精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
76 巻, 2 号
選択された号の論文の28件中1~28を表示しています
特集 新機能を創造するナノインプリント技術
展望
解説
グラビアとインタビュー 精密工学の最前線
はじめての精密工学
研究所・研究室紹介
国際会議報告
論文
  • —焼結状態の定量評価手法の提案—
    古本 達明, 上田 隆司, 小林 直人, 細川 晃, 田中 隆太郎, 阿部 諭
    2010 年 76 巻 2 号 p. 173-177
    発行日: 2010/02/05
    公開日: 2010/08/05
    ジャーナル フリー
    The consolidation characteristics of ferrous based powder for Selective Laser Sintering (SLS) and Selective Laser Melting (SLM) are described. Yb : fiber laser beam is applied to obtained the high quality layered structure. In order to investigate the influence of laser conditions on consolidation quality of the layered structure, the maximum temperature at irradiation area of a laser beam is measured with a two-color pyrometer. In addition, the cross section of layered structure and the specific cutting force with dynamometer is evaluated for the optimization of the quality of consolidated structure. The result shows that the consolidated structure was changed with the energy density and the time interval of the laser beam scan. The maximum temperature during laser irradiation was not influenced by the previous laser beam scan when the time interval between the laser beam scan is over 50ms. The pore on the consolidated structure decreased with the increase of energy density, however superfluous supply of energy density caused the precipitation of carbon from the ferrous powder. The specific cutting force of the consolidated structure was greatly related to the ratio of consolidation.
  • 須崎 嘉文, 宮川 勇人, 江島 正毅
    2010 年 76 巻 2 号 p. 178-182
    発行日: 2010/02/05
    公開日: 2010/08/05
    ジャーナル フリー
    A circular erosion pattern is formed on the surface of a circular metal conductor target with permanent magnets on its back in rf magnetron sputtering. In this case, the theory behind the erosion pattern has been established. On the other hand, in the case of a dielectric target, a double circular erosion pattern is formed. This pattern is widely known qualitatively and experimentally; however, it has not yet been studied theoretically. In this study, we performed a magnetron sputtering experiment with a SiO2 dielectric target, and were able to confirm the formation of a double circular erosion pattern, which agrees with qualitative theory. Moreover, insulation resistance varied with the thickness of the SiO2 target; thus the dimensions of the double circular erosion pattern varied. Furthermore, we confirmed that a double circular erosion pattern changed by making a gap between the SiO2 target and guard ring. We discussed about utilization rate of the target.
  • 内山 直樹, 森 和紀, 山崎 和雄
    2010 年 76 巻 2 号 p. 183-187
    発行日: 2010/02/05
    公開日: 2010/08/05
    ジャーナル フリー
    Time-optimal trajectory planning for mechanical systems has been widely studied thus far because of its effectiveness to reduce the time required for many industrial tasks. However, in general, because the time-optimal trajectory is generated based on ideal dynamics of controlled systems, it may be difficult to implement the obtained trajectory to actual systems with vibration mode that is neglected in the trajectory generation. In other words, high-speed motion based on the time-optimal trajectory may cause the vibration of the real system. Hence, in this paper, we propose to employ the contouring control developed by the authors, which enables to reduce controller gain magnitudes while contouring performance are maintained. First, this paper presents a method of generating the time-optimal trajectory for machine tool feed drives. The presented method considers viscous friction that is significant in high-speed motion of mechanical systems and has an advantage that the number of variables required for the optimization is reduced compared to the conventional method. Next, the contouring controller is applied to implement the time-optimal trajectory to an actual machine tool system. The effectiveness of the proposed method and the contouring controller is demonstrated by comparative experiments with the conventional method.
  • 米山 猛, 内藤 圭亮, 阿部 諭, 宮丸 充
    2010 年 76 巻 2 号 p. 188-192
    発行日: 2010/02/05
    公開日: 2010/08/05
    ジャーナル フリー
    Using milling combined laser metal sintering, porous surface has been fabricated on the thin walled cavity closed by the surrounded thick cavity in the injection mold. Resin flows into the cavity of 2mm thick at first around the thin part and then flows into the thin cavity of 0.2mm thick with 11mm square by packing pressure. The packing pressure for filling the thin part was compared among laser metal sintered mold with or without porous surface, steel mold with or without porous block. The result shows that packing pressure for filling the thin part in the sintered mold is low even without porous surface because of the low thermal conductivity of the sintered material. The packing pressure to fill the thin part in the sintered mold with porous surface is lower than that in the steel mold with porous block. Pressure applied on the mold surface in the sintered mold is higher than that in the steel mold under the same packing pressure.
  • —舞いツールによる基礎実験—
    松岡 寛憲, 劉 孝宏
    2010 年 76 巻 2 号 p. 193-200
    発行日: 2010/02/05
    公開日: 2010/08/05
    ジャーナル フリー
    In this paper, the influence of concentration of sulfurous and phosphorous EP additives added on flank wear, crater wear of TiN- and (Al, Ti) N-coated tools, and finished surface roughness were investigated with minimal quantity lubrication (MQL) system in hobbing. Experiments were conducted by simulating hobbing by fly tool cutting on a milling machine. The results helped clarify the following points; (1) In the cases of polysulfide and sulfurized fatty oil, the flank wear decreased in the concentration of additive of 1.0 % (by weight), which showed a optimum concentration. In the case of tricresyl phosphate (TCP), the flank wear decreased with an increase in the concentration. Sulfurized fatty oil showed better wear reduction effect than any other additives. (2) When increasing in the concentration of the additives used in the tests, the crater wear becomes large, which was suggested to be caused by corrosion of additives. (3) Finished surface roughness obtained with EP additives tested is smaller than that obtained with no additive oil. (4) From the viewpoints of flank wear, crater wear and finished surface roughness, sulfurized fatty oil, of which the concentration is 1.0 %, is suitable for MQL system using (Al, Ti) N-coated tool in hobbing.
  • 森脇 一郎, 福島 隆雄, 上田 昭夫, 中村 守正
    2010 年 76 巻 2 号 p. 201-206
    発行日: 2010/02/05
    公開日: 2010/08/05
    ジャーナル フリー
    In the present paper, fatigue tests were carried out using spur and helical POM-C gears with various rim thickness in order to investigate the effect of the rim thickness on bending stress of plastic gear teeth. As a result, it was confirmed that variations in rim thickness brought the changes of crack directions in the tooth root and the service life of POM-C gears decreased with decreasing rim thickness. And service life of POM-C gears correlated greatly with the maximum principal stress on the tooth root obtained by the finite element analysis with tooth flank film elements (TFFEs). In order to determine the rim thickness factor in the equation of the tooth root stress, maximum principal stresses on POM-C gear flank were obtained by FEA for the gears with changing the number of teeth, gear ratios, profile shift coefficients, and helix angles. And bending strength of POM-C gears and life factor in load capacity of POM-C gears were discussed with calculation of tooth root stress in considering with determined rim thickness factor.
  • 片岡 良介, 樋野 励
    2010 年 76 巻 2 号 p. 207-213
    発行日: 2010/02/05
    公開日: 2010/08/05
    ジャーナル フリー
    This paper deals with a cyclic job shop scheduling problem in order to plan an appropriate production schedule corresponding to a change of product mix agilely. The product mix, which is defined as the total composite of products offered by a company, is generally changed to meet demand in a market. We propose a heuristic-based scheduling method for the cyclic job shop scheduling problem to plan the feasible schedules under the different product mix conditions. A re-scheduling method is also introduced in order to shift the production schedules as soon as possible. Numerical simulations are carried out to verify the proposed methods.
  • —ソフトランディングによる装置保護—
    高橋 正人, 牧野内 進, 涌井 伸二
    2010 年 76 巻 2 号 p. 214-219
    発行日: 2010/02/05
    公開日: 2010/08/05
    ジャーナル フリー
    In the field of ultra accurate positioning system, such as semiconductor lithograph machine, an active isolation system is generally used. Especially, it is an indispensable unit in the system which is required a highly accurate isolation performance from outside in the semiconductor exposure machine. Active isolation system is composed of VCM and air-spring, which is main part of supports. In the present time, there are many earthquakes in any other country of the world, of course including Japan, such as Sumatora (Indonesia), Sichuan (China), MidNiigata(Japan), and are many troubles in lithograph manufacturing process. The newest exposure machine is very much expensive, further more, device company have to establish countermeasure for BCP(Business Continuity Plan)and BCM(Business Continuity Management). Then exposure machine supplier have to establish the way to avoid extensive damage that requires a long term for recovery from the earthquake.
    In this paper, the main body has soft landing by means of control air pressure in the air-spring, the machine is relieved from extensive damage of the earthquake. Therefore it is able to improve steady production by soft landing.
  • 黄 文麗, 乾 正知
    2010 年 76 巻 2 号 p. 220-225
    発行日: 2010/02/05
    公開日: 2010/08/05
    ジャーナル フリー
    Dies and molds with very deep shapes are often fabricated using a fixed 5-axis milling machine. In the process planning of such machining, determination of the cutter and shank length is a time consuming task. In this paper, an algorithm for automatically determining the optimal cutter and shank length for fixed 5-axis milling operation is proposed. The optimal length can be derived by comparing a Minkowski sum object of the workpiece and the inverted zero-length cutter, and another Minkowski sum object of the part shape and the inverted cutter. These computations of Minkowski sum objects can be accelerated by using the depth buffer mechanism of GPU which is now installed on most PCs. An experimental system is implemented and some computational experiments are performed. Our system can determine the optimal cutter and shank length for milling a complex mold in a minute.
  • 乾 正知, 櫻井 貴, 梅津 信幸
    2010 年 76 巻 2 号 p. 226-231
    発行日: 2010/02/05
    公開日: 2010/08/05
    ジャーナル フリー
    In the triple dexel model, an object shape is represented with 3 groups of axis aligned segments named X-dexels, Y-dexels, and Z-dexels. In this paper, the authors propose a data conversion method from a conventional polygonal model such as STL to a triple dexel model, and vice versa. In this method, the following technology is employed; (1) Data conversion from a polygonal model to a triple dexel model is realized by multiple applications of “depth peeling”. This process can be accelerated by using the depth buffer and stencil buffer mechanisms of GPU. (2) Data conversion from a triple dexel model to a polygonal model is realized by gathering and classifying polygons attached to the end point of neighboring dexels. An experimental conversion program is implemented and some computational experiments are performed. Our program can convert a polygonal model with 3,000,000 polygons to a triple dexel model with 1024 x 1024 resolution grids in 8 seconds. Reverse conversion from a triple dexel model to a polygonal model is realized in a second.
  • —剛体モデリングツールの開発とその応用—
    岩館 健司, 米陀 佳祐, 鈴木 育男, 山本 雅人, 古川 正志
    2010 年 76 巻 2 号 p. 232-237
    発行日: 2010/02/05
    公開日: 2010/08/05
    ジャーナル フリー
    In this decade, physics animation which realizes a realistic motion of the object has attracted the attention of researchers. However, the physics animation with animate beings which have autonomous intelligence is still in the research phase. This study aims at developing a new physics modeling software to generate behaviors for virtual creatures which have complex shapes. Developed software has functions to create physics models which have complex shapes on GUI, simulate them in real time, and generate an autonomous behavior with Artificial Neural Network. This paper describes architecture of the software and several examples of motion generations.
  • 吉川 覚, 岩崎 淳, 岸本 幹史, 保坂 寛, 佐々木 健
    2010 年 76 巻 2 号 p. 238-242
    発行日: 2010/02/05
    公開日: 2010/08/05
    ジャーナル フリー
    Dynamics of the gyroscopic power generator is studied which produces high speed rotation of magnets from low-frequency vibrations such as human body movement. First the equation of motion of the rotor is derived. Next, the equation is solved numerically and the effects of initial conditions, damping coefficient, inertia moments and axis radius on the stability of rotation are clarified. Also a design guideline for the stable generator is presented. Next an approximate solution for the transient response is obtained to clarify the mechanism of transient vibration. Finally, the transient response is observed experimentally and the validity of the numerical and approximate analyses is verified.
  • 金 亮鎮, 日比野 謙一, 尾藤 洋一, 大澤 尊光, 杉田 直彦, 光石 衛
    2010 年 76 巻 2 号 p. 243-248
    発行日: 2010/02/05
    公開日: 2010/08/05
    ジャーナル フリー
    The uniformity of the surface flatness, optical thickness distribution, and refractive index have been requested in semi-conductor industry. The absolute optical thickness of a mask-blank glass of seven-inch square and 3.1 mm thickness was measured by three-surface interferometry in a wavelength tuning Fizeau interferometer. Wavelength-tuning interferometry can separate three interference signals of the front surface shape, the rear surface shape and the optical thickness in frequency space. The wavelength of a tunable laser diode source was scanned linearly from 632 nm to 642 nm and a CCD detector recorded two thousand interference images. The number of phase variation of the interference fringes during the wavelength scanning was counted by a temporal discrete Fourier transformation. The initial and final phases of the interferograms before and after the scanning were measured by a phase shifting technique with fine tunings of the wavelengths at 632nm and 642 nm. The optical thickness defined by the group refractive index at the central wavelength of 637 nm can be measured by this technique. Experimental results show that the cross talk in multiple-surface interferometry caused a systematic error of 0.6 microns in the measured optical thickness.
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