電気加工学会誌

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Reaction-bonded silicon carbide (RB-SiC) is a Si–SiC composite material consisting of SiC particles and free silicon (Si), and has excellent mechanical properties such as corrosion and wear resistance. In this study, to explore the possibility of laser-induced generation of RB-SiC, a target was prepared by mixing graphite powder with Si grinding sludge, an industrial waste generated in the semiconductor manufacturing process. The target surface was irradiated using a fiber laser with a wavelength of 1070 nm in a single shot with a pulse width of 10 ms. As a result, various RB-Si–SiC composite structural changes were observed after laser irradiation, such as SiC particle ejection, the growth of anemone-like nanofibers, and the deposition of nanoparticles in a concentric pattern. The possibility of locally producing RB-Si–SiC composite materials from waste materials as a result of the thermal effects of laser irradiation was demonstrated.

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