy Improvement in Injection Molding Using Milling-Combined Laser Metal Sintered Mold
    Takeshi YONEYAMA, Hiroyuki KAGAWA, Satoshi ABE, Yoshiaki SUEHIRO
    2007 Volume 73 Issue 9 Pages 1046-1050
    Published: 2007
    Released on J-STAGE: December 28, 2009
    DOIhttps://doi.org/10.2493/jjspe.73.1046
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    Effective cooling channels have been installed in the injection mold during the process of milling-combined laser metal sintering. In the case of molding a flat piece with multiple ribs, it is difficult to insert cooling channels between the ribs by conventional machining. Because the heat remains between the ribs, the piece shrinks after the molding to form a warp on the flat surface. Using milling-combined laser metal sintering, oval holes were fabricated between the ribs and they were connected in a spiral loop. The temperature around the ribs became uniform and the warp on the flat surface of the molded specimen reduced compared with that molded in the mold made by conventional method using milling and electro-discharge machining. Simulation of the mold temperature and the warp by commercial software showed the same tendency on the change of the warp with the mold type and the cooling temperature conditions. Therefore, the accuracy of the molded specimen is improved by inserting cooling channels in the mold where heat accumulates using a milling-combined laser metal sintering and the effect can be evaluated by a simulation.
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  • Robust Image Matching Using a Correlation Map Integration Method under Polarization-controlled Illumination
    Shunji MAEDA, Kaoru SAKAI, Yukihiro SHIBATA, Takafumi OKABE, Hitoshi K ...
    2007 Volume 73 Issue 9 Pages 1051-1056
    Published: 2007
    Released on J-STAGE: December 28, 2009
    DOIhttps://doi.org/10.2493/jjspe.73.1051
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    In order to realize highly sensitive image comparison, a method for robust image matching, which is not affected by the form or the density of the patterns contained in the images, is required. Thus, a method that utilizes the characteristics of a normalized correlation coefficient is proposed in this study. Using this method, an object image obtained under active illumination control is subdivided into multiple smaller images, and the correlation coefficient maps are individually computed. The matching position is subsequently determined by integrating the maps. The effectiveness of the method is confirmed through experiments.
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  • Study on the Basic Axis Formation of Ultra Precise Gear Measuring Instrument
    Hiroomi OGASAWARA, Noritsugu MAEDA, Teru HAYASHI
    2007 Volume 73 Issue 9 Pages 1057-1061
    Published: 2007
    Released on J-STAGE: December 28, 2009
    DOIhttps://doi.org/10.2493/jjspe.73.1057
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    This paper presents the Ultra Precise Gear Measuring Instrument/UPGMI, which can measure individual deviations of the gear with sub-micron meter resolution. Highly stabilized measurements of the ultra precise and very fine/minute gears are indispensable in order to miniaturize machine and its components. To meet with these purposes, a new basic concept of the main spindle of rotational axis, carrying test gear, with vertical travel/motion was employed in UPGMI. The result of theoretical study for the error factors caused from the basic axis formation shows the UPGMI construction has less error factors compared with the current typical measuring instruments. Then calculation for error allowance distribution to each mechanism for axis movement was made. We could achieved the accuracy of measurement in submicron order even at preliminary assembled UPGMI.
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  • Joint Torque and Angle Estimation by Using Ultrasound Transmitted through Human Muscle
    Yoichiro TSUTSUI, Takayuki TANAKA, Shun'ichi KANEKO, Maria Q. FENG
    2007 Volume 73 Issue 9 Pages 1062-1067
    Published: 2007
    Released on J-STAGE: December 28, 2009
    DOIhttps://doi.org/10.2493/jjspe.73.1062
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    We have proposed a brand-new noninvasive method of joint torque and joint angle estimation by using ultrasound sensor for detecting muscle movement. In this study, the movement of biceps muscle and triceps muscle of human arm are detected with the ultrasound sensors. These muscles have a relation to contraction and extension of elbow joint. We conducted an examination of joint torque estimation under constant joint angles. We also conducted an examination of joint angle estimation under constant joint torques. In these examinations, torque or angle on the elbow joint was measured by using a torque sensor or an 1-Link Arm. The estimations were carried out with Nonlinear regression equations. Correlation coefficients between measured torque/angle and estimated one were calculated. The results show that these estimations by using ultrasound were successful.
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  • A Basic Experiment of an In-Pipe Mobile Microrobot Movable in the Intestine
    Manabu ONO, Toshiaki HAMANO, Shigeo KATO
    2007 Volume 73 Issue 9 Pages 1068-1073
    Published: 2007
    Released on J-STAGE: December 28, 2009
    DOIhttps://doi.org/10.2493/jjspe.73.1068
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    We discuss fabrication of a new microrobot consisting of two outer holding mechanisms structured by a rubber bellows having four or six rubber friction sheets and a center moving mechanism that drives the microrobot by expanding and contracting. We studied friction generated by friction brakes modeled as a simple beam fixed at both ends. Friction generated by holding mechanism is confirmed to be predictable. The fabricated microrobot moves in a pipe in which the friction factor is 0.65, confirmed by navigating a porcine intestine.
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  • Extracting Capacitor Parts from an Electronic Circuit Board by Image Processing Using Support Vector Machine Assuming Recycling Task
    Seiji AOYAGI, Hirotaka KAWANO, Naomi YANO, Yasuhiko ARAI, Mamoru MINAM ...
    2007 Volume 73 Issue 9 Pages 1074-1079
    Published: 2007
    Released on J-STAGE: December 28, 2009
    DOIhttps://doi.org/10.2493/jjspe.73.1074
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    In the task of recycling wasted televisions, extraction of harmful capacitor parts from an electronic circuit board is inevitable. In order to robotize this task, it is necessary to recognize these parts by image processing. The problem of this task is that the size and the position of these parts are different from one board to another according to the product company, the age of product, the kind of product, etc. Moreover, stained parts are included, and it is difficult to keep a lighting condition in a recycling factory. To clear these problems, a two-stage recognition method is proposed. In the first stage, circular edge images are selected as the candidates for capacitor parts by a template matching procedure, which is speeded up by interlacing and binarizing the image. In the second stage, the candidates are classified further into two categories of capacitor parts and others by Support Vector Machine. Sample images are prepared, for which the application of the usual template matching using a normalized cross-correlation is difficult. The recognition was successfully performed for these images, i.e., the false rejection rate (FRR) was 0% for the first stage, and the false acceptance rate (FAR) was 0% for the second stage. The time needed for dealing with a 640×480 pixels image was approximately 7s.
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  • Image Noise Reduction Using Electron Beam Deflection for Scanning Electron Microscope
    Mitsuru HAMOCHI, Shigeru OOHASHI, Mitsuo SUGA, Shinji WAKUI
    2007 Volume 73 Issue 9 Pages 1080-1084
    Published: 2007
    Released on J-STAGE: December 28, 2009
    DOIhttps://doi.org/10.2493/jjspe.73.1080
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    This paper addresses Scanning Electron Microscope (SEM). In detail, the image noise caused by the transient vibration due to the step moving of the specimen stage disturbs high throughput of the inspection, and the acoustic noise disturbs the correct shape observation of the specimen.
    This paper shows a way to solve this image noise problem with the feedforward compensator using the electron beam deflection that has no risk of the oscillation. Firstly, the mechanisms how those vibrations cause the image noises are explained, and it is shown that the signal to compensate the transient vibration by step moving of the stage can be made from the low path filtered acceleration of the specimen chamber, and the signal to compensate the acoustic noise can be made from the band path filtered displacement of the specimen stage. Secondary, an electron beam deflection compensator, which uses two signals of the accelerometers, is designed. Finally, this feedforward compensator is implemented to SEM, and remarkable reductions of the image noises in the step moving of the stage and under the condition of the acoustic noise, are shown.
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