A surface acoustic wave (SAW) linear motor is a kind of ultrasonic motors. The advantages of the SAW linear motor are thin structure, large output force, high speed, precise positioning and so on. On the other hand, the motor has a problem with wear of contact surface. The SAW linear motor consists of a LiNO
3 substrate as a stator transducer and a silicon substrate with distributed projections as a slider. The stator transducer material, however, is easily worn due to friction drive. Moreover the silicon projections may enhance the wearing. Lifetime of the motor is reduced by the wear of the stator. To solve this problem, previously, segment-structured diamond-like carbon (S-DLC) films have been applied to the stator transducer surface. Enough driving performance has not been observed yet by the stator with the S-DLC films. The reason of this problem was edge shape of segments of the S-DLC films. In this report, we propose a new preparation method to fabricate the S-DLC films with round edge. Trial fabrication of the structure, abrasion test for the driving surface and driving characteristic with the stator are also reported.
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