The surface coverage of Te deposits on the cleaved KBr surfaces irradiated by various electron beams has been studied by transmission electron microscopy. The surface coverage is improved effectively by the irradiation both before and during deposition. The effects of high energy electrons (500-1, 000 eV) are remarkable rather than that of low energy electrons (20-250 eV) in the range of irradiation density less than 10
11 electrons/cm
2/s. The low energy electrons are also effective in the range from 10
11 to 10
12 electrons/cm
2/s and a maximum value of the surface coverage is obtained at 10
12 electrons/cm
2/s. The maximum value is independent of the incident electron energy. These phenomena can be explained by preferential nucleation sites which are produced by the electron irradiation.
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