In this paper, a detail design of MAGLEV(MAGnetic LEVitation) stage is put into effect based on the concept that was persuaded in 1^st paper, ”Development of 6DOF Magnetic Levitation Stage for Lithography Tool -Background and First Report-“, in that the limit of vacuum compatible air bearing was discussed. Because the proof of concept should be quickly required, local design such as material and component was changed from the initial concept. The key specification, control bandwidth, coupling between other axes, vibration transmissibility and positioning accuracy were evaluated and the concept was verified. The possibility of application to the EUVL(Extreme Ultra Violet Lithography tool) reticle stage is obtained by changing the material to high stiffness rate ceramics in control simulation.

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Capillaries, whose internal diameters are under 0.3 mm, are used for an injection pipe in medical field, an instrument in chemical and biological field. These capillaries are being required to be finished smoother to prevent a contamination etc. This paper studied a new finishing process using Magneto-rheological Fluid (MRF) of such capillaries, which are difficult to be finished by general processing techniques. In our previous study, we developed the MRF-based slurry, which is the composite of MRF and abrasive, and demonstrated the basic finishing characteristics and the finishing mechanisms. In this paper, we applied the MRF-based slurry to the internal finishing of capillaries using the motion of axial direction, and demonstrated the finishing characteristics and the finishing mechanisms. The higher magnetic flux density of the finishing area increased the finishing force and the dragged motion of the slurry by the magnetic poles; improved the finishing performance. And the edge effects of magnetic flux density also accelerated the finishing performance was found. The slurry showed the high dragged motion when the supplied amount of the slurry was accommodated to the area of high magnetic flux density. The higher velocity of magnetic poles decreased the dragged motion of the slurry; declined the finishing performance. The internal surface of SUS316L stainless steel tube (0.8mmID, 0.4mmID) could be finished smooth by the MRF-based slurry was confirmed.

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Copper (Cu) chemical-mechanical polishing (CMP) has been a critical technology for copper damascene manufacturing process for metal interconnects. This paper investigated the mechanism of the copper residue generated during Cu-CMP process. Both electrical testing and various physical measurement techniques have been extensively used for the characterization. For bulk Cu CMP process, the wear surface of the retaining ring caused reduction of the effective down pressure on the wafer, resulting in occurrence of residual copper. For barrier metal CMP process, the protrusion of the copper lines (negative oxide erosion) on the fine pitch line and space array was the main contributor to copper residue on the upper interconnection layer. This paper also examines the effects of slurry selectivity on topography correction and dielectric erosion, in multi-step Cu CMP processes. We proposed an optimal selectivity of Cu/Ta(tantalum)/SiO (0.6/1/0.8) of barrier metal polishing slurry to reduce copper residue between metal patterns and to ensure electrical isolation between neighboring circuit.

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Pure titanium and titanium based alloy are commonly used as material of medical implant parts because of their biocompatibility. Mirror surface is necessary for these implant parts. However, since most of these parts have complicated shapes, it requires the excellent skills and much time to obtain mirror surfaces.
A new method for improving surface roughness, in which the large-area electron beam is irradiated in a very short time has been proposed. In this system, the high-energy density electron beam can be irradiated to the large area of about φ60mm at the same time. The surface roughness can be improved by the electron beam irradiation more efficiently than the conventional hand polishing. The effects of EB irradiation on the micro structure for pure titanium are experimentally investigated in this study.
The surface temperature of material went up to about 3273K by the EB irradiation. It was found that the crystal grains became small and plate after the EB irradiation. Moreover, it was confirmed that the structure of pure titanium which was originally the hcp(α-Ti), was partially transformed to the bcc(β-Ti) after the EB irradiation. However, it is possible to transform the bcc(β-Ti) to the hcp(α-Ti) by heat treatment.

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The method of the quality control in the laser welding has various techniques. The laser welding monitor system is one of the many kinds of technique concerning of quality control, and is marketed. However, it is necessary not only to manage in-process in the welding system but also to manage pre-process and post-process to control welding quality. Therefore, the management of the welding quality needs the monitoring in the above method. As the first, the condition monitoring technique uses the waveform analysis of the optical intensity in in-process of the laser welding process. In this report, the application experience to the half penetration welding with the YAG laser for thin stainless steel sheets is discussed.

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In the ultra-smoothness vertical grinding method developed previously, the wheel surface conditions are found to influence on ground workpiece surface. Thus the building of wheel surface forming technique is important. In the report, from the point of view, the change of ground workpiece surface and wheel surface conditions with grinding process of silicon carbide ceramic is examined and discussed. In the wheel surface just after initial dressing having no worn cutting, the surface roughness is consisted of brittle fracture traces. The ductile mode grinding becomes possible when the worn cutting edges are formed largely on the wheel surface by grinding of silicon carbide ceramic. The ultra-smoothness vertical grinding is possible when the worn width of cutting edge becomes larger than the normal workpiece feed to grinding direction per a wheel revolution. Recovering dressing after the wheel life is necessary to be done under keeping the worn cutting edge on the wheel surface.

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This paper deals with developing the highprecision liquid-temperature regulator to minimize thermal deformation of ultraprecision machine tool. The liquid-temperature control system was constructed based on theoretical analysis and the prototype of highprecision liquid-temperature regulator was experimentally tested for temperature accuracy under various environmental conditions. The experimental results confirmed that the temperature accuracy was ±0.0011 to 0.0012°C over a measurement period of 36 hours, during which the room-temperature fluctuated by ±0.1°C. Furthermore, when the room-temperature fluctuation was restricted to ±0.04°C, the temperature accuracy improved to be ±0.00055°C for over 36 hours.

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This study deals with a development of analytical estimation system for machined surface texture based on tool run-out and cutting edge profile measurement for end-mills by optical method. In the article, geometrical cutting model is proposed with a consideration of tool deflection, tool run-out and cutting edge profile. In order to obtain those analytical parameter values, we constructed certain optical equipments for measuring spindle rotation trajectory and cutting edge profile in three dimensions. Through an analytical consideration of tool run-out trajectory, we revealed that the tool run-out components (both RRO and NRRO) are geometrically transferred to the machined surface as the corresponding wavelength components. From the experimental result, wavelength spectrum between surface roughness profile and tool run-out trajectory is closely conformed to the analytical simulation.

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This paper proposes a novel scheme for image focusing by introducing a new focus measure based on self-matching methods. A unique pencil-shaped profile is identified by comparing the similarity between all patterns extracted around the same position in each scene. Based on this profile, a new criterion function called Complementary Pencil Volume (CPV) is defined to evaluate focus or defocus scenes based on similarity rate of self-matching, which visually represents the volume of a pencil-shape profile. Among matching methods, Orientation Code Matching (OCM) is recommended due to its invariant with regards to illuminations and contrasts. Several experiments using a Telecentric lens are implemented to demonstrate the efficiency of proposed measures. Outstandingly, comparing conventional focus measures, shows that the proposed method, focus measure based on OCM is robust against changes of brightness or illumination. Using this method, pan-focused images are composed and depth informations are represented by comparing the focus and defocus region in the scenes both under low and high illumination conditions.

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In order to establish a method for aligning the structures of large linear particle accelerators, i.e., to evaluate straightness within sub-millimeter accuracy for a length of several kilometers, straightness measurement using the 3-point method with zero adjustment has been studied. This method uses 2 sets of 3 displacementmeters facing each other and eliminates their zero differences by reversal method. Here, the obtained profiles are not affected by zero differences or their fluctuations with two restrictions. The first is that the distance between at least one set of 2 displacementmeters facing each other is stable. The other is that the zero differences should be reproducible. This has been analytically and experimentally confirmed. Then, the meanings of these two restrictions are considered and the conditions that are applied to general straightness measurements are explained.

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Among industrial products like automobiles, aesthetic elements have become important as well as conventional factors such as performance, quality and price. Their design process consists of several stages. In the initial stage, designers usually develop conceptual images based on 2D sketches. Though recent CAD systems have various functions, they interfere with designers' creative activity because of their incompleteness and complicatedness. Hence a new modeling method is required for designers to support their intuitive task that is usually done in the initial design stage.
This paper presents a parametric design method so that designers can deal with many types of curves and surfaces with a few parameters for creating conceptual images of the product's shape. First, conditions for generating guide curves to create aesthetic surfaces by moving a curve-ruler along the curves are presented. Second, an algorithm for surface generation is proposed so that any type of plane curves can be used as a curve-ruler. Application results are shown to indicate that the presented system is effective for designers' activity.

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This research introduces an automatic scoring mechanism based on motion analysis of a player by video image processing and database of skills in gymnastics. The automatic scoring system will be made for the horizontal bar which is one of the gymnastics in particular. A scoring result is equivalent to scoring until now according to experience of a referee and the rulebook, or in order to perform highly precise scoring, it does not use the standard of scoring only with defined performance figure or a text. It is the new approach of this research to describe them as a program to be the databases which analyzed them. The result of this research considers scoring of a referee as a correct answer. Thereby, evaluation of a system can be performed, and if the system performance is enough, it will be considered to be useful that it can use for evaluation of a referee etc.

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This paper addresses countermeasures against the small vibration less than 1 Å excited by the acoustic disturbance for electron microscopes. We investigated about the eigenmodes of the specimen holder and goniometer, and added damping factor or changed the natural frequencies. In small strain region less than 10^-6 order, most of all damping metals lose their damping factor. Then we applied the wide range tuned mass damper on the specimen holder to restrict not only its bending mode around 250Hz but also the other mode of the goniometer around 400Hz. Both modes were well restricted and the gains of the allowance sound pressure levels were around 5 dB with 1/3-octave-bandpass-filtered random noise. Vibrations in 2 kHz order were caused by the eigenmodes of the tilting mechanism and its support structure placed on the head of the specimen holder. We increased the stiffness of the support structure to avoid closing of the natural frequencies to those of the tilting mechanism. Vibrations around 2.5 kHz were well restricted and the gain of the allowance sound pressure level was around 5 dB. In higher frequencies where the eigenmodes of the support structure exist, the allowance levels of the sound pressure decreased, however they were larger than ordinary levels of the acoustic disturbance. Therefore, the developed specimen holder is useful as a countermeasure against the vibration less than 1 Å caused by the acoustic disturbance. This specimen holder has already been applied to the products on the market.

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