Shinku

Development of Ultra High Vacuum Gate Valves with Polyimide Resin Plate Seal and Measurement of their Performance

Kenji YOKOKURA, Minoru KAZAWA

1981 Volume 24 Issue 7 Pages 399-407
Published: July 20, 1981
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.24.399

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Sealing Characteristics of Elastic Metal Gasket and Developing Metal Gasket for Repeated Use

Izumi SAKAI, Hajime ISHIMARU, Gen'ich HORIKOSHI, Kunio TAMAI

1981 Volume 24 Issue 7 Pages 408-416
Published: July 20, 1981
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.24.408

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Elastic metal gasket “Helicoflex” is a flexible metal O-ring composed of an elastic helical core and a metal sheet which wraps the elastic core. Practically, the sealing performance depends largely on the condition of work surfaces of the flange and the gasket. The relations between sealing characteristics and the condition of the work surfaces are described. Especially in the case of smooth mirror finished surface of the flange, the aluminum sheet contacted with flange surface is flowed in the gap between elastic core and flange surface as the flanges are tightened. The surface of the gasket in contact with flange surface is superfinished too with this flowing and the repeated use of the same metal gasket is possible.

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Analysis of the Composition in a-Si_1-xGe_x Alloy Films

Hideo WATANABE, Kwan C. KAO

1981 Volume 24 Issue 7 Pages 417-421
Published: July 20, 1981
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.24.417

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Simple and reasonably accurate methods for determining the composition in a-Si_1-xGe_x films have been proposed. The first one uses the X-ray fluorescence intensity of Ge-Kα line and the weight of the film. The second one uses the X-ray fluorescence intensities of both Ge-Kα line and Si-Kα line. The third one utilizes the signal intensities of Ge and Si ions in ion-micro analysis (IMA). In the latter two methods, a series of a-Si_1-xGe_x films of which compositions have been determined by the first method are used as a standard. Advantages and disadvantages of these methods have been described.
The compositions of a-Si_1-xGe_x films prepared by the glow-discharge technique have been determined by the third method. The results agree quite well with the values which are estimated based on the deposition rate.

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Analysis of Relief-type Gratings in Amorphous As-Se-Ge Films

Tomoaki SAKAI

1981 Volume 24 Issue 7 Pages 422-429
Published: July 20, 1981
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.24.422

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A semiconductor As_10.0-Se_67.5-Ge_22.5 amorphous film is one of the photosensitive materials from which relief patterns can be obtained. Holographic characteristics of the amorphous film are different from that of a photoresist film. The differences have been proved by considering light absorption and side etching properties.
Moreover, we pointed out that “back-side” exposure could improve both diffraction efficiency and ratio of signal to noise.

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Erratum

1981 Volume 24 Issue 7 Pages 443
Published: 1981
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.24.7_443

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