プラズマ・核融合学会誌
Print ISSN : 0918-7928
81 巻, 2 号
選択された号の論文の6件中1~6を表示しています
Rapid Communications
解説
  • 節原 裕一
    2005 年 81 巻 2 号 p. 85-93
    発行日: 2005年
    公開日: 2005/07/29
    ジャーナル フリー
    Development of large-area high-density plasma sources with a scale length of meters is strongly desired for a variety of plasma processes, especially the flat panel display fabrications. Considering design issues for plasma production with high-frequency power sources to satisfy the requirements for enlargement of source-size exceeding a meter, the power deposition profile and hence the plasma distribution become inherently non-uniform, largely due to standing wave effects, which cannot be avoided with increasing source size when the source employs power-coupling devices (inductive antennas or capacitive electrodes) with a scale-length equivalent to or as long as the 1/4 wavelength of the HF-power transmission. In this article, these constraints associated with large-area sources are reviewed, and an inductively coupled RF plasma source with multiple low-inductance antenna (LIA) units is presented as a promising candidate to avoid the problems with conventional sources.
  • 安藤 利得, 飽本 一裕, 谷川 隆夫
    2005 年 81 巻 2 号 p. 94-104
    発行日: 2005年
    公開日: 2005/07/29
    ジャーナル フリー
    This article is intended as a short guide to the field of “Langmuir turbulence.” Various theoretical and experimental studies on Langmuir turbulence have been carried out since the 1960s; consequently, a number of its fascinating properties have been uncovered. However, there still remain important unsolved issues in this basic field of plasma physics. In the present article, the history and recent research activities concerning Langmuir turbulence are briefly reviewed.
講座 「はじめてのデータ収集」
研究論文
feedback
Top