A flame combustion method enables the synthesis of diamond using acetylene-oxygen gas in ambient atmosphere. It has various advantages over other methods. We previously synthesized diamond films on a Mo substrate surface by the flame combustion method. To prevent diamond film delamination for the synthesis of good diamond films, a three-step synthesis method was proposed. However, the surface roughness of synthesized diamond films by this method became large, and it is necessary to reduce the surface roughness. In this study, to reduce the surface roughness, amount of diamond paste with the diamond seed particles as generation nuclei for the diamond seed attachment processing of synthesis of diamond films was carefully varied in the range of 0.050~0.150 g. To investigate the surface morphology and the surface roughness of synthesized diamond films, synthesized films were observed. Amount of diamond paste with the diamond seed particles affected the surface morphology and the surface roughness of synthesized diamond films. Amount of diamond paste with the diamond seed particles was increased, the surface roughness of the synthesized film was reduced by this study. The surface roughness in the Case 5 condition was the smallest in this experiment. Furthermore, to investigate influence of the surface roughness of synthesized diamond films, generation nuclei on the substrate in the synthetic initial stage and diamond seed particles on the substrate surface after the seeding treatment were observed. Relationship between number of diamond generation nuclei on the substrate in the synthetic initial stage and surface roughness and amount of diamond paste were confirmed.
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