In the theoretical analysis of the harmonic generation due to the interaction of microwave with plasma, it has not been explicitly taken account of plasma oscillations. So the problems, for instance, the frequency dependence of harmonic power have not been elucidated. In this paper, considering an inner electric field of plasma in addition to the external microwave field, a following mechanism is proposed that the harmonic power becomes remarkable, when the applied microwave frequency ω is in resonance with a plasma frequency ω
p.
Solving the Boltzmann and Poisson equations simultaneously by the perturbation method, the harmonic components of the distribution function of electron, the inner electric field are obtained. Further, the current density, the harmonic power and a power conversion ratio are evaluated for the case in which the thermal motion of electrons in plasma may be neglected. In addition, we can show that the power of even harmonics may vanish in the case of the symmetrical discharge post.
View full abstract