巻号一覧
10 巻, 12 号
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河村 祐治, 牧原 洋1967 年 10 巻 12 号 p. 419-428
発行日: 1967/12/20
公開日: 2009/09/29
ジャーナル フリーPDF形式でダウンロード (1605K) -
竹本 豊樹, 石原 健, 照井 康明, 秋山 健二1967 年 10 巻 12 号 p. 429-436
発行日: 1967/12/20
公開日: 2009/09/29
ジャーナル フリーIt is the purpose of this investigation to develop the techniques of depositing SiO2, Ta2O5 films on silicon by reactive sputtering. The infrared absorption, the refractive indexes, the dielectric constants, the dielectric breakdown strengths and ultraviolet absorptions of these films indicate that the oxides may be considered as stoichiometric SiO2, Ta2O5. The interface properties of these systems are evaluated mostly by the C-V curves of MOS diodes. The surface state charge density of 120 × 1011/cm2 is measured, they can be decreased by selecting the discharge conditions to minimize the bombardment effects of ions and electrons. C-V curves of MOS diodes with large surface states show frequency dependence. Frequency dependences of these elements are examined experimentally and theoretically. The qualitative agreement between the theoretical and experimental C-V curve is obtained. But these surface states produced by sputtering can be decreased by heat treatments above 700°C.抄録全体を表示PDF形式でダウンロード (994K) -
山科 俊郎, 藤永 敦, 花坂 孝雄1967 年 10 巻 12 号 p. 437-444
発行日: 1967/12/20
公開日: 2010/01/28
ジャーナル フリーPerformance of a quadrupole mass filter constructed under the suggestion of Paul et al is described with the main object of an application to the study on chemical reactions. With the mass filter having four analysing rods of 8 mmφ × 100mm, gases and vapors with the mass range 1 to 300 and in the pressure range of 10-4 torr to the ultra high vacuum can be analysed in scanning rate of 10-3 to 20 sec/AMU. The mass filter spectra of several organic gases were compared with the standard spectra, the both being found to be nearly same in the cases of gases of mass number less than about sixty. Using the catalytic reaction apparatus connected to the mass filter, a study on flash desorption of the adsorbed layer of iso-propyl alcohol on nickel oxide was carried out. Very small amounts of the desorbed gases such as acetone, propylene, carbon dioxide and so on, could be detected for a few minutes. Discussion was made on the mechanism of catalytic decomposition of iso-propyl alcohol, and it was pointed out that the use of mass filter could be very successful as a monitor of chemical reactions.抄録全体を表示PDF形式でダウンロード (1329K)
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