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51 巻, 7 号
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堀向 仁1985 年 51 巻 7 号 p. 1285-1290
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリー以上半導体デバイス産業における生産技術の特徴や課題について述べたが,総合的見地から今後の課題に触れてまとめとする.企業活動としての生産技術は生産性を向上させ収益増大を企てることを目的としたものであることはいうまでもないが,企業活動の究極の目標は社会への貢献にあるのだから,生産技術の向上が従業員の人間性を阻害したり明るい職場を奪うものであってはいけない.常に人との関係を重視しつつその目的を果たす生産技術でありたい.この意味でも図1に示した環境や用役に関する生産技術,各種管理に関する生産技術は極めて重要であり,狭義の生産技術の発展と共にバランスよく発展していく必要があろう.そしてこれら半導体総合生産技術の発展は広範囲にわたる基盤技術の発展の上に成り立っているし,LSIの開発や生産に用いる諸装置はますます高精度化が必要となるので,精機学会への期待も大きい.抄録全体を表示PDF形式でダウンロード (1071K) -
佐藤 幹郎1985 年 51 巻 7 号 p. 1291-1295
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーPDF形式でダウンロード (961K) -
有村 誠一, 二宮 正晴1985 年 51 巻 7 号 p. 1296-1302
発行日: 1985/07/05
公開日: 2010/02/16
ジャーナル フリーPDF形式でダウンロード (1268K) -
公江 清彦, 藤田 慶一郎1985 年 51 巻 7 号 p. 1303-1309
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーPDF形式でダウンロード (1316K) -
高速反応性イオンエッチング堀池 靖浩, 岡野 晴雄1985 年 51 巻 7 号 p. 1310-1313
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーPDF形式でダウンロード (672K) -
リアクティブイオンエッチング装置と加工特性塚田 勉, 鵜飼 勝三1985 年 51 巻 7 号 p. 1314-1317
発行日: 1985/07/05
公開日: 2010/02/16
ジャーナル フリー以上,RIEバッチ処理装置の構造とエッチング特性について解説した.ウエハの大口径化に伴い,バッチ処理装置の優位性は失われつつあると言われている.しかし,φ150mmウエハのエッチソグ特性に関して見る限り,今後予想されるウエハの大口径化にも,バッチ処理が対応出来る可能性は大きい.又,RIEのサブミクロンへの適用性に関しても,図7～9や図6より明らかなようにサブミクロンパターンのエッチングに十分対応出来ると思われる.抄録全体を表示PDF形式でダウンロード (5406K) -
枚葉式プラズマエッチング装置長阪 道雄1985 年 51 巻 7 号 p. 1318-1321
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーPDF形式でダウンロード (6216K) -
岡本 敏明1985 年 51 巻 7 号 p. 1322-1325
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーPDF形式でダウンロード (698K) -
水上 光雄1985 年 51 巻 7 号 p. 1326-1330
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーPDF形式でダウンロード (1069K) -
小日向 久治, 中山 泉1985 年 51 巻 7 号 p. 1331-1335
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーPDF形式でダウンロード (1052K) -
空気浮上リニアモータ方式福渡 一郎1985 年 51 巻 7 号 p. 1336-1339
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーPDF形式でダウンロード (681K) -
転がり集電子方式守屋 英紀, 平石 眞, 山内 寛至1985 年 51 巻 7 号 p. 1340-1343
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーPDF形式でダウンロード (752K) -
磁気浮上式松田 隆一1985 年 51 巻 7 号 p. 1344-1348
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーPDF形式でダウンロード (5997K) -
山崎 幹也, 山崎 信人1985 年 51 巻 7 号 p. 1349-1353
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーPDF形式でダウンロード (768K) -
IV.SN比の求め方(2)田口 玄一1985 年 51 巻 7 号 p. 1354-1359
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーPDF形式でダウンロード (989K) -
システム構築沢井 秀, 秋山 十三, 星 寔, 沖野 教郎, 嘉数 侑昇1985 年 51 巻 7 号 p. 1363-1369
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーSMDS which stands for Sony Mold Design Simulator has been developed as a part of an integrated CAD system for injection mold design. This paper describes the prototype system of SMDS, and some examples that are applied to the actual injection mold design are presented. SMDS has been developed to realize the system that can process the geometric data of a mold, based on CSG solid modeler TIPS-1 system. However, there are some future subjects, i.e., physical analysis, simulation of mold flow and so on. These problems should be solved using the model generated in SMDS in the near future. In SMDS, the process of mold design is done by interactive operations and several useful functions for mold design, i.e., shrinkage process, automatic generation of cavity and core, drafting process, and dimensioning and tolerancing, are prepared. Additionally, SMDS has an interface to a 2-D drafting system that can generate complete drafts using interactive operations.抄録全体を表示PDF形式でダウンロード (1060K) -
減衰槽を用いた超精密油温制御千輝 淳二, 鈴木 英史, 垣野 義昭1985 年 51 巻 7 号 p. 1370-1376
発行日: 1985/07/05
公開日: 2010/02/16
ジャーナル フリーSuper precision control of oil temperature is essential to obtain thermal stability required in super precision machining. For this purpose, two types of temperature control have been used ; PID control and multi-stages ON-OFF control. The former requires a preliminary temperature control of ±0.1°C prior to the main control, and frequency of temperature fluctuation must be over 1 h. The latter requires at least two system of ON-OFF control, and flow rate of controlled element must be set large, causing increase in the size of set-up and its total cost. In this study ON-OFF control is combined with an absorber which damps the temperature fluctuation from ON-OFF control. This system requires only a single step of ON-OFF control, and far more inexpensive than PID control system ; moreover huge tanks are not needed. Based upon theoretical analyses, super precision control system of oil temperature has been constructed and its performances have been tested. As the results, the temperature fluctuation was kept less than 0.014°C and drift of temperature during continued operation was only about 0.006°C/h. Key words : machine tools;super precision temperature control;temperature fluctuation absorption抄録全体を表示PDF形式でダウンロード (1232K) -
林 輝, 林 巌, 中嶋 芳弘, 張 志〓, 野村 昭一郎1985 年 51 巻 7 号 p. 1377-1382
発行日: 1985/07/05
公開日: 2010/02/16
ジャーナル フリーThe mechanical and electrical characteristics of the PMN ceramic based piled actuator are studied : the stiffness of the actuator is influenced by the finishing accuracy of the disc element and the thickness and Young's modulus of the electrode material, the electrostrictive characteristics of the piled actuator is equal to the sum of the one of disc element, the actuator has the most suitable bias voltage at which it has the largest piezoelectric constant. As the result, the actuator can be used for compensating the errors of hobbing machine.抄録全体を表示PDF形式でダウンロード (2947K) -
締付軸力のばらつきと耐疲労性大橋 宣俊, 萩原 正弥, 吉本 勇1985 年 51 巻 7 号 p. 1383-1389
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーIn the first part of this study, the tightening experiments are performed with emphasis on an evaluation of tightening characteristics using threaded fastener tightening test machine. As a result of the above experiment, the coefficient of variation in the distribution of axial force by the torque gradient control method which tightens bolts up to the limit of elasticity is found to be about one-third of that obtained by the torque control method which tightens bolts in the elastic region. Secondly, the fatigue tests are performed with the bolted joint of two cylinders tightened by the elastic limit tightening or by the elastic region tightening. It is confirmed that the bolted joint tightened to the limit of elasticity has the better safety against fatigue than that tightened in the elastic region by the torque control method.抄録全体を表示PDF形式でダウンロード (1197K) -
ドリハの切削抵抗解析小林 明発, 藤吉 正之進, 清水 昭八1985 年 51 巻 7 号 p. 1390-1395
発行日: 1985/07/05
公開日: 2010/02/16
ジャーナル フリーIn this paper, cutting characteristics of a new rotary cutting tool "driha" are analyzed theoretically and examined experimentally. This tool can perform smoothly both cuttings of drilling and cutting out of board materials by hand work. As a result, it is clarified that the cutting characteristics of driha can estimate quantitatively by considering both resistances of chip formation by cutting edge and interference between cylindrical land of driha and workpiece, and are remarkably influenced by the interference resistance between cylindrical land of driha and workpiece.抄録全体を表示PDF形式でダウンロード (1100K) -
セルフフラッシング法による排除・分散増沢 隆久, C. J. HEUVELMAN1985 年 51 巻 7 号 p. 1396-1402
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーThis paper deals with a new flushing method for EDM diesinking. A self flushing (SF) system which is based on the pumping effect by a special movement of the electrode is proposed to improve the flushing efficiency. A prototype system is developed and tested on its effectiveness. The result shows the superiority of this method to conventional lifting method especially in the stability of machining and consequently in the productivity. This SF method can easily be applied on a machine which supports a planetary movements.抄録全体を表示PDF形式でダウンロード (1266K) -
孔がれ・打抜き・引張切断鎌田 弘, 松永 和夫, 坂本 祥1985 年 51 巻 7 号 p. 1403-1408
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーThe relationship between paper physical properties and processing characteristics which are feed hole strength, punching load and burst strength, is studied. The main results obtained are summarized as follows : (1) Feed hole strength, punching load and burst strength are depended on increase in basis weight of paper and processing speed. (2) To the feed hole strength, the contribution of tensile strength and tear strength of paper is nearly equal. (3) Punching process of paper is distinguished into compressing and shearing process. The paper shear resistance value is from 70° to 90° MPa. (4) Burst strength depended on tip angle made of bursting blade and paper path, is decreased with reduction of tip angle up to 70°. Practical burster is adopted 72° on tip angle, and accomplished highly reliability.抄録全体を表示PDF形式でダウンロード (887K) -
ステンレス鋼の円筒プランジ研削中山 守, 工藤 勝久, 玉村 謙太郎, 池田 勝彦1985 年 51 巻 7 号 p. 1409-1413
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリー以上の結果をまとたると,次のようになる.
(1)研削比の向上には極圧添加剤の効果は大きい。すなわち,研削比はSの場合が最も大きく,そしてP,C1の順である.
(2)SUS304の場合,研削条件が過酷になると凝着を起こし,本実験の場合いかなる添加剤でもそれを防げなかった.しかし,それを軽減する効果はSが最も大きかった.
(3)仕上面粗さの向上には,いずれの被削材に対してもPの効果が大きい.
(4)研削抵抗はSUS304,SUS440Cのいずれに対しても,P,C1,Sの順に小さくなる傾向があり,特に法線研削抵抗にその傾向が顕著に現れる.
(5)本実験条件の範囲内では,SUS440CはSUS304ほど難削材ではない.抄録全体を表示PDF形式でダウンロード (2004K) -
すべり軸受への試案和田 正毅, 水野 萬亀雄1985 年 51 巻 7 号 p. 1414-1419
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーすべり軸受の寿命を延ばす手段として,固体潤滑剤の皮膜を摩擦面につねに形成させることを考えている.本報ではクロスバータイプ試験機を用いて,3種類の固体潤滑剤(二硫化モリブデソ,グラファイト,PTFE)について,その微粉をホワイトオイルに混入して潤滑した場合,あるいはホワイトオイルを供給しながら回転する軸材料の摩擦面に固体潤滑剤のペレットを押し付け,皮膜を形成させた場合の軸受材料の摩擦・摩耗特性について調べた.その結果次のことがわかった.
(1)ホワイトオイル潤滑下において,固体潤滑剤の存在は摩擦係数に大きな差を与えない.
(2)耐摩耗効果に関して,PTFEは微粉あるいはペレットの使用形態にかかわらず良好な耐摩耗効果を与える.
(3)二硫化モリブデンやグラファイトは,低速時には微粉による使用が有効に,速度が大きくなるにつれペレットの方が有効に作用する.抄録全体を表示PDF形式でダウンロード (3382K) -
前畑 英彦, 釜田 浩, 山本 昌彦1985 年 51 巻 7 号 p. 1420-1427
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーUsing the Electrolytic-abrasive Mirror Finishing Method, a large area of stainless and ordinary carbon steel works can be easily mirror-finished in a short time and with high efficiency up to a surface roughness of 0.01-0.02 μmRz. This method is based on the fact that the electrolytic effect is assisted by the removing section of abrasive grains within an appropriate current density range by using of neutral salt type electrolytes. This paper, first of all, clarifies combined effect of the electrolytic dissolution and polishing action of abrasive grains in this method. Furthermore it describes results of the experimental analysis on surface shape of the machining process and the formation mechanism of surface roughness.抄録全体を表示PDF形式でダウンロード (2910K) -
安井 武司, 佐藤 晶夫, 稲村 豊四郎1985 年 51 巻 7 号 p. 1428-1434
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーThe mechanism to cause curved profile of cut surface in band sawing is studied from both analytical and experimental points of view. The simulation model is built taking into account the guide error of the bandsaw blade, the inequality of the sharpness and setting angle of the bandsaw teeth, the bending and torsion stiffness of the bandsaw blade and the thrust force per tooth per unit thickness, to show the validity of the model in explaining the curvature of cut surface. The discrepancy observed between the analytical and experimental results with regard to the effect of the guide error of the bandsaw blade is considered due to the neglect of the unstable state at the initial stage of cutting in the model. Finally the attachment which enables one to adjust the guide angle of the bandsaw blade is proved effective in reducing the undesirable curvature of cut surface.抄録全体を表示PDF形式でダウンロード (2907K) -
鴻巣 健治1985 年 51 巻 7 号 p. 1435-1440
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーIn external cylindrical traverse grinding of a slender workpiece, intermittent grinding phenomena that the workpiece is separated partially from the wheel during cutting can be frequently observed. The cause for the phenomena is considerably influenced the thermal deformation of the workpiece. This paper deals with the experimental and analytical investigation of the temperature distribution on the workpiece. The obtained results are as follows: (1) Temperature rise of the workpiece depends on the grinding condition. (2) The propriety of proposed calculation model is confirmed experimentally. (3) Temperature rise is not uniform on workpiece while rising whirl motion.抄録全体を表示PDF形式でダウンロード (920K) -
松原 十三生, 水本 洋, 山本 久隆1985 年 51 巻 7 号 p. 1441-1446
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーA work regenerative chatter in plunge grinding is theoretically studied in this paper. A dynamic grinding force due to the penetrating volocity is derived from a simple basis of a constant volumetric grinding energy theorem for the work material. The contact behaviour between the surfaces of the grinding wheel and work is also included in the analysis and it is shown that each contact stiffness of the grinding wheel and work should be separately treated in the vibration system in plunge grinding. A new block diagram for the regenerative chatter in plunge grinding is introduced and the critical conditions for the chatter vibrations are discussed. The results obtained are as follows. The effects of a number of the grinding variables such as the structural dynamic stiffness, damping coefficient, the natural frequency, the volumetric grinding energy of the material, the plunge velocity, the diameter of the work and wheel, grinding width and the contact stiffness of the wheel and work, on the stability of the chatter are all calculated. The effects of the structural stiffness and the grinding width on the chatter are much different from the results expected in other investigations given by many researchers. The structural stiffness has only small effect on stabilizing the chatter at relatively large grinding width. The large grinding width may also cause to suppress the chatter.抄録全体を表示PDF形式でダウンロード (1048K) -
旋削バイトのすべり挙動と減衰特性(第2報)丸井 悦男, 江馬 諭, 加藤 仁1985 年 51 巻 7 号 p. 1447-1452
発行日: 1985/07/05
公開日: 2009/06/30
ジャーナル フリーThis paper presents the experimental investigation on the contact rigidity between turning tool shank and the tool post. The obtained results are as follows : (1) The contact rigidity is influenced by the bending stiffness of tool shank, contact area in tool shank and the Vickers hardness number of shank material. (2) The effects of these parameters on the contact rigidity are estimated by brief empirical expressions. (3) The contact rigidity in the normal direction to the contact plane is susceptible to stronger influence from the bending stiffness of tool shank and that in the parallel direction to the contact plane is to the contact area in tool shank.抄録全体を表示PDF形式でダウンロード (765K) -
接触弧内に浸潤した研削液量の評価穐山 敏雄, 柴田 順二, 米津 栄1985 年 51 巻 7 号 p. 1453-1459
発行日: 1985/07/05
公開日: 2010/02/16
ジャーナル フリーIn this paper, the film thickness of grinding fluid actually existing in the micro-gap of the wheel-work contact area was investigated experimentally and effective delivery conditions of the grinding fluid were discussed. The results obtained here are summarized as follows : (1) The film thickness can be identified from measuring its electric resistance. (2) There exist two processes for carrying the fluid suppied from a nozzle into the wheel-work conatct area. They are (a) the fluid adheres on or permeates into the wheel and is carried into the contact area by the wheel rotation, (b) the fluid enters the contact area directly from the grinding nip. Though the latter process is generally far effective in comparison with the former one, the reverse is also possible depending on delivery conditions of the grinding fluid. (3) Most effective nozzle setting angles with various delivery conditions of the grinding fluid, such as nozzle setting position φ, flow rate Q, etc., were made clear.抄録全体を表示PDF形式でダウンロード (1492K)
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