精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
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77 巻, 3 号
選択された号の論文の29件中1～29を表示しています
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特集　世界に広がるマイクロファクトリの今—ミニマルマニュファクチャリング特集—
展望
解説
私の歩んできた道
グラビアとインタビュー　精密工学の最前線
はじめての精密工学
研究所・研究室紹介
論文
  • 非線形プロセスモデルに基づくCMP-APC (第1報)
    —セリアスラリーによる酸化膜のＣＭＰの研磨過程モデリング—
    森澤 利浩, 小林 裕通, 杉本 浩一
    2011 年 77 巻 3 号 p. 284-289
    発行日: 2011/03/05
    公開日: 2011/09/05
    DOIhttps://doi.org/10.2493/jjspe.77.284
    ジャーナル フリー
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    For oxide-CMP process in semiconductor manufacturing, which requires high precision, Run-to-Run control has been developed. The Run-to-Run control is a kind of repetitive control to adjust polishing time at every start of work in a work sequence. This control is based on a process model, which expresses the relation between polishing time and polished thickness. In this report, a modeling method of nonlinear process models is described for oxide-CMP with ceria slurry. In this method, model candidates are generated by combining arbitrary terms, whose order is up to three. And one model, which satisfies the conditions related to polishing process, is selected. The model accuracy and precision in polished thickness is evaluated with actual manufacturing samples. As the result, for 9 LSI products from 18 products, models satisfying control limits of film-thickness after CMP are automatically obtained.
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  • 潤滑膜形成磁気ディスクの摩擦耐久性の温度依存性
    黒坂 渡, 三宅 正二郎
    2011 年 77 巻 3 号 p. 290-295
    発行日: 2011/03/05
    公開日: 2011/09/05
    DOIhttps://doi.org/10.2493/jjspe.77.290
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    The tribological properties of magnetic disks coated with two different lubricants, Ztetraol and A20H-DD, at high temperatures were evaluated by performing a lateral vibration friction wear test, LM-FFM (lateral modulation friction force microscopy), SPM (Scanning probe microscope) in a controlled environment, and a load increase/decreases reciprocating friction test after heating the disks using near-infrared irradiation equipment. In the case of the Ztetraol-coated magnetic disk, considerable wear was produced in the lateral vibration friction wear test at 300°C in vacuum. In contrast, there was little wear on the A20H-DD-coated magnetic disk. The tribological properties of the Ztetraol-coated magnetic disk evaluated by the load increase/decreases friction test show that the wear resistance is higher at 200°C, and lower at 250°C than that at room temperature. On the other hand, the durability of the A20H-DD-coated magnetic disk was greater at 250°C and lower at 350°C than that at room temperature. The bonding layers of lubricant formed upon heating at a suitable temperature increase the durability. In contrast, upon heating at a higher temperature the free lubricant is solidified and can be removed by tip of SPM sliding. A20H-DD has excellent durability at high temperatures.
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  • ガラス基板への通り穴加工におけるステップ加工時の加工条件と欠けの抑制
    溝渕 啓, 小川 仁, 升田 雅博
    2011 年 77 巻 3 号 p. 296-300
    発行日: 2011/03/05
    公開日: 2011/09/05
    DOIhttps://doi.org/10.2493/jjspe.77.296
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    Hard and brittle materials such as ceramics and glass are not only difficult-to-machine but also occur easily cracks at the exit surface in through-hole drilling. This paper deals with through-hole drilling of soda-lime glass plate using an electroplated diamond tool in order to find out drilling conditions for smaller cracks, higher processing efficiency and longer tool life. The crack is smallest under a spindle revolution of 15000min-1, a feed speed of 1mm/min, a step feed of 0.1mm/step and a mesh size of #600. A large decrease of thrust force results from the penetration that the large cracks occur. The maximum diameter included the crack is smaller than that of the tool. The residual is removed as the tool feeds. The cracks at the exit increase with the drilling numbers. The drilling time is about 430s per a hole.
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  • 5軸マシニングセンタのテーブル回転軸中心線推定方法
    山本 通, 堤 正臣
    2011 年 77 巻 3 号 p. 301-305
    発行日: 2011/03/05
    公開日: 2011/09/05
    DOIhttps://doi.org/10.2493/jjspe.77.301
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    One of the causes of accuracy deterioration in 5-axis machining centers is centerline error in the rotational axis of the rotary table. This factor can not be ignored when maintaining accurate machining of high quality workpieces. In this study, the mathematical model of the centerline of rotation uses a directional vector and a center point, which is proposed as a new test method for easily determining the centerline on the shop floor. And two procedures are explained here : first, through manual measurements when a touch probe is not available, and second, with a touch probe and master ball for automatic measurements. By establishing the axis of rotation, an arbitrary point on the table after rotating a certain angle can be calculated. Then, after actually rotating, the master ball center position on the rotary table can be compared to the calculated value. From these results, the effectiveness of the proposed method is experimentally confirmed.
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  • 超音波振動を援用した高アスペクト比微細深穴加工
    —燃料噴射ノズルへの微細深穴加工—
    南部 洋平, 落合 一裕, 堀尾 健一郎, 金子 順一, 渡辺 武, 松田 信一
    2011 年 77 巻 3 号 p. 306-310
    発行日: 2011/03/05
    公開日: 2011/09/05
    DOIhttps://doi.org/10.2493/jjspe.77.306
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    This study aimed to achieve the high-aspect-ratio microdrilling in L/D=20 by the addition of ultrasonic vibration during drilling. In the experiment in L/D=10, the amplitude of ultrasonic vibration from viewpoints of tool wear and thrust force are determined. The high-aspect-ratio microdrilling in L/D=20 was examined based on the processing conditions in L/D=10. The following results are obtained. The decrease of the cutting rate and the use of the microdrill with thinning are necessary to apply the supersonic vibration for high-aspect-ratio microdrilling in L/D=20.
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  • カーボンオニオンのナノ砥粒としての適用可能性に関する研究
    向後 博康, 平田 敦
    2011 年 77 巻 3 号 p. 311-315
    発行日: 2011/03/05
    公開日: 2011/09/05
    DOIhttps://doi.org/10.2493/jjspe.77.311
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    The current research has investigated the applicability of carbon onions as a nano-abrasive. Carbon onions were prepared from nano-diamond particles by annealing with an induction heating furnace, and silicon wafers were polished with carbon onions. The surfaces polished with carbon onions and non-annealed nano-diamonds were compared using an atomic force microscope in terms of the number of scratches and the surface roughness. The surface roughness of the wafer polished with non-annealed nano-diamonds was 0.59 nmRy and numerous scratches were formed on the surface. On the other hand, the surface roughness of the wafer polished with carbon onions was 0.38 nmRy and few scratches were observed on the surface. This reveals that the abrasive performance of carbon onions would be superior to that of non-annealed nano-diamonds.
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  • 駆動型ロータリ切削による難削材の高能率加工におけるMQLの効果
    —工具温度と切りくず凝着—
    山本 博雅, 佐竹 健太郎, 笹原 弘之, 成田 徹, 堤 正臣, 村木 俊之
    2011 年 77 巻 3 号 p. 316-321
    発行日: 2011/03/05
    公開日: 2011/09/05
    DOIhttps://doi.org/10.2493/jjspe.77.316
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    In rotary cutting of Inconel718 (AMS5663), which is solution treated and age-hardened to HRC 45, this study clarifies the cutting speed achieving both higher efficiency and longer tool life, and prevents adhesions on the cutting edge and machined surface. Dry and MQL rotary cutting tests were carried out using coated carbide tools with an infrared thermal imaging camera. Cutting speeds were set up to 300 m/min, which is almost ten times higher than the speed recommended for conventional single point turning. At higher cutting speeds, less adhesions and subsequently less chippings on the tool rake face were observed, due to the larger amount of the cutting heat caused per unit time. Additionally, at the cutting speed of 300 m/min, the flank wear was small, due to the smallest amount of heat influx to the cutting tool in tested cutting speed range. Severe chips' adhesions on both the cutting edge and the machined surfaces were observed in dry rotary cutting. However, in MQL rotary cutting, cutting fluid which is delivered to the cutting edge, improved lubricity of the tool-chip interface and prevented the adhesions.
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  • 低炭素快削鋼の被削性に及ぼす介在物形態の影響と工具摩耗機構
    松井 直樹, 長谷川 達也, 藤原 順介
    2011 年 77 巻 3 号 p. 322-326
    発行日: 2011/03/05
    公開日: 2011/09/05
    DOIhttps://doi.org/10.2493/jjspe.77.322
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    In order to assess an effect of MnS morphology on surface roughness of low carbon free cutting steel, a turning test using carbide inserts was demonstrated for two free cutting steels containing different type of MnS inclusions. No built-up edge was formed at top of minor cutting edge in the insert, which machined the steel containing globular MnS, but a groove-like wear with regularly-arranged depressions arose at flank face of the minor cutting edge. And, the surface roughness was proportional approximately to the depth of worn depression in the groove-like wear. In the other insert machined the steel containing smaller MnS, a large built-up edge was formed and it seemed to be caused the inferior surface roughness. A TEM assessment for cross section of the worn tool surface clarified that microstructure of α-iron layer, which adhered on the worn tool surface during machining, was composed of deformed fine grains. And it was found that WC particles worn away with sharp edge at the interface with the α-iron layer. Results in the TEM assessment suggested that diffusive wear of tool component into the adhering α-iron layer on the tool surface was likely explanation for the tool wear mechanism.
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  • 超高精度歯車測定機の開発
    —直接駆動方式実験機の試作とその基本性能確認—
    田口 哲也, 明 愛国, 下条 誠, 金森 哉吏, 梶谷 誠, 竹田 龍平
    2011 年 77 巻 3 号 p. 327-332
    発行日: 2011/03/05
    公開日: 2011/09/05
    DOIhttps://doi.org/10.2493/jjspe.77.327
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    The quality of gears is classified according to deviations measured by a gear measuring machine by ISO 1328-1, and recently a system to evaluate gear measuring machines is to be established with the requirements of high precision gears. The purpose of our research is to develop an ultrahigh precision gear measuring machine with small uncertainty of measured values and repeatability less than 1 micro meter. To reduce the transmission errors caused by the mechanism in conventional gear measuring machines, the experimental instrument consisting of two direct drive axes, linear axis and rotary axis, has been developed and its performance has been verified by authors. The mechanism, control and fundamental performance of the experimental instrument are described in this paper.
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  • 空中文字ジェスチャを用いた視覚インタフェース
    浅野 敏郎, 宮田 明, 本田 幸生
    2011 年 77 巻 3 号 p. 333-337
    発行日: 2011/03/05
    公開日: 2011/09/05
    DOIhttps://doi.org/10.2493/jjspe.77.333
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    A visual interface system that recognizes handwriting of Japanese katakana characters in the air has been developed. Characters written in a single stroke have both on-strokes and off-strokes. In this study, a light emission diode (LED) pen and a TV camera are used to capture the LED light trajectory, and the movements of the light are converted into direction codes correcting the slant of the handwriting character. The codes are normalized to 100 data items to eliminate the effect of writing speed. The 100 direction codes are compared with model data in which the direction codes of 46 Japanese characters are defined. Next, the system has expanded to a multi-camera system. Two of four cameras are selected and the 3-D positions of the gesture trajectories are calculated by the stereo method, and the position data are converted into front view data. In the experiments, we attained a recognition rate of 92.9% for the single-camera system. The multi-camera system has the advantage that it can recognize gestures regardless of the origin directions of the gestures. The system also has the ability to recognize the directions of the gesture commands with an accuracy of 9°.
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