Surface electric resistance and chemical state have been investigated for TiO
2 bombarded with 8keV ions (B
+, C
+, N
+, O
+, F
+ and Ne
+ ions). The tendencies of the resistivity change by the ion irradiation are divided into three groups; 1) no chemical change but significant decrease of electric resistance is observed (B
+ and C
+ ions), 2) neither chemical change nor decrease of electric resistance is observed (N
+, O
+ and F
+ ions), and 3) both chemical change and decrease of electric resistance are observed (Ne
+ ions). For the Ne
+ ion irradiation, a Ti3d-derived new band appears near the Fermi level. It suggests that a part of electrons in its level becomes carrier of the conductivity. On the other hand, the Fermi edge in the UPS spectra remains unchanged for the B
+ and C
+ ion irradiations, which implies that carrier of the conductivity is positive holes created by the implanted ions.
抄録全体を表示