Structure dependence of magnetic properties of Fe-Al-Si (Sendust) alloy films was studied. The films were fabricated by electron beam evaporation method. The structure was changed by annealing or substrate temperature. Annealing improved the soft magnetic properties of the films. X-ray diffraction showed that the stress in crystal grains in the films decreased and ordering of the DO
3 structure was enhanced by annealing. On the other hand, however both grain size and degree of orientation of the film were changed by the substrate temperature, soft magnetic properties depend strongly on degree of orientation.
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