We have developed the Glancing-Incidence and -Takeoff X-Ray Fluorescence (GIT-XRF) method. X-ray fluorescence intensity depends on both the incident angles of primary x-rays and the takeoff angles of detected fluorescence x-rays. Since the observed depth depends on the two angles, nondestructive-depth profiling is possible by changing the two angles in the GITXRF measurements. In this paper, the GIT-XRF method was applied to the analyses of Au-Si interface reaction and the surface oxidation of Fe-20% Cr alloy.