Textile industrial wastewater contains many chemical remnants. Decolorization of synthetic textile wastewater containing 20 mg/l azo-dye (Orange II), 30 mg/l nonionic surfactant, 30 mg/l sodium carbonate and 70 mg/l sodium sulfite by ozonation combined with VUV Radiation was investigated. The decolorization efficiency was increased to 97% in the presence of the nonionic surfactant, and the mass-transfer coefficient for ozone was 1.3 times that of a case where the surfactant was not present.