We have recently developed a high speed mapping system (Hsystem) and a scanning image processing system (SIPS).
The Hsystem comprises a digital scan converter, a color controller, and a color CRT.
The digital scan converter collects various signals such as secondary electrons, backscattering electrons, X-ray, and others by means of either beam scanning or stage scanning at a very high speed. The image information is displayed on the color CRT after realtime processing by the color controller.
The SIPS is a computer system that dynamically controls EPMA by means of a 32-bit super minicomputer. The system has an automatic analytical software including collecting mapping data from the Hsystem or directly from the EPMA, and permits highly sophisticated image analysis of mapping data as the image and the own data of EPMA.
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