真空
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
17 巻, 6 号
選択された号の論文の3件中1~3を表示しています
  • 広瀬 博, 田谷 俊陸, 津山 斉, 三谷 英介
    1974 年 17 巻 6 号 p. 181-185
    発行日: 1974/06/20
    公開日: 2009/09/29
    ジャーナル フリー
    An electrostatic hexapole lens is used for the study to correct the image curvature resulting from second order aberration in a mass spectrometer. The mass spectrometer used is a Hitachi RMU-6D double focusing type especially attached a photographic detector. The hexapole lens is located between the electrostatic analyzer and the magnet at the distance 134 mm from the magnet. This lens consists of six stainless steel poles which are 6 mm in diameter, 40 mm long, and the distance from the symmetry axis to the nearest point of the electrodes is 7 mm. When the potentials of ±4.5 V are applied to the poles alternatively, the image curvature can be corrected without any additional effects of in-troduced abrerrations.
  • 橋場 正男, 花坂 孝雄, 山科 俊郎
    1974 年 17 巻 6 号 p. 186-193
    発行日: 1974/06/20
    公開日: 2009/09/29
    ジャーナル フリー
    Reproducibility and stability in pattern coefficient of a quadrupole mass filter in a sputter ion pump system have been studied systematically. In order to the quantitative measurement of dynamic re-emitted gases from the ion pump, a conductance adjusting valve was inserted between the measuring chamber and ion pump. Before admission of gases, most of residual gases such as hydrogen, nitrogen and some hydrocarbons were observed not to increase with increase of total pressure by closing the adjusting valve, while argon and methane were increased. When propylene was admitted into the chamber as sample gas, the minimization of the re-emission of gases was achieved in case of 5-10 as the pressure ratio between the chamber and pump in this study. Although the re-emission from the pump reduce for larger pressure ratio, the dynamic re-emission from the chamber increased considerably as closing the valve, in spite of the relatively small amount of residual gases as seen in the case before gas admission.
    Comparison of the reproducibility in pattern coefficient of the mass filter with and without electron multiplier was also investigated systematically. The fluctuation coefficient 2σ/x (σ : standard deviation, x : mean value of pattern coefficient) was approximately 2 percent and no troublesome effect by the multiplier was found in the quantitative analysis within the period of three days.
  • 速水 恵次, 北条 勝彦, 池上 達治
    1974 年 17 巻 6 号 p. 194-204
    発行日: 1974/06/20
    公開日: 2009/09/29
    ジャーナル フリー
    Assuming a typical pattern of flow in ejector, authors have made theoretically clear up the following items :
    (1) Equation of performance curve of ejector
    (2) Law of similarity
    (3) Effect of molecular weight of entrained fluid and motive fluid on the performance of ejector
    (4) Hyperbolic law
    (5) Limit of ability of ejector
    (6) Compression ratio
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