The new ultra-smoothness grinding method which can finish to almost the same smoothness formed by polishing method, in the previous research, is developed as the countermeasure answering the recently strong requirement about high efficiency production of high quality components. The surface roughness of various kinds of workpieces formed by the method using #140 diamond wheel is ascertained to attain below about 50nm(
Rz). As the purpose to build the optimum grinding conditions in the method, in the report, the influence of parallel step feed to grinding direction within the range of smaller normal feed than the wear width of cutting edge on the surface roughness is investigated. Below the critical parallel step feed, the surface roughness becomes below 50nm (
Rz) in three dimensional measurement. Over the critical parallel step feed, the surface roughness begins to deteriorate steeply.
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